• 공업화학
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• 제26권2호
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• pp.193-198
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• 2015

다양한 상용 $TiO_2$ 담체를 이용한 Ce/Ti 촉매를 습윤함침법으로 제조하여 $TiO_2$의 물리화학적 특성 및 선택적촉매환원(SCR) 반응활성과의 상관관계에 관하여 연구하였다. $TiO_2$의 특성은 XRD, BET, XPS 및 pH와 같은 물리화학적 분석을 통해 수행되었다. Ce/Ti 촉매는 $TiO_2$의 물리화학적 특성에 따라 각기 다른 SCR 활성을 나타내었다. $TiO_2$의 비표면적이 증가됨에 따라 우수한 활성을 나타내었다. CeOx surface density의 경우 $2.5{\sim}14.5CeOx/nm^2$의 범위에서 우수한 활성을 보였으며, $14.5CeOx/nm^2$ 이상에서는 활성이 감소하는 경향을 나타내었다. $TiO_2$의 O/Ti mole ratio는 1.32~1.79의 범위에서 우수한 활성을 나타내었으며, $TiO_2$의 pH의 경우 SCR 활성과 영향이 없음을 확인하였다. 우수한 SCR 활성을 위해서는 세리아 산화물을 높은 비표면적 및 일정 O/Ti mole ratio를 가진 $TiO_2$에 담지되어야 하고 고분산된 세리아 산화물에 의한 낮은 CeOx surface density를 나타내는 촉매를 제조하여야 한다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.61-61
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• 2003

CMP(Chemical Mechanical Polishing)는 VLSI의 제조공정에서 실리콘웨이퍼의 절연막내에 있는 토포그래피를 제어할 수 있는 광역 평탄화 기술이다. 또한 최근에는 실리콘웨이퍼의 나노토포그래피(Nanotopography)가 STI의 CMP 공정에서 연마 후 필름의 막 두께 변화에 많은 영향을 미치게 됨으로 중요한 요인으로 대두되고 있다. STI CMP에 사용되는 CeO$_2$ 슬러리에서 첨가되는 계면활성제의 농도에 따라서 나노토포그래피에 미치는 영향을 제어하는 것이 필수적 과제로 등장하고 있다. 본 연구에서는 STI CMP 공정에서 사용되는 CeO$_2$ 슬러리에서 계면활성제의 농도에 따른 나노토포그래피의 의존성에 대해서 연구하였다. 실험은 8 "단면연마 실리콘웨이퍼로 PETEOS 7000$\AA$이 증착 된 것을 사용하였으며, 연마 시간에 따른 나노토포그래피 의존성을 알아보기 위해 연마 깊이는 3000$\AA$으로 일정하게 맞췄다. 그리고 CMP 공정은 Strasbaugh 6EC를 사용하였으며, 패드는 IC1000/SUBA4(Rodel)이다. 그리고 연마시 적용된 압력은 4psi(Pounds per Square Inch), 헤드와 정반(table)의 회전속도는 각각 70rpm이다 슬러리는 A, B 모두 CeO$_2$ 슬러리로 입자크기가 다른 것을 사용하였고, 농도를 달리한 계면활성제가 첨가되었다. CMP 전 후 웨이퍼의 막 두께 측정은 Nanospec 180(Nanometrics)과 spectroscopic ellipsometer (MOSS-ES4G, SOPRA)가 사용되었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 추계학술대회
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• pp.451-454
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• 2006

WGS reaction over Mo2C and ceria based catalysts was investigated to develop an alternative commercial Cu-Zn/Al2O3 catalyst for fuel processor and hydrogen station. The Mo2C catalysts were prepared by a temperature programmed method and the various metal supported cerium oxide catalysts were prepared by an Impregnation method. The catalysts were characterized by the N2 physisorption, Co chemisorption, XRD, TEM and TPR. It was found that Mo2C and 0.2wt% Pt-40wt%, Ni/CeO2 catalysts had higher activity and stability than the Cu-Zn/Al203 above $260^{\circ}C$. Moreover, CO conversion of more than 85% was observed at $280{\sim}300^{\circ}C$. But all catalysts were deactivated during the thermal cycling runs. The results suggest that these catalysts are an attractive candidate for the alternative Cu-Zn/Al2O3 catalyst for fuel processor and hydrogen station applications.

• 한국분말재료학회지
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• 제13권3호
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• pp.192-198
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• 2006

The nanostructured cerium oxide powders were synthesized by spray thermal decomposition process for the use as the raw materials of resistive oxygen sensor. The synthesis routes consisted of 1) spray drying of water based organic solution made from cerium nitrate hydrate ($Ce(NO_3){_3}6H_2O$) and 2) heat treatment of spray dried precursor powders at $400^{\circ}C$ in air atmosphere to remove the volatile components and identically to oxidize the cerium component. The produced powders have shown the loose structure agglomerated with extremely fine cerium oxide particles with about 15 nm and very high specific surface area ($110m^2/g$). The oxygen sensitivity, n ($Log{\propto}Log (P_{O2}/P^o)^{-n}$ and the response time, $t_{90}$ measured at $600^{\circ}C$ in the sample sintered at $1000^{\circ}C$, were about 0.25 and 3 seconds, respectively, which had much higher performances than those known in micron or $100{\sim}200nm$ sized sensors.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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• pp.260-266
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• 2012

Syngas and hydrogen from the $CeO_2/ZrO_2$ coated foam devices were investigated under simulated solar radiation. The $CeO_2/ZrO_2$ coated SiC, Ni and Cu foam device were prepared using drop-coating method. Syngas production step was performed at $900^{\circ}C$, and hydrogen production process was performed for ten repeated cycles to compare the CeO2 conversion in syngas production step, $H_2$ yield in hydrogen production step and cycle reproducibility. The produced syngas had the $H_2$/CO ratio of 2, which was suitable for methanol synthesis or Fischer-Tropsch synthesis process. In addition, syngas and hydrogen production process is one of the promising chemical pathway for storage and transportation of solar heat by converting solar energy to chemical energy. After ten cycles of redox reaction, the $CeO_2/ZrO_2$ was analyzed using XRD pattern and SEM image in order to characterize the physical and chemical change of metal oxide at the high temperature.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2012년도 춘계학술발표대회 논문집
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• pp.463-469
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• 2012

Solar thermochemical syngas and hydrogen production process bv redox system of metal oxide was performed under direct irradiation of the metal oxide on the SiC ceramic foam device using solar simulator. $CeO_2/ZrO_2$ nanotube has been synthesized by anodic oxidation method. Syngas and hydrogen production process is one of the promising chemical pathway for storage and transportation of solar heat by converting solar energy to chemical energy. The produced syngas had the $H_2/CO$ ratio of 2, which was suitable for methanol synthesis or Fischer-Tropsch synthesis process. After ten cycles of redox reaction, $CeO_2$ was analyzed using XRD pattern and SEM image in order to characterize the physical and chemical change of metal oxide at the high temperature.

• Environmental Analysis Health and Toxicology
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• 제23권2호
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• pp.87-91
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• 2008

In this study, three different sizes of cerium oxide ($CeO_2$) nanoparticles were synthesized and exposed to Caenorhabditis elegans to investigate the potential harmful effect of $CeO_2$ nanoparticles on the environment. The effects of the $CeO_2$ nanoparticles on C. elegans were assessed at multiple levels, such as with respect to stress response gene expression, growth, reproduction and mortality. Moreover, to test the ecotoxicological relevance of $CeO_2$-induced gene expression. The overall results suggest that $CeO_2$ nanoparticles may provoke ecotoxicity in C. elegans especially with respect to gene expression, reproduction and survival, which can comprise an important contribution to knowledge on the ecotoxicity of $CeO_2$ nanoparticles, about which little data are available. This is particularly valuable in the biomarker research on ecotoxicology, as ecological relevance is a crucial criterion for the applicability of the biomarker in field biomonitoring and ecological risk assessment.

• 한국태양에너지학회:학술대회논문집
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• 한국태양에너지학회 2011년도 추계학술발표대회 논문집
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• pp.307-313
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• 2011

금속산화물을 이용한 2단계 산화/환원 반응은 GTL, CTL 의 반응원료인 합성가스 및 수소 생산기술이다. 이 기술은 메탄을 환원제로 사용함으로써 비교적 저온에서 산화/환원 반응을 할 수 있는 장점이 있다. 하지만 반복 사이클의 시연에서 금속산화물의 소결현상으로 인한 활성저하가 이 기술의 문제점 중의 하나이다. 본 연구에서는 2.5 kW Xenon arc lamp 가 설치된 solar simulator를 사용 하였으며, 무기물 다공성 폼 (SiC foam)및 유기물 다공성 폼 (Ni, Cufoam)에 $CeO_2/ZrO_2$ 를 코팅하여 연속적인 합성가스 및 수소 생산 가능성을 알아보았다. 반응 전 후의 $CeO_2/ZrO_2$ 의 결정 구조를 SEM 과 XRD 를 통해 분석하였다.

• 한국세라믹학회지
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• 제47권5호
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• pp.439-444
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• 2010

The usual ceramic process of mixing and milling in state of oxide of $ZrO_2$ and $CeO_2$ was adopted in wet process to manufacture Ce-TZP in this study. The maximum dispersion point of every slurry manufactured with mixture of $ZrO_2$ and $CeO_2$ was neat at pH10. The stable slurry in average particle size of 90 nm can be manufactured when it is dispersed with use of ammonia water and polycarboxylic acid ammonium. The sintered Ce-TZP ceramics manufactured with addition of $CeO_2$ less than 10 mol% was progressed to the fracture of specimen due to the monoclinic phase existence more than 30% at the room temperature. More than 99% of tetragonal phase was created for the sintered body with addition of $CeO_2$ beyond 18 mol%, but the mechanical property degrade on the entire specimen was brought due to the $CeO_2$ existing above 3%. Consequently, the optimal Ce-TZP combined in oxide state was identified in 16 mol% of $CeO_2$ contents.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.239-242
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• 2004

We investigated the nanotopography impact on the post-chemical mechanical polishing (post-CMP) oxide thickness deviation(OTD) of ceria slurry with a surfactant. Not only the surfactant but also the slurry abrasive size influenced the nanotopography impact. The magnitude of the post-CMP OTD increased with adding the surfactant in the case of smaller abrasives, but it did not increase in the case of larger abrasives, while the magnitudes of the nanotopography heights are all similar. We created a one-dimensional numercal simulation of the nanotopography impact by taking account of the non-Prestonian behavior of the slurry, and good agreement with experiment results was obtained.