• Journal of Institute of Convergence Technology
• /
• v.2 no.1
• /
• pp.43-48
• /
• 2012

Generally, in-plane position of moving object is measured referring to the reference pattern attached to the object. From optical camera to magnetic reluctance probe, there are many ways detecting a variation of the periodical pattern. In this paper, the various operating principles developed for in-plane positioning are reviewed and compared each other. And, a novel method measuring large rotation as well as x, y linear displacements is suggested, including a detailed description of the overall system layout. It is a modified version of the surface encoder, which is a robust digital measuring method. From the surface encoder, the rotation of an object is measured indirectly through a compensated input of optical servo and independently of linear displacements. So, the operating range can be extended simply by enlarging the reference pattern, without magnifying the decoding units.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.22 no.1
• /
• pp.77-84
• /
• 2013

In this paper, we review two-dimensional measuring methods referring to target patterns. The patterns consist of two linearly-repeated patterns or is designed repeatedly in two-dimension. The repeated properties are reflectivity, refractivity, air-gapping distance, capacitance, magnetic reluctance, electrical resistance and sloping gradient, etc. However, the optical methods are generally used for high speed processing and density, and their encoding principles are treated here. In case of two-dimensional pattern, as there is not inherently error between single units encoding the pattern except for the metrology frame errors, the end-effector position of an object accompanying the pattern can be measured with respect of the global frame without via error. Therefore, it is regarded as a substitute for laser interferometer with severe environmental constraints and has been applied to the high-accurate planar actuator.