Measuring Method of In-plane Position Based On Reference Pattern

레퍼런스 패턴 기반 면내 위치 측정 방법

Generally, in-plane position of moving object is measured referring to the reference pattern attached to the object. From optical camera to magnetic reluctance probe, there are many ways detecting a variation of the periodical pattern. In this paper, the various operating principles developed for in-plane positioning are reviewed and compared each other. And, a novel method measuring large rotation as well as x, y linear displacements is suggested, including a detailed description of the overall system layout. It is a modified version of the surface encoder, which is a robust digital measuring method. From the surface encoder, the rotation of an object is measured indirectly through a compensated input of optical servo and independently of linear displacements. So, the operating range can be extended simply by enlarging the reference pattern, without magnifying the decoding units.