• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.94.1-94.1
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• 2016

레이저 진단은 플라즈마 진단법 중 가정 정확한 진단법으로 알려져 있다. 특히 진단이 까다로운 고밀도, 자기장, 고압 환경에서도 그 측정 결과가 신뢰성 있다고 잘 알려져 있다. 본 특별 심포지엄에서는 중 성종을 측정 할 수 있는 레일레이 산란과 자유 전자를 측정 할 수 있는 톰슨 산란, 그리고 분자를 측정할 수 있는 라만 산란을 중심으로 발표 할 것이다. 또한 특정 준위를 갖는 원자 및 분자의 거동을 측정할 수 있는 레이저 유도 형광에 대해서도 간단히 발표 할 것이다. 그밖에 레이저 진단의 종류, 원리 등을 설명 하고 한국표준과학연구원에서 이루어 진고 있는 연구 결과에 대해 발표 할 것이다.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.345-352
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• 1997

Recently, in designing optical mask such as 4GDRAM, the scattering effect of electromagnetic wave must be considered. For this reason we claculated directly the mask function using the finite difference time domain(FDTD) method. The modification of image theory with this new mask function could explain clearly the scattering effect at the etched side wall of the submicron optical mask. The characteristics of the various type of alternating PSM were investigated. According to the simulation, the dual wet etch process was the most useful fabrication technique to overcoe the light scattering off at the shifted opening.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.4 no.4
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• pp.895-899
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• 2000

A method of measuring Q of a two port cavity by scattering parameters is proposed. The scattering parameters of a two port cavity resonator are derived by a lumped equivalent circuit model as a function of cavity parameters, including the cavity Q. These can be also obtained by direct measurement with a modern network analyzer, The results show good agreement with those from other well-known methods. This two port measurement can provide additional information such as the coupled power ratio, which is one of the important parameters for the beam accelerating cavities.

• Korean Journal of Materials Research
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• v.5 no.1
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• pp.96-103
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• 1995

This art~cle reports on the formation of T - Gate with O.1$\mu$m foot and 0.4$\mu$m head width at PMMA/P( MMA/MAA) resist structure using a 30KV electron beam lithography system. From the result of Monte Carlo simulation on PMMA/P( MMA/MAA)/GaAs, we obtain the dissipation energy ratio of forwardscattered electron and backscattered electron within 0.1$\mu$m scattering radius is 19.5 : 1 0.1$\mu$m T - gate has been formed with 30KV gaussian electron beam at a 440$\mu C/\textrm{cm}^2$ dosage. The gamma value of PMMA and P(MMA/MAA) at MIBK : IPA=l : 1 developer was 2.3. The overlay accuracy(3$\sigma$) from mix-andmatch of optical stepper and Ekeam lithography system for fabricating HEMT device is accomplished below 0.1$\mu$m.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.4 s.334
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• pp.1-8
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• 2005

The increased effective impurity due to the pocket ion implantation is well blown to give rise to a reduction of the effective mobility of halo MOSFETs. However, further decrease of the effective mobility can be observed in pocket implanted MOSFETs above the mobility reduction due to the Coulomb impurity scattering and the gate bias dependency of the effective mobility can also differ from the simple model describing the mobility behavior in terms of the effective impurity. Phonon scattering and surface scattering as well as impurity Coulomb scattering are also shown to be effective in the degradation of the carrier mobility of pocket implanted MOSFETs. Using the 1-D regional approximation the effect of the distribution of the inversion charge density along the channel on the drain current is investigated. The inhomogeneous channel charge distribution due to pocket implantation is also shown to contribute to the further reduction of the effective mobility in halo MOSFETs.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.46 no.4
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• pp.15-20
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• 2009

In a detection system based on laser light scattering, focusing an excitation laser beam into a focal point of a channel in a microfluidic chip is important for obtaining the highest excitation intensity, and consequently for obtaining a laser light scattering signal using a photodetector with a high efficiency. In this paper, we present a polydimethylsiloxane (PDMS) microfluidic chip consisting of an integrated PDMS microlens for cell detection based on laser light scattering. We fabricated PDMS microlens for optical detection system by simply putting down on PDMS chips. The PDMS microlens was fabricated by photoresist reflow and replica molding. This fabrication technique is simple and has an excellent property in terms of the microlens and a high-dimensional accuracy. The PDMS microlens integrated on the PDMS microfluidic chip has been verified to improve the laser intensity, and accordingly, the signal-to-noise ratio and sensitivity of laser light scattering detection for red blood cells(RBCs)

• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.3
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• pp.119-128
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• 2014

This paper presents a new method for improving the quality of images corrupted by an external source that generates an attenuation and scattering of light like dust, water droplets and fog. Conventional defog methods typically encounter a distortion such that the restored image has low contrast and oversaturation of color in some regions because of the mis-estimated airlight and wrong media transmission. Therefore, in order to mitigate these problems, we propose a robust airlight selection method and local saturation evaluation method for estimating media transmission. The proposed method addresses the wrong media transmission and over-saturation problems caused by the mis-estimated airlight and thereby improves the restored image quality. The results of relevant experiments of the proposed method against conventional ones confirm the improved accuracy of atmospheric light estimation and the quality of restored images with regard to objective and subjective performance measures.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.37 no.12
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• pp.9-14
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• 2000

A numerical method for scattering of electromagnetic waves from a arbitrary shaped grating covered with dielectric slab is considered for TE polarization case from the viewpoints of both reflection grating problem and leaky wave antenna problem. The analysis is based on a periodic Green's function and the method of moments. Numerical results involving some combinations of geometric parameters are presented in terms of relative scattered powers of spectral modes and complex propagation constants.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.17 no.2
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• pp.181-186
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• 1992

The scattering property of TMz illuminated perfectly conducting and dielectric cylinders of arbitrary cross section are analyzed by the boundary element techniques. The boundary element equations are formulated via Maxwell’s equations, weighted residual or Green’s theorem, and the boundary conditions. The unknown surface fields on the boundaries are then calculated by the boundary element integral equations. Once the surface fields are found, the scattered fields in from a perfectly conducting circular and elliptic cylinders, a dielectric circular and elliptic cylinders are numerically analyzed. A general computer program has been developed using the quadratic elements(higher order boundary elements) and the Gaussian quadrature.

• Korean journal of applied entomology
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• v.49 no.2
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• pp.129-137
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• 2010

Four major agricultural insect pests, Bemisia tabaci, Myzus persicae, Plutella xylostella and Tetranychus urticae, were irradiated with 30, 50, 70, or 100 Gy electron-beam. Longevity, egg hatching, emergence, and fecundity of the test insects were measured. Hatchability of B. tabaci, P. xylostella and T. urticae declined with increasing irradiation doses, and all B. tabaci and T. urticae eggs were dead at 100 Gy. When eggs of B. tabaci, P. xylostella and T. urticae were irradiated, hatch was inhibited. B. tabaci adults grown from 70 Gy irradiated eggs did not lay eggs. Fecundity of P. xylostella from the 100 Gy irradiated eggs decreased. When B. tabaci, P. xylostella, M. persicae and T. urticae nymphs/larvae were irradiated, the results were similar as those of the hatched eggs. When P. xylostella pupae were irradiated with 100 Gy, fecundity of emerged adults decreased and no eggs hatched. When B. tabaci, P. xylostella, M. persicae and T. urticae adults were irradiated with 70 and 100 Gy, fecundity decreased and egg hatch of B. tabaci was inhibited. However, the longevity of adults did not change and electron-beam irradiation of all developmental stages had no effect on the longevity of adults.