• Title/Summary/Keyword: 사파이어

Search Result 393, Processing Time 0.025 seconds

사파이어 기판의 방향에 따른 ZnO 박막의 결정화 거동 (Sapphire orientation dependence of the crystallization of ZnO thin films)

  • 조태식
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
    • /
    • pp.1036-1038
    • /
    • 2001
  • The sapphire orientation dependence of the crystallization of ZnO thin films has been studied using real-time synchrotron x-ray scattering. The amorphous ZnO thin films with a 2400-${\AA}$-thick were grown on sapphire(110) and sapphire(001) substrates by radio frequency magnetron sputtering at room temperature. The amorphous ZnO films were crystallization into epitaxial ZnO(002) grains both on the sapphire(110) and on the sapphire(001) substrates. The epitaxial quality, such as mosaic distribution and crystal domain size, of the ZnO grains on the sapphire(110) is high, similar to that of the ZnO grains on the sapphire(001). With increasing the annealing temperature to 600$^{\circ}C$, the mosaic distribution and the crystal domain size of ZnO(002) grains in the film normal direction was improved and decreased, respectively.

  • PDF

사파이어 기판 위에 증착된 ZnO 박막의 후열처리에 따른 발광특성 연구 (Effects of post-annealing treatment at various temperature on the light emission properties of ZnO thin films on sapphire)

  • 강홍성;심은섭;강정석;김종훈;이상렬
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
    • /
    • pp.119-122
    • /
    • 2001
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique at the oxygen pressure of 350 mTorr. In order to investigate the effect of post-annealing treatment with oxygenn pressure of 350 mTorr on the optical property of ZnO thin films, films have been annealed at various substrate temperatures after deposition. After post-annealing treatment in the oxygen ambient, the optical properties of the ZnO thin films were characterized by PL(Photoluminescence) and structural properties of the ZnO were characterized by XRD, and have investigated structural property and optical property for application of light emission device.

  • PDF

액시머 레이저로 증착된 초전도박막과 사파이어 기판간 계면 특성 분석 (Interface Characterization of Supeconducting Thin Film on Sapphire Grown by an Excimer Laser)

  • 이상렬;박형호;강광용
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
    • /
    • pp.148-151
    • /
    • 1995
  • Excimer laser has been used to fabricate superconducting YBa$_2$Cu$_3$O$\sub$7-x/(YBCO) thin films on various substrates. An XeCl excimer laser with an wavelength of 308 nm was used to deposit both buffer layer and superconducting thin film on sapphire substrate. The characterizations of the interface between thin film and substrate were performed. The interfacial properties of thin films on buffered sapphire and on bare sapphire were compared. With a 20 nm PrBa$_2$Cu$_3$O$\sub$7-x/(PBCO) buffer layer, no diffusion layer was observed between film and substrate while the diffusion layer with about 30 nm thickness was observed between film and sapphire without buffer layer.

  • PDF

칩구조와 칩마운트에 따른 InGaN LED의 광추출효율

  • 이주희;홍대운;강의정;이성재
    • 한국광학회:학술대회논문집
    • /
    • 한국광학회 2005년도 제16회 정기총회 및 동계학술발표회
    • /
    • pp.156-157
    • /
    • 2005
  • Monte Carlo photon simulation 기법을 사용하여 광추출효율 관점에서 InGaN LED를 분석하였다. InGaN/sapphire 칩의 경우, AlInGaP나 InGaN/SiC 칩에서와는 달리, 칩의 측벽면을 기울여 주는데서 오는 광추출효율 개선 효과는 매우 미미하였다. 이는 InGaN/sapphire 칩의 경우 사파이어 기판의 굴절률 상대적으로 작아서 활성층으로부터 생성된 광자들의 상당량이 기판으로 넘어갈 때 전반사현상으로 말미암아 기판으로 넘어가지 못하고 상대적으로 두께가 매우 얇은 에피택시 층에 갇히기 때문으로 파악되었다. 이와 같은 효과는 epitaxial side down mount의 광추출효율이 크게 개선되지 못하는 원인으로도 작용하게 되는데, epitaxial side down mount의 잠재력을 살릴 수 있는 방안의 하나는 texture된 기판위에 결정층을 성장시키는 것이라고 할 수 있다.

  • PDF

사파이어 기판 위에 증착된 ZnO 박막의 기판온도와 산소 가스량에 따른 특성 (Effect of Variation of Substrate Temperature and Oxygen Gas Flow of the ZnO Thin Films Deposited on Sapphire)

  • 김재홍;이천
    • 한국전기전자재료학회논문지
    • /
    • 제18권7호
    • /
    • pp.652-655
    • /
    • 2005
  • ZnO thin films on (001) $Al_2O_3$ substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 nm. The influence of the deposition parameters, such as oxygen gas flow, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiments were performed for substrate temperatures in the range of $300\~450^{\circ}C$ and oxygen gas flow rate of $100\~900$ sccm. We investigated the structural and optical properties of ZnO thin films using X-ray diffraction(XRD) and photoluminescence(PL).

습식식각 방법으로 제작한 패턴 형성 사파이어 기판을 가지는 GaN계 청색 LED (GaN Base Blue LED on Patterned Sapphire Substrate by Wet Etching)

  • 김도형;이용곤;유순재
    • 한국전기전자재료학회논문지
    • /
    • 제24권1호
    • /
    • pp.7-11
    • /
    • 2011
  • Sapphire substrate was patterned by a selective chemical wet etching technique, and GaN/InGaN structures were grown on this substrate by MOVPE (Metal Organic Vapor Phase Epitaxy). The surface of grown GaN on patterned sapphire substrate (PSS) has good morphology and uniformity. The patterned sapphire substrate LED showed better light output than conventional LED that improvement 50%. We think these results come from enhancement of internal quantum efficiency by decrease of threading dislocation and increase of light extraction efficiency. Also these LED showed more uniform emission distribution in angle than conventional LED.

광반도체용 사파이어웨이퍼 기계연마특성 연구 (A Study on the Micro-lapping process of Sapphire Wafers for optoelectronic devices)

  • 황성원;김근주;서남섭
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2003년도 춘계학술대회 논문집
    • /
    • pp.82-85
    • /
    • 2003
  • The sapphire wafers for blue light emitting devices were manufactured by the implementation of the surface machining technology based on micro-tribology. This process has been performed by Micro-lapping process. The sapphire crystalline wafers were characterized by DCXD(Double Crystal X-ray Diffraction). The sample quality of crystalline sapphire wafer at surface has a FWHM(Full Width at Half Maximum) of 250 arcsec. This value at the sapphire wafer surfaces indicated 0.12${\mu}{\textrm}{m}$ sizes. Surfaces of sapphire wafers were mechanically affected by residual stress and surface default. Also Surfaces roughness of sapphire wafers were measured 2.1 by AFM(Atom Force Microscope).

  • PDF

사파이어 광섬유를 이용한 용선 온도측정 (Measurement of the Molten Steel Temperature Using the Sapphire Fiber)

  • Kim, Hasul;Homun Bae
    • 한국광학회:학술대회논문집
    • /
    • 한국광학회 2000년도 제11회 정기총회 및 00년 동계학술발표회 논문집
    • /
    • pp.240-241
    • /
    • 2000
  • Sapphire fiber has been used to provide an optical path for the total radiation pyrometry. In measuring the temperature, we use the two-color detector, which consists of a high-performance Silicon detector mounted in a "sandwich" configuration over a Germanium detector. Sapphire fiber can withstand high temperature in the molten steel for two and a half hours. The maximum value of the error is the $\pm$2.5$^{\circ}C$ in the range of 152$0^{\circ}C$~1$600^{\circ}C$. This paper presents the simple scheme for measuring the molten steel temperature in the blast furnace of the iron & steel making process.g process.

  • PDF

사파이어 기판을 사용한 태양전지용 실리콘 박막의 저온액상 에피탁시에 관한 연구 (Low temperature growth of silicon thin film on sapphire substrate by liquid phase epitaxy for solar cell application)

  • Soo Hong Lee;Martin A. Green
    • 한국결정성장학회지
    • /
    • 제4권2호
    • /
    • pp.131-133
    • /
    • 1994
  • $[0.5 \mu\textrm{m} (100) Si/(1102) sapphire]$ 기판상에 액상 에피탁시 방법으로 태양전지용 실리콘 박막형성을 시도하여, 평균 14 $\mu\textrm{m}$ 두께의 실리콘 박막을 아주 낮은 온도범위 $(380^{\circ}C~460^{\circ}C)$에서 성장시켰다.

  • PDF