• Title/Summary/Keyword: 비속도

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SiO2 식각 시 CF4+Ar 혼합비에 따른 플라즈마 내의 화학종 분석

  • Hong, Gwang-Gi;Yang, Won-Gyun;Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.238-239
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    • 2011
  • 최근 반도체 산업은 더 높은 성능의 회로 제작을 통해 초고집적화를 추구하고 있다. 이를 위해서 회로 설계의 최소 선폭과 소자 크기는 지속적으로 감소하고 있고 이를 위한 배선 기술들은 플라즈마 공정을 이용한 식각공정에 크게 의존하고 있다. 식각공정에 있어서 반응가스의 조성은 식각 속도와 선택도를 결정하는 중요한 요소이다. 본 연구에서는 CIS QMS (closed ion source quadrupole mass spectrometer)를 이용하여 CF4+Ar를 이용한 실리콘 산화막의 플라즈마 식각 공정 시 생성되는 라디칼과 이온 종들을 측정하였다. Ar 이온이 기판표면과 충돌하여 기판물질간의 결합을 깨놓으면, 반응성 기체 및 라디칼과의 반응성이 커져서 식각 속도를 향상 시키게 된다. 본 실험에서는 2 MHz의 RPS (remote plasma source)를 이용하여 플라즈마를 발생시키고 13.56 MHz의 rf 전력을 기판에 인가하여 식각할 웨이퍼에 바이어스 전압을 유도하였다. CF4/(CF4+Ar)의 가스 혼합비가 커질수록 식각 부산물인 SiF3의 양은 증가 하였으며, CF4 혼합비가 0일 때(Ar 100%) 비하여 1일 때(CF4 100%) SiF3의 QMS 이온 전류는 106배 증가하였다. 이때의 Si와 결합하여 SiF3를 형성하는 F라디칼의 소모는 0.5배로 감소하였다. 또한 RPS power가 800 W일 때 플라즈마에 의해서 CF4는 CF3, CF2, CF로 해리 되며 SiO2 식각 시 라디칼의 직접적인 식각과 Si_F2의 흡착에 관여되는 F라디칼의 양은 CF3 대비 7%로 검출되었고, 식각 부산물인 SiF3는 13%로 측정되었다. Ar의 혼합비를 0 %에서 100%까지 증가시켜 가면서 측정한 결과 F/CF3는 $1.0{\times}105$에서 $2.8{\times}102$로 변화하였다. SiF3/CF3는 1.8에서 6.3으로 증가하여 Ar을 25% 이상 혼합하는 것은 이온 충돌 효과에 의한 식각 속도의 증진 기대와는 반대로 작용하는 것으로 판단된다.

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Effect of Carbon Black Concentration and Monomer Compositional Ratio on the Flow Behavior of Copoly(styrene/butyl methacrylate) Particles (카본블랙의 농도 및 단량체 구성비에 따른 스티렌-부틸메타크릴레이트 공중합체 입자의 유동성)

  • Park, Moon-Soo;Moon, Ji-Yeon
    • Elastomers and Composites
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    • v.45 no.2
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    • pp.122-128
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    • 2010
  • We measured shear viscosity of copoly(styrene(St)/butyl methacrylate(BMA)) (co-PSB) particles, with a capillary rheometer at $170^{\circ}C$, prepared by suspension polymerization with hydrophobic silica as a stabilizer. co-PSB particles with the weight average molecular weights of lower than 74,800 g/mol displayed a Newtonian behavior at low shear rates. With the weight average molecular weight exceeding 136,800 g/mol, co-PSB particles showed shear thinning against shear rates and the absolute value of the slopes between shear viscosity vs. shear rate increased. When the ratio between St and BMA changed from 7/3 to 5/5 to 3/7, shear viscosity and glass transition decreased despite similar molecular weights. When the ratio was 1/9, it showed a large increase in initial shear viscosity despite reduced glass transition. Shear viscosity exhibited an increase in proportion to carbon black concentration. The effect of carbon black concentration on the shear viscosity of co-PSB composites was less pronounced compared to varying molecular weights and/or compositional ratio.

Development and Application of IoT-based Contactless Ultraosonic System (IoT 기반 비접촉 초음파 측정 시스템 개발 및 적용)

  • Kim, Jihwan;Hong, Jinyoung;Kim, Rrulri;Woo, Ukyong;Choi, Hajin
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.24 no.3
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    • pp.70-79
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    • 2020
  • The main objective of this research to develop an IoT based wireless contactless ultrasonic system (ICUS) and its application to concrete structure. The developed system consists of 16 mems, 2Mhz digitizer, amplifying circuit, FPGA, and wifi module, enabling to measure leaky surface waves from concrete specimens without physical coupling process and wires. Multi-channel analysis is performed to improve the accuracy of data analysis, and the velocity of leaky surface waves and acoustics are derived. Field inspection of railroad concrete sleepers is conducted to evaluate the performance of the system and to compare the results with conventional ultrasonic pulse velocity (UPV). As a result of the field inspection, UPV was limited to evaluate damages. This is because crack pattern of railroad sleepers is parallel to ultrasonic ray path and accessibility of the railroad at the field is disadvantageous to contact-based UPV. On the other hand, ICUS possibly detect the damages as reduction of dynamic modulus by up to 59% compared to non-damaged specimen.

Comparative Performance of Differential Space-Time Block Codes Over Time-Selective Fading Channels (시변 페이딩 채널에서 검파방식에 따른 차분 공간-시간 블록 부호의 성능 비교)

  • Kang, Sung-Ho;Kim, Young-Ju;Lee, In-Sung
    • The Journal of the Acoustical Society of Korea
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    • v.25 no.8
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    • pp.356-361
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    • 2006
  • We present the performance of differential space-time block decoders. which does not require the channel state information. We suggest the structure of the multiple blocks differential space time decoders. which does not require the channel state information, and analyze the Performances. In quasi-static flat fading channels. the Performance of multiple blocks differential detection (MD-STC) outperforms that of 2 blocks(D-STC) by 1.5dB. But in the time-selective fading channels due to Doppler frequency $(f_d)$, the performance of MD-STC degrades as the vehicular speed is greater than 200km/hr in 802.16e systems, where the data transmission rate is 144kbps.

Case Analysis of Seismic Velocity Model Building using Deep Neural Networks (심층 신경망을 이용한 탄성파 속도 모델 구축 사례 분석)

  • Jo, Jun Hyeon;Ha, Wansoo
    • Geophysics and Geophysical Exploration
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    • v.24 no.2
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    • pp.53-66
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    • 2021
  • Velocity model building is an essential procedure in seismic data processing. Conventional techniques, such as traveltime tomography or velocity analysis take longer computational time to predict a single velocity model and the quality of the inversion results is highly dependent on human expertise. Full-waveform inversions also depend on an accurate initial model. Recently, deep neural network techniques are gaining widespread acceptance due to an increase in their integration to solving complex and nonlinear problems. This study investigated cases of seismic velocity model building using deep neural network techniques by classifying items according to the neural networks used in each study. We also included cases of generating training synthetic velocity models. Deep neural networks automatically optimize model parameters by training neural networks from large amounts of data. Thus, less human interaction is involved in the quality of the inversion results compared to that of conventional techniques and the computational cost of predicting a single velocity model after training is negligible. Additionally, unlike full-waveform inversions, the initial velocity model is not required. Several studies have demonstrated that deep neural network techniques achieve outstanding performance not only in computational cost but also in inversion results. Based on the research results, we analyzed and discussed the characteristics of deep neural network techniques for building velocity models.

An Experimental Study on the Optimum Mix Design and Site Application Case of Soil Mixing Wall for Trench Stability (구벽안정성을 위한 SMW 최적배합비 및 현장적용 사례에 관한 연구)

  • Kwon, Yeong-Ho
    • Journal of the Korea Concrete Institute
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    • v.27 no.4
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    • pp.419-426
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    • 2015
  • The purpose of this study is to investigate experimentally the optimum mix design and site application case of soil mixing wall (SMW) method which is cost-effective technique for construction of walls for cutoff wall and excavation support as well as for ground improvement before constructing LNG storage tank typed under-ground. Considering native soil condition in site, main materials are selected ordinary portland cement, bentonite as a binder slurry and also it is applied $1,833kg/m^3$ as an unit volume weight of native soil, Variations for soil mixing wall are as followings ; (1) water-cement ratio 4cases (2) mixing velocity (rpm) 3levels (3) bleeding capacity and ratio, compressive strength in laboratory and site application test. As test results, bleeding capacity and ratio are decreased in case of decreasing water-cement ratio and increasing mixing velocity. Required compressive strength (1.5 MPa) considering safety factors in site is satisfied with the range of water-cement ratio 150% below, and test results of core strength are higher than those of specimen strength in the range of 8~23% by actual application of element members including outside and inside in site construction work. Therefore, optimum mix design of soil mixing wall is proposed in the range of unit cement $280kg/m^3$, unit bentonite $10kg/m^3$, water-cement ratio 150% and mixing velocity 90rpm and test results of site application case are satisfied with the required properties.

Relationship Between Microstructure and Electrical Resistivity of Sb-InSb-and Sn-Bi Eutectic Alloys (Sb-InSb및 Sn-Bi공정합금의 미세조직과 전기비저항)

  • Seok, Myeong-Jin;Choe, Gil-Hyeon;Lee, Dong-Cheol;Mun, In-Hyeong
    • Korean Journal of Materials Research
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    • v.4 no.1
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    • pp.97-106
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    • 1994
  • The dependence of the electrical resistivity on the eutectic composition and growth rates was investigated in the unidirectionally solidified Sb-InSb and Sn-Bi eutectic alloy systems, which were generally classified into the groups of f-f and nf-f eutectic system. Sb-InSb alloys containing 26-34wt.% In and Sn-Bi alloys containing 53-65wt.%Bi were prepared in vacuum sealed in a silica tube, and then these were unidirectionally solidified. Electrical resistivity of the specimens prepared by cutting the crystal section in parallel with the transverse direction and by cutting in longitudinal direction was measured. As the growth rate increased, the Sb-InSb and Sn-Bi eutectic alloys showed that the resistivity of longitudinal to the growth direction was increased but that of transverse to the growth direction was decreased. In the case of Sb-InSb eutectic alloy, increas~ng the phase boundary area and decreasing the fiber directionallity caused to increase the $p \; \parallel$ , while increasing the phase boundary area increased the $p \; \\perp$ As expected, the eutectic microstructure could be analysed well in terms of electrical resistivity.

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Improvement of A Rice Seed Pelleting Machine for Direct Seeding in Rice Cultivation (직파용 벼 펠렛종자 제조장치 성능 개선 연구)

  • 유대성;유수남;최영수
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2002.02a
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    • pp.35-41
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    • 2002
  • 본 연구는 기존 벼 펠렛종자 제조장치의 제조성능 및 제조 벼 펠렛종자 품질향상을 위하여 펠렛재료 공급부, 성형부, 펠렛종자 배출부를 개선 설계 제작하여 그 성능과 제조 벼 펠렛종자 특성을 구명함으로써 직파용 벼 펠렛종자 대량생산을 위한 제조장치 개발의 기초 자료를 얻고자 수행하였으며 그 주요 결과를 요약하면 다음과 같다. 펠렛재료의 일정한 공급과 펠렛재료가 성형 홈으로부터의 이탈하는 것을 줄이고, 펠렛종자의 완전한 배출이 가능하도록 한 벼 펠렛종자 제조장치를 설계·제작하였으며, 벼 펠렛종자 제조장치를 상토 종자혼합비, 성형롤의 회전속도에 따라 실험한 결과 벼 펠렛종자 제조 능력은 성능 개선 전의 펠렛종자 제조장치에 비하언 약 1.7배 향상된 제조능력을 보였으며, 성형률은 최대 약 89 %로 나타나 개선 전의 71%에 비해 18 %정도 성형률이 향상되었다. 그러나, 벼 종자손실률은 약 24% ∼ 49%로 거의 비슷한 수준인 것으로 나타났다. 제조된 벼 펠렛종자의 특성을 분석한 결과 펠렛종자의 구형률은 99.1%로 거의 구형으로 제조됨을 알 수 있었으며, 무게는 제조 직후에는 약 1.70 g, 완전 건조 후에는 1.31 g으로 나타났고, 직경은 약 12.03 mm에서 건조 후 11.53 mm로 축소되었다. 개선 전에 비해 직경과 무게가 약간씩 증가한 것으로 나타났다. 이러한 결과는 재선된 제조장치에서 펠렛재료가 성형롤의 성형 홈에 압축 공급되고, 펠렛재료의 손실도 적었기 때문으로 판단된다. 제조된 한 개의 벼 펠렛종자 내에 포함된 완전 벼 종자의 개수는 상토 종자혼합비가 커질수록 성형롤의 회전속도가 낮을수록 많아지는 것으로 분석되었으며, 모두 펠렛종자 당 평균 약 3 개 이상의 완전 벼 종자를 포함하고 있는 것으로 나타났다. 개선 전에 비하여 펠렛종자 내에 포함된 평균 완전 종자수도 증가하였으며, 3개 이상 완전 종자를 포함한 펠렛종자의 비율도 증가하여 유압에 의한 펠렛재료 공급과 성형롤의 개선효과가 있었던 것으로 보인다. 음지 건조 후 벼 펠렛종자의 압축강도는 약 132 N ∼ 152 N으로 조사되었으며, 개선전에 비하면, 약 30 %가 증가한 것으로 나타났다. 출아율 실험 결과 상토 종자혼합비 6 : 1, 성형롤 회전속도 7 rpm에서 건답직파는 100%, 답수직파는 97 %의 출아율을 보여 만족할 만한 결과를 얻었으나, 그 외의 경우는 거의 90 % 이하의 출아율을 보여 출아율을 높이기 위한 방안이 필요한 것으로 보인다. 본 연구의 벼 펠렛종자 제조장치의 적정운전 조건은 제조된 벼 펠렛종자의 특성과 출아율을 고려해 볼 때 상토 종자혼합비 6 : 1, 성형롤 회전속도 약 7 rpm으로 판단되며, 이 때 제조능력은 시간당 약 65 Kg(펠렛종자 약 39,000 개), 성형률 약 87 %, 종자손실률은 약 30 %, 펠렛종자 내 평균 종자수는 약 5.5 개, 완전 벼 종자 3개 이상 포함 펠렛종자 비율은 약 100 %가 될 것으로 보인다.

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An effect of the shape of cutting blade on cutting resistance of rice stalk (콤바인 예취날의 형상이 볏짚절단저항에 미치는 영향)

  • Choi, Woo-Young;Kim, Tae-Han
    • Current Research on Agriculture and Life Sciences
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    • v.22
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    • pp.41-48
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    • 2004
  • This study is performed in order to provide the basic information needed for the development of cutting blade for combine. By comparing the developed cutting blade of which were made groove of the surface with the common cutting blade. Friction force and cutting resistance by the cutter bar speed ratio and moisture content of rice stalk were shown as follows: 1. The friction force of the developed cutting blade is shown at the average value $0.12kg{\cdot}m$ as 25% lower than one of the common blade at the average value $0.16kg{\cdot}m$. 2. The cutting resistance of the developed cutting blade is shown as respectively 12%, 15% and 20% lower than one of the common blade at the moisture content of rice stalk of 14.2%, 55.3% and 84.2%. 3. The cutting resistance of cutting blade by two different driving types is shown that the one by double driving type is $0.2kg{\cdot}m$, and the one by single driving type is $0.24kg{\cdot}m$. 4. Optimum cutter bar speed ratio of cutting blade is shown as different according to the moisture content of rice stalk.

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A Study on the Application of Variable Speed Limits(VSL) for Preventing Accidents on Freeways (고속도로 교통사고 예방을 위한 가변제한속도 적용방안 연구)

  • Park, Joon-Hyung;Hwang, Hyo-Won;Oh, Cheol;Chang, Myung-Soon
    • Journal of Korean Society of Transportation
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    • v.26 no.4
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    • pp.111-121
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    • 2008
  • Using variable speed limits (VSL) is a key strategy for preventing traffic accidents and alleviating traffic congestion. This study proposes an algorithm to operate VSLs on freeways for traffic safety. The proposed algorithm consists of two components based on accident likelihood estimation and analysis of safe stopping distance under various environmental conditions. A binary logistic regression technique is used for estimating accident likelihood. It is expected that the proposed algorithm would be successfully applied in practice in support of an integrated traffic and environmental condition monitoring system. Technical issues associated with the field implementation are also discussed.