• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.40-41
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• 2002

차세대 반도체 및 나노소자 산업에 대한 국제적 기술은 고밀도 직접화의 추세에 따라서 .게이트 산화막의 두께가 급속히 작아지는 추세이다. 지금까지 이산화규소(A1₂O₃)가 게이트 산화막으로 주로 사용되어 왔으나 점차 SiON 혹은 high k 박막으로 바뀌고 있다. 본 연구에서는 차세대 반도체 소자에 사용될 게이트 산화막 물질인 SiON 박막과 Al₂O₃박막에 대한 SE(Spectroscopic Ellipsometry)분석 모델을 확립하였고, SE 측정결과를 TEM, MEIS, XRR의 결과들과 비교하였다. SiON 박막의 굴절률 값은 Si₃N₄와 SiO₂가 물리적으로 혼합되어 있다고 가정하여 Bruggeman effective medium approximation을 사용하여 구하였다. 동일한 시료를 절단하여 TEM, MEIS, 그리고 XRR에 의하여 SiON 박막의 두께를 측정하였으며, 그 결과 SE와 XRR에 의해 얻어진 박막두께가 TEM과 MEIS의 결과 값보다 약 0.5 nm 크게 주어짐을 알 수 있었다(Table 1 참조). 본 연구결과는 비파괴적이며 비접촉식 측정방법인 SE가 2～4nm 두께의 초미세 SiON 박막의 두께와 N 농도의 상대적 값을 빠르고 쉽게 구할 수 있는 유용한 측정방법 임을 보여주었다. 기존의 게이트 산화물인 SiO₂를 대체할 후보 물질들 중의 하나인 A1₂O₃의 유전함수를 구하기 위하여 8 inch, p-type 실리콘 기판 위에 성장된 5 nm, 10 nm, 및 20 nm 두께의 A1₂O₃ 박막의 유전함수와 두께를 측정하였다. 이 시료들에 대한 SE data는 vacuum-UV spectroscopic ellipsometer를 사용하여 세 개의 입사각에서 0.75 eV에서 8.75 eV까지 0.05 eV 간격으로 측정되었다. A1₂O₃ 박막의 유전함수와 두께를 얻기 위하여 공기층/A1₂O₃ 박막/Si 기판으로 구성된 3상계 모델을 사용하였다. Si 기판에 대한 복소 유전함수는 문헌상의 값(1)을 사용하였고, A1₂O₃ 박막의 유전함수는 5개의 미지상수를 갖는 Tauc- Lorentz(TL) 분산함수(2)를 사용하였다. A1₂O₃ 박막의 경우 두께가 증가함에 따라서 굴절률이 커짐을 알 수 있었다.

• Journal of the Korean Geophysical Society
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• v.3 no.4
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• pp.251-260
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• 2000

Applicabilities of two numerical methods, the 2-dimensional and the 3-dimensional method, are evaluated to inverse test results obtained from the underwater SASW(Spectral -Analysis-of-Surface-Waves) method. As a result of this study, it has been found that the 2-dimensional method can supposed to be applicable for the cases where stiffness of soil layer increases gradually with depth, and the stiffness is relatively low. For the other cases, however, it has been concluded that the 3-dimensional method needs to be applied to determine realistic theoretical dispersion curves. An example is also shown that in situ soil profile underwater is estimated from experimental dispersion curves using the 3-dimensional method. As a results, it can be concluded that the underwater SASW method can be effectively applied to explore the underwater soil condition.

• The Journal of the Korea institute of electronic communication sciences
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• v.16 no.2
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• pp.385-394
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• 2021

In this paper, a new equation of electromagnetic wave transmission matrix was proposed to calculate the reflected power and transmitted power for the multi-layered planar lossy structure. The applied human leg was modeled as a four-layer planar structure of skin, fat, muscle and bone. The complex dielectric constant to consider the loss of each of these layers was calculated using the 4-pole cole-cole model parameter. When electromagnetic waves were incident on the skin surface, total reflected and transmitted power, and human body loss were calculated for a frequency band of 0.1 to 20.0 GHz. And for various muscle thicknesses, the power reflected only from the outermost bone and re-radiated from the skin was calculated. It was confirmed that at the muscle thickness of 3.0 mm and the frequency of 4.6 GHz the return loss was -6.13 dB, which was 3.42 dB lower than the average value.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.419-424
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• 2019

In this paper, we proposed an algorithm to estimate the desired target in wideband jamming signal environment. In order to suppress the jamming signal, we use the spatial time adaptive algorithm and QR decomposition to obtain the optimal weight. The spatial time adaptive algorithm of adaptive array antenna system multiplies the tap delay signal by a complex weight to obtain a weight. In order to minimize the power consumption because of the inverse matrix, optimal weight is obtained by using QR decomposition. Through simulation, we compare and analyze the performance of the proposed algorithm and the existing algorithm. In the target estimation of [-40o,0o,+40o], the proposed algorithm estimated all three targets, but the existing algorithm estimated only [0o] due to of the jamming signal. We prove that the proposed algorithm improves performance by removing the jamming signal and estimating the target accurately.

• Journal of Broadcast Engineering
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• v.24 no.3
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• pp.452-462
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• 2019

A digital hologram, which is one of the next generation visual systems, can be generated and displayed in various formats, and a digital hologram is created in accordance with the characteristics of the system for display. Diffraction efficiency can be used as a measure of the characteristics of digital holograms generaged under various conditions in various display environments. In this paper, diffraction efficiency for computer-generated hologram (CGH) under various conditions was measured. This paper discusses the generation conditions that should be considered in hologram display. We compared each condition by measuring the intensity of the first order diffraction pattern of the fringe generated under the Fresnel condition for the phase hologram. Through this paper, we showed the tend about characteristics of the diffraction efficiency according to object point, reconstruction distance, laser and SLM.

• Communications of Mathematical Education
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• v.35 no.2
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• pp.193-212
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• 2021

This study is to support the school's mathematics exploration activities. Mathematics exploration is a very important mathematical activity not only for mathematics teachers, but also for students. Looking at the development of mathematics, it has been extended from one mathematical fact to a new mathematical fact. Mathematics exploration activities are not unique to mathematicians, and opportunities are equally given to all ordinary people who are learning mathematics and teaching mathematics. Therefore, the purpose of this study is to develop a method of mathematics exploration activities that teachers and students can perform in schools, based on mathematics exploration activities based on one mathematical fact. Specifically, the cosine law was selected as one mathematical fact, and mathematical exploration activities were performed based on the cosine law. By analyzing the results of these mathematics exploration activities, we developed a method to explore school mathematics. Through the results of this study, it is expected that mathematics exploration activities will be conducted equally by students and teachers in the mathematics classroom.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.25 no.4
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• pp.565-571
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• 2021

In this paper, a compensation scheme of frequency selective IQ mismatch for high-performance radar systems based on commercial RFIC's is proposed. Besides, an optimization model and its solution based on the dimension reduction scheme using singular value decomposition are also proposed to design the optimal IQ mismatch compensation digital filter with complex coefficients. The performance of the proposed method had been analyzed through experiments using the IQ mismatch measurement and compensation system implemented on an FPGA board with a target RFIC and compared with the previous method. The experiment result showed a performance improvement of the proposed method over the existing one without noticeable increments in complexities. These performance analysis results showed that the limitation of using commercial RFIC's in high-performance radar systems due to the undesirable maximum SNR cap caused by their IQ mismatches could be overcome by employing the proposed method.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.6
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• pp.644-653
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• 2013

In this paper, a formulation for obliquely incident electromagnetic wave has been presented for an analysis of highpower electromagnetic pulse penetration into multilayered dispersive media. Based on generalized models of measured dielectric constants and propagation channels reflecting the Earth's general features, the propagation phenomenon of the obliquely incident early-time(E1) high altitude electromagnetic pulse(HEMP) is analyzed. In addition, the polarization and critical angle are also considered. It is found that the total reflection occurs at an incident angle of about 38 degrees at the soil-rock interface, and that the parallel-polarized E1 HEMP penetrates better than the perpendicular-polarized one. The peak level of the penetrating electric field is found to be 5.6 kV/m at normal incidence, regardless of the type of polarization, and E1 HEMP is greatly reduced near the critical angle. Moreover, the penetrating E1 HEMP is analyzed as a variation of moisture content and depth of materials, resulting E1 HEMP could be useful in determining the levels of shielding required for buried facilities.

• The Journal of the Acoustical Society of Korea
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• v.22 no.1
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• pp.1-6
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• 2003

This paper analyses the performance of either the minimum variance distortionless response (MVDR) or the recursive least square (RLS) beamformer structured on the systolic array. Provided that the snapshot vector including the desired user's signal and the interferences with the noise is received at the array antenna. In order to improve the quality of received signal, MVDR or RLS algorithm can be utilized to update the beamformer weights recursively. Furthermore to increase the channel capacity, by the usage of the above schemes, the effect of the spatial filtering can be obtained which constructively combining multipath components corresponding to the desired user whereas the multiple access interferences (MAI) is nulled out on spatial domain. This paper introduces the MVDR and RLS beamformer structured on systolic array conducting the spatial filtering, and its performance under the multipath fading channel in the presence of multiple access interferences will be analyzed. To show the superior spatial filtering performances of the proposed scheme employing the systolic way structured beamformer, the computer simulations are carried out. And the validity of practical deployment of the proposed scheme will be confirmed throughout showing the BER behaviors and the beampatterns.

• Journal of the Institute of Convergence Signal Processing
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• v.11 no.1
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• pp.32-40
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• 2010

In this work, the method of acquiring the pupil function of optical system is proposed. The wavefront aberration and the intensity distribution of pupil can be analysed with the pupil function. This system can be adopted to the manufacturing line of optical pickup directly and also has good performance to analysing various property of optical instrument. It is one kind of inverse problem to get pupil functions by 3D beam data. The extended Nijboer-Zernike(ENZ) approach recently proposed by Netherlands research group is adopted to accompany to solve these inverse problem. The ENZ approach is one of a aberration retrieval method for which numerous approaches are available. But this approach is new in the sense that it use the highly efficient representation of pupil functions by means of their Zernike coefficients. These coefficients are estimated by using matching procedure in the focal region the theoretical 3D intensity distribution and measured 3D intensity distribution. The algorithm that can be applied more general circumstance such as high-numerical aperture instrument is developed by modifying original ENZ approach. By these scheme, MS windows based GUI program is developed and the good performance is verified with generated 3D beam data.