• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.357-360
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• 2002

Nowadays, the improvement and development of Multi-media, information and communication technology are rapidly processed. And many products, for example, digital camera, digital camcorder, and PDA, are used for them. They need large data storage capacity and small size, light storage system. Due to that, many studies and researches in data storage system have been carried out. Especially, micro drive system was presented by IBM.(1) However, its system is expensive and uneasy to be portable. In ODD technologies, 1 inch drive system is not yet or in processing status.(2) If to be possible and to be come up, it is cheap than HDD system and easy to transfer information. In this paper, a miniaturized actuator(about linch) is designed and tested for ODD system. Specially, it is adapted for NFR(Near-field Recoding) system using SIL(Solid Immersion Lens). It is the dual-servo actuator which consists of a coarse actuator and fine actuator. Its actuating force generation method is VCM(Voice Ceil Motor). The fine actuator has 4-wire suspensions and bobbin wrapped by coil and includes focusing motion as well as tracking motion. The coarse actuator has an actuating coil and V-grooved guide mechanism. Also, the characteristics of the designed actuator is estimated by sine-swept mode and LDV(Laser Doppler Vibro-meter).

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1439-1443
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• 2007

In this paper, vibration reduction techniques of a voice coil motor (VCM) actuator are presented for AFM imaging system. The damping coefficient of the actuator driven by VCM with a flexure hinge is quite low and it cause the about 30dB peak amplitude response at the resonance frequency. To decrease this peak response, we design and apply elliptical band-stop filters to xy and z axis VCM actuator. Frequency response of each actuator with filter is measured to verify the effect of the filters. As a sensor, capacitive sensor is used. Vibration reduction rate of the xy actuator with the filter is also measured while real AFM scanning condition. As another method, closed loop control with the capacitive sensor is applied to the xy axis actuator to add an electrical damping effect and vibration reduction rate measured. These vibration reduction rates with each method are compared. In the case of z axis actuator, the frequency response of force (gap) control loop is measured. For comparison, the frequency response using a conventional PID controller is also obtained. Finally, the AFM image of a standard grid sample is measured with the designed controller to analyze the effect in the AFM imaging.

• 한국정밀공학회지
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• 제19권12호
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 한국공작기계학회논문집
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• 제17권4호
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• pp.51-58
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• 2008

This paper presents a new design of the precision stage for the reticle in lithography process and a low hunting control method for the stage. The stage has three axes for X, Y, ${\theta}_z$ those actuated by three voice coil motors individually. The designed reticle stage system has three gap sensors and voice coil motors, and supported by four air bearings and the forward/inverse kinematics of the stage were solved to get an accurate reference position. When a stage is in regulating control mode, there always exist small fluctuations(stage hunting) in the stage movement. Because the low stage hunting characteristic is very important in recent lithography and nano-level applications, a special regulating controller for ultra low hunting is proposed in this paper. Also this research proposed the 2-step transmission system for preventing the noise infection from environmental devices. The experimental results showed the proposed regulating control system reduced hunting noise as 35nm(rms) when a conventional PID generates 77nm(rms) in the same mechanical system. Besides the reticle stage has 100nm linear accuracy and $1{\mu}rad$ rotation accuracy at the control frequency of 8kHz.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.754-758
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• 2000

In recent years, the LDM(Linear DC Motor) is widely used, because it has more merits than other rotary motors. First, if system requires linear motion, LDM realizes direct linear motion as rotary motor does not. Second, system is simple and easy to control, and so on. In optical disc drive, a tracking system consists of two parts. One is fine actuating and the other is coarse actuating. For coarse actuating VCM(Voice Coil Motor) actuator is used as a basic drive mechanism. In this paper, MC(Moving Coil) type LDM is designed, manufactured and controlled. System is composed of mechanical-electromagnetic component, therefore mechanical loss and electromagnetic loss exist. The dominent mechanical loss is friction which results from sliding between guide shaft and hole. Therefore, this paper shows the friction compensation control. High speed and accurate position is not gained only PID control, therefore other control method is applied to the system.

• 한국정밀공학회지
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• 제18권8호
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• pp.174-181
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• 2001

Nowadays, the improvement and development of Multi-media and information & communication technology is rapidly processed. They need large data storage capacity. So that, many studies and researches in data storage have been carried out. According to them, the data storage capacity has been increased. But the limitation of storage capacity is happened for several problems. One of them is spot & pit size in optical and magnetic data storage and another is the resolution of actuators. The problems in spot & pit size are covered by new data storage methods-- for examples, AFM(Atomic Force Microscopy), MO(Magneto-optical) system, and NFR(Near-Field decoding) system etc. But the resolution limit of an actuator was not developed and doesn\`t follow up the development of spot & pit size. Because of them, we should improve a resolution of an actuator. Especially, in this paper an actuator if studied and designed for NFR (in using SIL(Solid Immersion Lens) system. It is a dual stage actuator, which consists of a Fine actuator and a Coarse actuator. and should desire 100nm accuracy. Its actuating force generation method is VCM(Voice Coil Motor). The Fine actuator is composed of 4-leaf springs and a bobbin wrapped by coil. The Coarse actuator has Coils and 3-Roller bearings. Also, The Characteristics of designed actuator for NFR system is estimated by Sine-Swept mode and LDV(Laser Doppler Vibro-meter).

• Journal of Advanced Marine Engineering and Technology
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• 제37권1호
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• pp.91-98
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• 2013

엔진 및 회전기기의 진동은 선체의 피로도를 증가시켜 내구성을 저하시키는 원인이 된다. 이를 방지하기 위하여 엔진 및 회전기기와 선체사이에는 댐퍼를 부착하여 진동을 최소화 하고 있다. 일반적으로 선박에 부착하는 댐퍼는 수동형 댐퍼로 중 고주파의 특정 진동영역에 대하여 제진 특성을 갖도록 설계되어있지만 저주파영역에서는 그 효과를 기대하기 힘들다. 이에 본 연구에서는 보다 광대역의 진동신호에 대해 높은 제진특성을 얻기 위하여 VCM을 이용한 능동형 제진 장치를 개발하였다. 제진장치를 제어하기 위해 라우스휴리츠 안정조건과 한계감도법을 이용하여 PID제어기를 구성하였고, 제어기 출력은 2상한과 4상한 초퍼회로를 이용하여 VCM을 구동할 수 있도록 하였다. 시뮬레이션과 실제 실험을 통하여 제어알고리즘과 제어장치의 유용성을 확인하였다.

• 대한기계학회논문집A
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• 제20권10호
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• pp.3079-3094
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• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.