• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.581-582
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• 2007

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.119-120
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• 2008

Using the extensional vibration mode of PZT bar, a piezopump is successfully made. The traveling extensional wave along the circumference of the bar is obtained by dividing standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic bar.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1824-1827
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• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.5
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• pp.567-573
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• 2014

Since the development of microelectromechanical systems (MEMS) technology for the medical field, various micro-fluid transfer systems have been studied. This paper proposes a micro-piezoelectric pump that imitates a stomach's peristalsis by using two separate piezoelectric elements, in contrast to existing micro-pumps. This piezoelectric pump is operated by using the valve-less traveling wave of peristalsis movement. If the piezoelectric plates at the two separated plates are actuated at the input voltage, a traveling wave occurs between the two plates. Then, the fluid migrates by the pressure difference generated by the traveling wave. Finite element analysis was performed to understand the mechanics of the combined system with piezoelectric elements, elastic structures, and fluids. The effects of design variables such as the chamber height and number of ceramics on the flow rate of the fluid were examined.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.91-91
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• 2009

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement To solve these problems, we propose a novle type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model is consisted of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for sealing tightly and disk springs for the pressurization of pump body.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.215-216
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• 2008

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2763-2768
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• 2007

Recently, as the semiconductor production technology develops, there has been growing interest in the cooling system using micro fluid pump. Among the various types of micro fluid pump, the valve-less diffuser/nozzle has been extensively studied in recent years. However, the flat-walled diffuser/nozzle flow has not been clearly looked into due to its non-linear characteristics. In this paper, the flow characteristics of the flat-walled diffuser/nozzle have been analyzed using similitude model and simulations. Similitude models are designed so that the flow pattern is same as that of 1/10 scale flow by using high viscous fluid as working fluid. The results are compared to the simulations. It is shown that the flow characteristics of 2D simulation are different from 3D simulations at high Re region, and the measured pump efficiency is highly dependent on the pressure difference as well as the channel geometry. From these results, the desirable conditions for the efficient pump is discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1282-1285
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• 2004

The high voltage driving system with multi-phase shifter including piezoelectric actuators comprised a driving power unit for outputting the driving power by converting input alternate current into direct current, a frequency shifting unit for supplying the direct current power and shifting or generating a frequency, a high-voltage amplification unit for amplifying the input signal outputted from the driving power unit and the frequency shifting unit into a high-voltage signal, and a phase shifting unit for shifting the phase difference of the amplified signal applied to the high-voltage amplification unit and driving plural piezoelectric actuators sequentially. The results that the operating voltage was stable, the voltage loss ratio was low and the response velocity was fast could be obtained. An experiment on performance of the high voltage driving system with multi-phase shifter designed and manufactured as above described was conducted by using a piezoelectric pump having 3 sheets of round unimorph piezoelectric actuators laminated respectively in a rectangular case. It sucks any fluid by causing the first piezoelectric actuator to shift from the inlet porter side, the phase delay of 60$^{\circ}$ causes the second piezoelectric actuator to begin to shift, and the phase delay of 120$^{\circ}$ causes the third piezoelectric actuator to begin to shift. As a result of measuring each change in the outlet flow rate of the piezoelectric pump, it was shown that the frequency-flow rate characteristic, the voltage-flow characteristic, and the load pressure-flow rate characteristic were improved.