Vibration analysis of valveless Type Piezoelectric micro-pump

막대형 밸브리스 압전펌프의 변위 분포 해석

  • Published : 2008.10.31

Abstract

Using the extensional vibration mode of PZT bar, a piezopump is successfully made. The traveling extensional wave along the circumference of the bar is obtained by dividing standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic bar.

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