• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.5
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• pp.373-377
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• 2005

In this paper the gas leakage controller in processing chamber for semiconductor manufacturing is proposed. A pressure sensor is connected between the final valve and the numeric valve. A pressure sensor signal and a numeric valve signal are controlled by a proposed digital circuit module. Gas leakage condition, producing by 2nd plasticity in semiconductor process, display at LED. The proposed controller module is useful for monitoring the gas flow for preventing the critical process gas leakage.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.547-549
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• 2010

In this paper, we propose context-aware system for semiconductor equipment that acquires information from multiple sensors in indoor environment. This proposed system acquires information from acceleration, pressure, temperature and gas sensors then the acquired information send to server. The data transmitted to server generates an alarm via context-aware algorithm of unit event and multi event. From that result, high-quality real-time monitoring is possible because of the reduced unnecessary alarms, and the efficient management is possible because the surrounding information is recognized at once.

• 지반과기술
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• v.4 no.3
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• pp.105-109
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• 2007

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.23-28
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• 2003

본 논문에서는 MEMS 공정기술을 이용하는 압저항(piezoresistive) 압력센서용 다이아프램의 최적구조 제작을 위한 TMAH(Tetramethyl Ammonium Hydroxide)의 식각특성을 연구하였다. KOH, EDP 등 기존의 공정 수행에 있어서 부딪치게 되는 환경적 요인을 개선하고, 생산성 향상을 위해 독성이 없고 CMOS 집적회로 공정과 호환성이 높은 TMAH를 사용하여, 식각온도와 TMAH 농도 및 식각시간에 따른 에칭률 변화를 측정하였다. 식각온도가 증가 함에 따라, 그리고 TMAH 농도가 감소함에 따라, Si 에칭률은 증가하였으나 hillock 발생률이 증가하여 식각표면의 평탄화 정도가 나빠졌다. 이러한 단점을 AP(Ammonium Persulfate) 첨가제를 이용하여 해결하였다. l5wt% 농도의 TMAH 800ml 용액을 가지고 매 10분당 같은 양의 AP를 1시간당 5g이 되도록 첨가하여, 한변의 길이가 100~400 $\mu\textrm{m}$인 정사각형 모양을 가진 우수한 이방성 다이아프램을 성공적으로 제작하였다.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.253-258
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• 1999

This paper is written for the purpose of obtaining the information about the weather easily by the development of weather forecast system sensing temperature, humidity, and atmospheric pressure as key information. For this, data is obtained from the Weather Bureau, and analyzed in order to set a standard of weather forecast from the collected data. The pressure sensor and temperature-humidity sensor are fabricated using the piezoresistive effect of semiconductor, which are used to collect data. The weather forecast system is made using microprocessor.

• Journal of Sensor Science and Technology
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• v.10 no.3
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• pp.173-179
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• 2001

The currently used semiconductor pressure sensors are piezoresistive and capacitive type. Especially, semiconductor micro pressure sensors have a great deal of attention because of their small size. However, its fabrication processes are difficult, so that its yield is poor. For the purpose of resolving the drawbacks of the existing silicon pressure sensors, we demonstrate a new type of pressure sensor using PSFET(pressure sensitive field effect transistor) and investigate its operational characteristics. We used PZT(Pb(Zr,Ti)$O_3$) as a pressure sensing material. PZT thin films were deposited on a gate oxide of MOSFET by an rf-magnetron sputtering method. To abtain the stable phase, perovskite structure, furnace annealing technique have been employed in PbO ambient. The sensitivity of the PSFET was 0.38 mV/mmHg.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2005.10a
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• pp.283-288
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• 2005

Application of semiconductor sensors has widely spreaded into various industries because those have several merits like easy miniaturization and batch production comparison with previous mechanical sensors. But external conditions such as thermal and repetitive load have a bad effect on sensors's lifetime. Especially, this paper was focused on fatigue life of a interconnect made by various materials. Firstly we implemented the stress analysis for interconnect under thermal load and wording pressure. And the fatigue lifetime of each material was induced by Manson & Coffin Equation using the plastic stress-strain curve obtained by the plastic-elastic Finite Element Analysis.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.76-79
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• 2018

In this paper, we developed a pressure monitoring system using silicon pressure sensor. The pressure monitoring system was developed on the basis of a microcontroller, and a self-developed silicon pressure sensor was applied. The pressure monitoring system outputs the current pressure value via UART communication. In addition, it includes a function of displaying by LED when the preset three-step pressure (low, medium, high pressure) is reached. The silicon pressure sensor used in the pressure monitoring system was set to 0 kPa, 10 kPa, 26 kPa, and the pressure monitoring system was evaluated because the measured maximum pressure was in the range of 100 kPa.

• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.28-32
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• 2024

The personal mobility Sharing service is currently active. Especially, electric scooters are widely utilized because they can move comfortably at a high speed over a short distance with a simple driving method. Its driving method is easy, but there is no protection device to protect the bare body. So, there is a greater accident than other means of transportation, and if two people are on board, there is higher accident probability. However, since there is no specific ways to prevent multi-person boarding yet, we propose a multi-person boarding detection model using tilt and pressure sensor. The proposed method measures the tilt degree and direction by using a tilt sensor installed in the center of the board plate and detects multi-people riding.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.4
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• pp.384-390
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• 2013

The sizes of cryogenic vessels and storage tanks are becoming bigger due to strong demands from semiconductor and LCD industry as well as high-tech electronic industry. Conventional level and pressure gauges used for cryogenic vessels were analog types which made exact measurement difficult for the remained quantity at lower levels due to their poor accuracy. In this study, a design for a digital type gas level gauge which can measure the pressure and level inside of the cryogenic liquefied gas storage tanks has been proposed by using a differential pressure sensor, in which the measured data are monitored by a host PC and are transferred to a mobile printer for data confirmation at local station.