• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.90-90
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• 2000

이온빔을 이용한 리소그래피의 경우 미크론 이하의 미세구조를 형성할 수 있는 유용한 수단으로서 방사광 X-선과 함께 주목을 받고 있으며, 이와 같은 미세구조 제작은 MEMS (Micro Electro-Mechanical System) 개발에 있어서 매우 중요하다. 그러나 이온빔을 이용한 리소그래피에 대한 연구가 많이 이루어져 있지 않은 상태이다. MeV급 양정사 빔을 이용한 리소그래피의 가능성을 확인하기 위하여 기본적인 실험을 수행하였으며, 최적 이온빔 조사 조건 및 최적 현상 조건을 도출하였다. Resist로는 PMMA를 사용하였으며, 1.8 MeV 양성자 빔을 사용하여 50$\mu\textrm{m}$ 깊이의 구조물을 만들었다. 1.8MeV 양성자 빔의 조사선량이 7x1013ions/cm2 이상이 되면 PMMA 내부에 기포가 형성되므로 적정 조사선량을 4x1013 ions/cm2으로 결정하였다. 또한 선량을 4x1013ions/cm2 으로 고정하고 선량률을 변화시켜주면 선량률이 8x1011ions/cm2S 일 때부터 시료에 기포나 터짐 현상 등의 문제가 발생하였으며 5x1010~~1x1010ions/cm2s 의 선량률이 조사시간, 결함측면에서 가장 적합한 영역임을 알 수 있었다. 현상제로는 20% morpholine, 5% etanolamine 60% diethylenglykol-monobutylether, 15% 증류수를 혼합하여 사용하였다. 현상 온도를 30~5$0^{\circ}C$로 변화시켜서 현상을 한 결과, 4$0^{\circ}C$에서 현상 소요시간은 1시간 이내이며 SEM으로 관찰된 표면의 상태도 제일 양호한 결과를 보였다. 82 mesh 밀도, 선굵기 60$\mu\textrm{m}$, 크기 20x20 mm인 백금 망을 마스크로 사용하여 실제 3차원 미세구조를 제작하여 보았다. 그림 1에서 제작된 구조물의 SEM 사진을 보여주었으며, 식각된 면의 조도가 매우 뛰어나며 모서리의 직각성도 우수함을 확인할 수 있다. 이와 같이 도출된 시험 조건을 기초로 하여 리소그래피 후에 전기 도금을 이용한 금속 몰드 제작 및 이온빔 리소그래피 장점을 최대한 살릴수 있는 미세구조 제작에 대한 연구를 계속 추진할 계획이다.

• Design & Manufacturing
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• v.15 no.2
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• pp.30-35
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• 2021

The casting method uses a mold to solidify a liquid metal to make a solid metal. Since it uses a liquid metal with the least deformation resistance, it has the characteristic that it can easily manufacture even a complex shape. However, the process of solidifying a liquid metal into a solid metal inevitably involves a volume change and contains internal defects such as shrinkage holes. Therefore, in the design of the casting plan, an excess volume called a pressurization compensates for the volume shrinkage. in the product, and it induces the shrinkage hole defects to occur in parts other than the product1). In this study, casting analysis was performed using casting analysis software (anycasting) in order to optimize the design of the tilting gravity casting method for automobile brackets. In particular, the filling and solidification analysis according to the shape and volume of the pressurized metal was conducted, and applied to the actual product to study the effect of the pressurized metal on the shrinkage defect. Through this study, it is possible to understand the effect of the pressure metal on shrinkage defects in the actual product and propose a design of the pressure metal that improves reliability and productivity.

• Applied Chemistry for Engineering
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• v.26 no.3
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• pp.319-325
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• 2015

Submicron-sized $CeO_2:Er^{3+}/Yb^{3+}$ upconversion phosphor particles were synthesized by spray pyrolysis, and their luminescent properties were characterized by changing the concentration of $Er^{3+}$ and $Yb^{3+}$. $CeO_2:Er^{3+}/Yb^{3+}$ showed an intense green and red emission due to the $^4S_{3/2}$ or $^2H_{11/2}{\rightarrow}^4I_{15/2}$ and $^4F_{9/2}{\rightarrow}^4I_{15/2}$ transition of $Er^{3+}$ ions, respectively. In terms of the emission intensity, the optimal concentrations of Er and Yb were 1.0 % and 2.0%, respectively, and the concentration quenching was found to occur via the dipole-dipole interaction. Upconversion mechanism was discussed by using the dependency of emission intensities on pumping powers and considering the dominant depletion processes of intermediate energy levels for the red and green emission with changing the $Er^{3+}$ concentration. An energy transfer from $Yb^{3+}$ to $Er^{3+}$ in $CeO_2$ host was mainly involved in ground-state absorption (GSA), and non-radiative relaxation from $^4I_{11/2}$ to $^4I_{13/2}$ of $Er^{3+}$ was accelerated by the $Yb^{3+}$ co-doping. As a result, the $Yb^{3+}$ co-doping led to greatly enhance the upconversion intensity with increasing ratios of the red to green emission. Finally, it is revealed that the upconversion emission is achieved by two photon processes in which the linear decay dominates the depletion of intermediate energy levels for green and red emissions for $CeO_2:Er^{3+}/Yb^{3+}$ phosphor.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.380-386
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• 2001

A nuclear microprobe system with adjustable precision object slits and a magnetic quadrupole doublet was designed by the beam optics simulation using a first order matrix formalism, and installed in a $30^{\circ}$ beam line connected with KIGAM 1.7 MV Tandem VDG Accelerator. Demagnification factors for x and y axis are calculated to be 25 and 4.9, respectively, and a minimum beam spot side is expected to be about 5 $\mu\textrm{m}$ for 3 MeV proton beams with a current of about 1 nA. A multi-purpose octagonal target chamber has been built to facilitate MeV ion-beam analytical techniques of PIXE, RBS, ERDA, and ion beam micro-machining. It contains X-ray and particle detectors, a zoom microscope, a Faraday cup, a 4-axis sample manipulator and a high vacuum pumping system. The system performance of the nuclear microprobe is now being tested, and automatic manipulator control and data acquisition system will be installed for routine applications of micro ion-beam analytical techniques.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.4
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• pp.421-428
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• 2011

Thermal energy storage(TES) cooling system using cheaper electricity of off-peak time has been applied to relieve a significant portion of the peak demand of electricity during the daytime in summer. Slurry ice type thermal energy storage cooling system is one kind of more efficient ice-thermal energy storage cooling system than Ice-on-Coil type or Encapsulated type TES cooling system, even though, which are more popular TES system. This experimental study was carried out to observe flow pattern and formation of slurry ice in reversing flow layer to improve efficiency of heat transfer between fluid and freezing tube and to disturb ice adhesion on tube surface. The reversing flow layer was made by using reversing materials in heat exchanger section(test section) to disturb ice adhesion. At this experiment, styrofoam balls and poly propylene balls were used as reversing materials, and a 20wt% solution of ethylene glycol was used as reversing flow layer. The experimental apparatus was constructed of the test section for making/storing slurry ice, the brine tank, pumps for circulating of a 20wt% solution of ethylene glycol and brine, a flow-meter, a data logger for measuring the temperature. The experiments were carried out under various conditions, with volumetric flow rate, ball filling rate and air filling rate.

• Journal of the Korean Society of Food Science and Nutrition
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• v.29 no.4
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• pp.676-682
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• 2000

The effect of dandelion leaf extracts on lipid metabolism was investigated in high cholesterol-fed rats. Four groups of rats were given a high cholesterol diet containing 10g cholesterol/kg and 2.5 g sodium cholate/kg for 6 weeks. The control group received without dandelion leaf extracts and the other three groups received with one of dandelion leaf extracts (water, ethyl acetate, ether), respectively. Weight gain and feed intake were significantly higher in water group than control group. Serum triglyceride, total cholesterol, cholesteryl ester, chylomicron and VLDL-cholesterol concentratins were lower, whereas HDL-cholesterol and phospholipid concentrations were significantly higher in dandelion leaf extract supplemented-groups than control group. Dandelion extract increased HDL-C/total-C ratio and lowered atherogenic index. Hepatic triglyceride, total cholesterol, free cholesterol and cholesteryl ester concentrations lowered in dandelion leaf extract groups compared to control group. Especially, hepatic triglyceride and free cholesterol levels were lower in ethyl acetate extract group than in water and ether extract groups. Dandelion leaf extract supplements did not affect hepatic phospholipid cencentration. Hepatic HMG-CoA reductase activity was significantly lower in water extract group than the others. ACAT activity was significantly decreased by dandelion extract supplements.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.7 no.3
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• pp.175-182
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• 2009

The spent cationic exchange resins and anionic exchange resins were separated from mixed spent exchange resins by a fluidized bed gravimetric separator. The separated resins were identified by an elemental analysis and thermogravimetric analysis. The each test sample was prepared by diluting the slurry made by wet ball milling the cationic exchange resins and the anionic exchange resins separated as a spherical granular form for 24 hours. The resulting test samples showed a slurry form of less than $75{\mu}m$ of particle size and 25,000ppm of $COD_{cr}$. The decomposition conditions of each test samples from a thermal power plant were obtained with a lab-scale(reactor volume : 220mL) supercritical water oxidation(SCWO) facility. Then pilot plant(reactor volume : 24 L) tests were performed with the test samples from a thermal power plant and a nuclear power plant successively. Based on the optimal decomposition conditions and the operation experiences by lab-scale facility and the pilot plant, a commercial plant(capacity : 150kg/h) can be installed in a nuclear power plant was designed.

• Journal of the Korean Magnetics Society
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• v.25 no.4
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• pp.117-122
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• 2015

The holes with a diameter of $35{\mu}m$ inside the GMR-SV (giant magnetoresistance-spin valve) film were patterned by using the photolithography process and ECR (electron cyclotron resonance) Ar-ion milling. From the magnetoresistance curves of the GMR-SV film with holes measuring by 4-electrode method, the MR (magnetoresistance ratio) and MS (magnetic sensitivity) are almost same as the values of initial states. On other side hand, the $H_{ex}$ (exchange bias coupling field) and $H_c$ (coercivity) dominantly increased from 120 Oe and 10 Oe to 190 Oe and 41 Oe as increment of the number of holes inside GMR-SV film respectively. These results were shown to be attributed to major effect of EMD (easy magnetic domian) having a region positioned between two holes perpendicular to the sensing current. On the basis of this study, the fabrication of GMR-SV applying to the hole formation improved the magnetoresistance properties having the thermal stability and durability of bio-device.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.9
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• pp.1041-1050
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• 2011

An elasto-plastic finite element method using the theory of strain gradient plasticity is proposed to evaluate the size dependency of structural plasticity that occurs when the configuration size decreases to micron scale. For this method, we suggest a low-order plane and three-dimensional displacement-based elements, eliminating the need for a high order, many degrees of freedom, a mixed element, or super elements, which have been considered necessary in previous researches. The proposed method can be performed in the framework of nonlinear incremental analysis in which plastic strains are calculated and averaged at nodes. These strains are then interpolated and differentiated for gradient calculation. We adopted a strain-gradient-hardening constitutive equation from the Taylor dislocation model, which requires the plastic strain gradient. The developed finite elements are tested numerically on the basis of typical size-effect problems such as micro-bending, micro-torsion, and micro-voids. With respect to the strain gradient plasticity, i.e., the size effects, the results obtained by using the proposed method, which are simple in their calculation, are in good agreement with the experimental results cited in previously published papers.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2010.04a
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• pp.618-619
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• 2010

LED는 기존의 발광원에 비해 훨씬 높은 파워와 효율성으로 인해 최근 들어 각종 조명이나 교통신호 등에서 사용이 급증하고 있다. LED 재료를 위해 지금까지 여러가지가 연구되어 왔는데, 갈륨 질화물 (Gallium Nitride, GaN)에 기반한 시스템이 최근들어 가장 큰 관심을 받고 있다. GaN 방식은 열적으로 매우 안정성이 있고, 1.9 ~ 6.2 eV 범위의 넓은 밴드의 Gap, 그리고 인듐이나 알루미늄과 결합하여 청, 녹, 백색등의 다양한 빛을 발생할 수 있는 장점을 가지고 있다. 예를 들어 청색 LED는 광학 방식의 기록매체에, 백색 LED는 기존의 조명램프의 대체용으로 활용이 가능하다. 이러한 장점 덕분에 GaN기반 LED 시장은 1994년에 최초로 상용화 된 이래 최근 급격한 성장을 보여 왔다. 그러나 GaN은 다른 III~V 타입의 반도체 재료와는 달리 재료가 성장하기 위해 사파이어와 같은 별도의 기판을 필요로 하는 문제가 있다. 이것은 결국 전위발생과 같은 격자의 부조화 같은 문제를 야기하여 결국 LED의 성능을 떨어뜨리는 요인이 된다. 이러한 문제를 해결하기 위해 HVPE(Hydride Vapor Phase Epitaxy) 방법이 개발되었는데, 이 방법은 시간당 100 미크론의 매우 빠른 성장속도로 높은 두께의 레이어를 만드는 장점이 있다. 이렇게 성장된 GaN 레이어는 베이스 기판에서 쉽게 분리되어 활용이 가능하다. 그러나 HVPE 기술은 성장 공정에서 두께를 균일하게 만들도록 제어하는 것이 매우 어렵다는 문제가 있다. 따라서 HVPE 방식에서는 이러한 조건을 만족시키기 위해 반응현상에 대한 물리적 해석을 토대로 공정조건을 정밀하게 설계해야 한다. 이를 위해 최근에 실험 또는 시뮬레이션을 활용하여 이러한 공정조건을 향상시키기 위한 여러 연구가 진행되었다. 본 연구에서는 이러한 연구의 일환으로 반응로에 투입되는 여러 기체의 유량과 존별 주변온도 조건을 입력변수로 하고, 이들이 GaN 성장에 미치는 영향을 분석하였다. HVPE 시스템에서 가장 이상적인 목표는 반응기체가 층류유동을 유지하면서 대부분의 반응이 기판위에서 이뤄지며, 기판위에서 성장되는 재료의 두께가 균일하게 되는 것이다. 입력변수들이 이러한 결과에 어떠한 영향을 미치는 지 분석하기 위해 전산유체역학(CFD, Computational Fluid Dynamics)을 수행하는 상용코드 FLUENT를 사용하였다. 보다 실제에 가까운 해석을 위해서는 기체간의 화학반응을 포함해야 하나, 해석의 편의와 효율을 위해 본 연구에서는 열 및 유동해석만을 수행하였다. 한편 실제 반응로의 우수성은 성장속도와 두께분포의 균일도를 통해 평가된다. CFD 해석을 통해 이들을 분석하기 위해 기존에 수행한 실험조건을 해석하고 해석결과의 유동패턴/압력분포를 실험결과의 성장속도/두께분포와 비교하고, 이중에서 관련성이 높은 해석결과변수를 우수성 평가에 활용하였다. 기존의 실험결과를 토대로 이러한 중요 결과변수와 함께 이들에 대한 목표값이 도출되고 나면, 입력 공정조건 - 사용기체의 유량과 주변온도 조건 - 에 대해 실험계획(DOE,Design of Experiment)을 수립하고 목표성능을 구현하기 위한 최적설계를 수행할 수 있다. 일반적으로 CFD를 통해 최적의 설계나 공정조건을 탐색하는 작업은 1회의 CFD 계산시간이 매우 오래 소요되기 때문에 쉽지 않다. 그러나 본 연구에서는 CFD와 DOE의 적절한 조합을 통해 적은 수의 해석을 가지고도 원하는 결과를 효율적으로 얻는 것이 가능함을 입증하고자 한다. 본 발표에서는 아직 이러한 연구가 완성되지 않은 시점에서 제반 연구개요를 소개하고 현 시점까지의 연구 결과 및 향후 계획을 소개하고자 한다.