• Title/Summary/Keyword: 미소 전자 기계 시스템

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Mechanical Property Measurement in Nano Imprint Process (나노 임프린트 공정에서의 기계적 물성 측정)

  • 김재현;이학주;최병익;강재윤;오충석
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.6
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    • pp.7-14
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    • 2004
  • 나노 임프린트 기술은 기존의 광학적 리소그라피 (optical lithography) 기술보다 저렴한 비용으로 나노 구조물을 대량으로 제조할 수 있을 것으로 기대되고 있는 기술이다. 현재까지 반도체 공정기술의 주류를 이루고 있는 광학적인 리소그라피 기술은, 100nm이상의 CD(Critical Dimension)를 가지는 구조물들을 정밀하게 제조하여, 미소전자공학 (microelectronics) 소자, MEMS/MEMS, 광학소자 등의 제품들을 대량으로 생산하는 데에 널리 활용되고 있다. 반도체 소자의 고집적화 경향에 따라 100 nm 이하의 CD를 가지는 나노 구조물들을 제조할 필요성이 높아지고 있지만, 광학적인 방법으로는 광원의 파장보다 작은 구조물들을 제조하기가 어렵다. 보다 짧은 파장을 가지는 광원을 이용하는 리소그라피 장비가 계속적으로 개발되고 있으나, 그에 따른 장비 비용 및 제조 단가가 기하급수적으로 증가하고 있다.(중략)

Study on the Influence of Applied Forces Acting on Small Scale Cantilever Beams (미소 외팔보의 동적해석 시 작용하는 힘들의 영향도에 관한 연구)

  • Kim, Kwan-Yong;Yoo, Hong-hee
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2005.11a
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    • pp.702-707
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    • 2005
  • The equations of motion of the structure, which is a small scale cantilever beam considering electrostatic force, squeeze film damping and van der Waals force are obtained employing Galerkin's method based on Euler beam theory. The influence of each force is investigated fur changing the size of a small scale cantilever beam which assumed uniform shape. Also the forces which are affected by the required size of a small scale cantilever beam for manufacturing are forecasted.

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Database Generation and Management System for Small-pixelized Airborne Target Recognition (미소 픽셀을 갖는 비행 객체 인식을 위한 데이터베이스 구축 및 관리시스템 연구)

  • Lee, Hoseop;Shin, Heemin;Shim, David Hyunchul;Cho, Sungwook
    • Journal of Aerospace System Engineering
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    • v.16 no.5
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    • pp.70-77
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    • 2022
  • This paper proposes database generation and management system for small-pixelized airborne target recognition. The proposed system has five main features: 1) image extraction from in-flight test video frames, 2) automatic image archiving, 3) image data labeling and Meta data annotation, 4) virtual image data generation based on color channel convert conversion and seamless cloning and 5) HOG/LBP-based tiny-pixelized target augmented image data. The proposed framework is Python-based PyQt5 and has an interface that includes OpenCV. Using video files collected from flight tests, an image dataset for airborne target recognition on generates by using the proposed system and system input.

Performance Analysis of the Viscous-driven Micropump with Tandem Rotating Cylinders (한 쌍의 실린더를 가지는 점성구동 마이크로 펌프의 성능 해석)

  • Choi, Hyung-Il;Cho, Sung-Chan;Maeng, Joo-Sung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.9
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    • pp.1256-1261
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    • 2003
  • Since the viscous effect increases as the size of device decreases, viscous-driven micropump is a promising mechanism in microscale applications. In the present study, a dual-rotor type pump which contains two counter-rotating cylinders for improving performance characteristics is proposed. First, for flows in the single-rotor type pump, the present unstructured grid simulation method is validated by comparing its results to the previous results. Next, the performance of the dual-rotor type pump is evaluated by the parametric studies and is compared to that of the previous single-rotor type pump. The flow characteristics are qualitatively similar to those of single-rotor type pump. However, the performance of the micropump with tandem rotors is still better than that of previous pumping type, e.g. much larger flow rate, smaller driving region, higher efficiency, and wider operation range.

Flying Characteristics of Running Tape above Rotating Head (II) -Experimental Analysis- (회전헤드에 대한 주행테이프의 부상특성 (II) -실험해석-)

  • 민옥기;김수경
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.15 no.1
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    • pp.107-119
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    • 1991
  • This dissertation analyzes the running mechanism of flexible and thin tape above rotating head through the experiment. The scope of study is confined to measure the vertical deformation of running tape under hydrodynamic pressure invoking phenomena of elasto-hydrodynamic lubrication between the protruded bump on a rotating cylinder ad the running tape. Experimental system is devised to measure the vertical deflection of the running tape by opto-electronical displacement gauge, which enables to detect microscopic surface deflection of high frequency. Thorough the tests of small specimens of groove and bump, the accuracy and reliability of this experimental method is confirmed and achieved an accuracy within 5%(2.mu.m) error for the microscopic deflection with high frequency. In experimental works, the effects of bump size on flying characteristics of the tape were evaluated and examined. For the vertical deformation of the running tape. the numerical results and its trend agree qualitatively with the experimental ones.

Multistable Microactuators Functioning on the Basis of Electromagnetic Lorentz Force: Nonlinear Structural and Electrothermal Analyses (전자기 로렌츠력을 이용한 다중안정성 마이크로 액추에이터의 비선형 구조 및 전기-열 해석)

  • Han, Jeong-Sam
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.8
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    • pp.1119-1127
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    • 2010
  • In this paper, the design and nonlinear simulation of a multistable electromagnetic microactuator, which provides four stable equilibrium positions within its operating range, have been discussed. Quadstable actuator motion has been made possible by using both X- and Y-directional bistable structures with snapping curved beams. Two pairs of the curved beams are attached to an inner frame in both X- and Y-directions to realize independent bistable behavior in each direction. For the actuation of the actuator at the micrometer scale, an electromagnetic actuation method in which Lorentz force is taken into consideration was used. By using this method, micrometer-stroke quadstability in a plane parallel to a substrate was possible. The feasibility of designing an actuator that can realize quadstable motion by using the electromagnetic actuation method has been thoroughly clarified by performing nonlinear static and dynamic analyses and electrothermal coupled-field analysis of the multistable microactuator.

A Comparative Study on Machine Learning Models for Red Tide Detection (적조 탐지를 위한 기계학습 모델 비교 연구)

  • Park, Mi-So;Kim, Na-Kyeong;Kim, Bo-Ram;Yoon, Hong-Joo
    • The Journal of the Korea institute of electronic communication sciences
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    • v.16 no.6
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    • pp.1363-1372
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    • 2021
  • Red tide, defined as the major reproduction of harmful birds, has the characteristics of being generated and diffused in a wide area. This has limitations in detection only with the existing investigation method. Therefore, in this study, red tide was detected using a remote sensing technique. In addition, it was intended to increase the accuracy of detection by using optical characteristics, not just the concentration of chlorophyll. Red tide mainly occurs on the southern coast where sea signals are complex, and the main red tide control species on the southern coast is Cochlodinium polykirkoides. Therefore, it was intended to secure objectivity by reflecting features that could not be found depending on the researcher's observation and experience, not limited to visual judgment using machine learning techniques. In this study, support background machines and random forest were used among machine learning models, and as a result of calculating accuracy as performance evaluation indicators of the two models, the accuracy was 85.7% and 80.2%, respectively.

Visualization of Flow and Wetting Transition in PDMS Superhydrophobic Microchannel (PDMS 기반 초소수성 마이크로 채널내의 유동 및 표면 젖음 전이 가시화에 관한 연구)

  • Kim, Ji-Hoon;Hong, Jong-In;Byun, Do-Young;Ko, Han-Seo
    • 한국전산유체공학회:학술대회논문집
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    • 2008.03b
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    • pp.671-674
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    • 2008
  • We investigate the slippage effect in a micro-channel depending on the surface characteristics; hydrophilic, hydrophobic, and super-hydrophobic wettabilities. The micro-scale grooves are fabricated on the vertical wall to make the super-hydrophobic surfaces, which enable us visualize the flow fields near walls and directly measure the slip length. Velocity profiles are measured using micro-particle image velocimetry (Micro-PIV) and compared those in the hydrophilic glass, hydrophobic PDMS, and super-hydrophobic PDMS micro-channels. To directly measure the velocity in the super-hydrophobic micro-channel, the transverse groove structures are fabricated on the vertical wall in the micro-channel. The velocity profile near the wall shows larger slip length and, if the groove structure is high and wide, the liquid meniscus forms curves into the valley so that the wavy flow is created after the grooves.

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Study on Detection Technique for Coastal Debris by using Unmanned Aerial Vehicle Remote Sensing and Object Detection Algorithm based on Deep Learning (무인항공기 영상 및 딥러닝 기반 객체인식 알고리즘을 활용한 해안표착 폐기물 탐지 기법 연구)

  • Bak, Su-Ho;Kim, Na-Kyeong;Jeong, Min-Ji;Hwang, Do-Hyun;Enkhjargal, Unuzaya;Kim, Bo-Ram;Park, Mi-So;Yoon, Hong-Joo;Seo, Won-Chan
    • The Journal of the Korea institute of electronic communication sciences
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    • v.15 no.6
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    • pp.1209-1216
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    • 2020
  • In this study, we propose a method for detecting coastal surface wastes using an UAV(Unmanned Aerial Vehicle) remote sensing method and an object detection algorithm based on deep learning. An object detection algorithm based on deep neural networks was proposed to detect coastal debris in aerial images. A deep neural network model was trained with image datasets of three classes: PET, Styrofoam, and plastics. And the detection accuracy of each class was compared with Darknet-53. Through this, it was possible to monitor the wastes landing on the shore by type through unmanned aerial vehicles. In the future, if the method proposed in this study is applied, a complete enumeration of the whole beach will be possible. It is believed that it can contribute to increase the efficiency of the marine environment monitoring field.

Study on Detection Technique for Sea Fog by using CCTV Images and Convolutional Neural Network (CCTV 영상과 합성곱 신경망을 활용한 해무 탐지 기법 연구)

  • Kim, Na-Kyeong;Bak, Su-Ho;Jeong, Min-Ji;Hwang, Do-Hyun;Enkhjargal, Unuzaya;Park, Mi-So;Kim, Bo-Ram;Yoon, Hong-Joo
    • The Journal of the Korea institute of electronic communication sciences
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    • v.15 no.6
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    • pp.1081-1088
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    • 2020
  • In this paper, the method of detecting sea fog through CCTV image is proposed based on convolutional neural networks. The study data randomly extracted 1,0004 images, sea-fog and not sea-fog, from a total of 11 ports or beaches (Busan Port, Busan New Port, Pyeongtaek Port, Incheon Port, Gunsan Port, Daesan Port, Mokpo Port, Yeosu Gwangyang Port, Ulsan Port, Pohang Port, and Haeundae Beach) based on 1km of visibility. 80% of the total 1,0004 datasets were extracted and used for learning the convolutional neural network model. The model has 16 convolutional layers and 3 fully connected layers, and a convolutional neural network that performs Softmax classification in the last fully connected layer is used. Model accuracy evaluation was performed using the remaining 20%, and the accuracy evaluation result showed a classification accuracy of about 96%.