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Mechanical Property Measurement in Nano Imprint Process  

김재현 (한국기계연구원 구조연구부 마이크로응용역학그룹)
이학주 (한국기계연구원 구조연구부 마이크로응용역학그)
최병익 (한국기계연구원 구조연구부 마이크로응용역학그)
강재윤 (한국기계연구원 구조연구부 마이크로응용역학그)
오충석 (금오공과대학 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.6, 2004 , pp. 7-14 More about this Journal
Keywords
Nano process; Nano imprint; Micro tensile test; Nanoindentation; Atomic Force Microscope; MEMS;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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