• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.5
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• pp.35-40
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• 2005

An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1988-1990
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• 2002

마이크로 바이오칩용 미세 무게 감지 소자를 개발하기 위해 통상적인 MEMS 공정에 PZT sol solution을 함침하여 binder로서 적용하는 복합적인 스크린 인쇄 방법을 적용해 $800-850^{\circ}C}$의 비교적 저온에서 높은 소결밀도와 우수한 전기적인 특성을 가지는 PZT-0.12PCW 후막 구동형 캔틸레버 소자를 Pt/$TiO_2$/YSZ/$SiO_2$/Si 기판에 제조하였다. 제조된 PZT-0.12PCW 후막 구동형 캔틸레버 소자의 공진 주파수와 변위를 레이저 미소 변위 측정 시스템을 이용하여 공기 중 및 액체 중에서 측정함으로써 캔틸레버 크기에 따른 공진 특성 변화, 액체 내에서의 댐핑 효과 등을 분석할 수 있었다. 또한 Au를 증착하거나biotin-streptoavidin 반응을 통해 단백질을 고정화시켜 무게변화를 야기시킨 후 소자의 감도를 평가함으로써 PZT-0.12PCW 후막 구동형 캔틸레버를 우수한 성능의 바이오칩용 미세 무게 감지 소자로 응용할 수 있음을 알 수 있었다.

• Journal of the KSME
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• v.44 no.12
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• pp.51-55
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• 2004

이 글에서는 AFM을 이용한 미소 구조물의 기계적 물성 측정 방법 중 기계적 물성 측정을 위한 대칭형 AFM 캔틸레버의 고안, 제작, 보정 및 측정 방법을 중심을 기술한다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.809-809
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• 2013

We report a new method for highly controllable local patterning of a hydrogel on microfabricated cantilevers and fabrication of all hydrogel microcantilevers. We constructed a dynamic mask based photolithography setup using a commercial beam projector, a 3-axis microstage and other optical components. Dynamic masks generated from the beam projector controlled the shape, size, and position of hydrogel patterns while the 3-axis microstage mainly controlled the thickness of hydrogel patterns and hydrogel microcantilevers. Using the constructed setup, polyethyleneglycol diacrylate (PEGDA) was patterned on microfabricated cantilevers in a highly controlled manner. Currently, the smallest PEGDA patternable is a 5-${\mu}m$-diameter circle with a thickness of ~$10{\mu}m$. To confirm thicknesses of patterned PEGDAs on silicon microcantilevers, resonance frequencies of microcantilevers were measured before and after each PEGDA patterning. Thicknesses extracted from resonance measurements showed good agreement with measurements using an optical microscope. In addition, PEGDA microcantilevers with various dimensions and thicknesses were fabricated on glass and silicon substrates. Surfaces of fabricated all hydrogel microcantilevers were flat enough to facilitate other post processing and to be used for various sensing applications.

• Journal of the Korea institute for structural maintenance and inspection
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• v.26 no.6
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• pp.128-138
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• 2022

In this study, in order to apply ultra-high-strength concrete beams of 100 MPa or more manufactured by centrifugal molding as the superstructure of the avalanche tunnel, the purpose is to verify the structural safety of the corner rigid joint in which the centrifugal molded beam is integrated with the substructure, which is the negative moment area. A full-size specimen was manufactured, and loading tests and analysis studies were performed. In order to expect the same effect that the maximum moment occurs in the corner joint part of the upper slab end when the standard model of the avalanche tunnel is designed with a load combination according to the specification, a modified cantilever type structural model specimen was manufactured and the corner rigid joint was fixedly connected. A study was performed to determine the performance of the method and the optimal connection construction method. The test results demonstrated that the proposed connection system outperforms others. Despite having differences in joint connection construction type, stable flexural behavior was shown in all the tested specimens. The proposed method also outperformed the behavior of centrifugally formed beams and upper slabs. The behavior of the corner rigid joint analysis model according to the F.E. analysis showed slightly greater stiffness compared to the results of the experiment, but the overall behavior was almost similar. Therefore, there is no structural problem in the construction of the corner rigid joint between the centrifugally formed beam and the wall developed in this study.