• Title/Summary/Keyword: 미소전기기계시스템

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Numerical Investigation of Complex System for Electrical Energy Harvesting and Vibration Isolation (미소진동 발생원으로부터의 전기에너지 재생 및 진동절연을 위한 복합 시스템의 해석적 검토)

  • Kwon, Sung-Cheol;Jo, Mun-Shin;Oh, Hyun-Ung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.42 no.8
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    • pp.648-653
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    • 2014
  • Fly-wheel, gimbal antenna, mechanical gyro and cryocooler with moving parts generate a micro-vibration during their on-orbit operation. For the acquisition of high quality image of observation satellite, additional technical efforts are required to reduce the micro-vibration level from the vibration sources. In this study, we proposed a passive isolation system combined with a tuned mass damper-type energy harvester to generate electrical energy from the micro-vibration which has always been subjected to useless isolation objectives. The feasibility of the system has been investigated through the numerical simulation.

Nano-bending method for the measurement of the Poisson's ratio of MEMS thin films (MEMS 박막의 푸와송 비 측정을 위한 미소굽힘기법)

  • 김종훈;김정길;연순창;전윤광;한준희;이호영;김용협
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.31 no.2
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    • pp.57-62
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    • 2003
  • Nano-bending method is presented to measure the Poisson's ratio of thinfilms for MEMS (Micro-Electro-Mechanical Systems) applicaiton. The douvle-ring specimen is designed and fabricated based on the surface micromachining process to facilitate the measurement of the Poisson's ratio. The Poisson's ratio can be obtained through analyzing the linear load-displacement relationship of the double ring specimen subjected to nano-indenter loading. The Present nano-bending mehod is an in-situ measurement approach due to the compatibility to the surface micromachining process. The Poisson's ratio is locally obtained at the location of the double ring specimen with micro dimension. To validate the nano-bending method, the Poisson's ratio of LPCVD (Low Pressure Chemical Vapor Deposition) poly-silicon with thickness of 2.3㎛ is investigated. Experimental results reveal that the Poisson's ratio of the poly-silicon film is 0.2569. The standard deviation of the nano-bending measurement for the stiffness of double ring specimens is 2.66%.

Experimental Investigation of Complex System for Electrical Energy Harvesting and Vibration Isolation (미소진동 발생원으로부터의 전기에너지 재생 및 진동절연을 위한 복합시스템의 실험적 성능검증)

  • Kwon, Seong-Cheol;Jeon, Su-Hyeon;Oh, Hyun-Ung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.44 no.1
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    • pp.40-48
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    • 2016
  • Micro-vibration induced by on-board appendages that have mechanical moving parts has always been treated as an useless objective that has to be isolated, in order to comply with a high-resolution mission requirement of the observation satellite. In this study, we proposed a tuned mass damper energy harvester combined with a conventional passive vibration isolator for exhibiting dual functions of both electrical energy harvesting and micro-vibration isolation. The feasibility of the proposed dual-function complex system has been demonstrated through the comparison with numerical simulations, based on the results of basic characteristic tests, and experiments of the harvested power and micro-vibration.

A Multi-chip Microelectrofluidic Bench for Modular Fluidic and Electrical Interconnections (전기 및 유체 동시접속이 가능한 멀티칩 미소전기유체통합벤치의 설계, 제작 및 성능시험)

  • Chang Sung-Hwan;Suk Sang-Do;Cho Young-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.4 s.247
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    • pp.373-378
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    • 2006
  • We present the design, fabrication, and characterization of a multi-chip microelectrofluidic bench, achieving both electrical and fluidic interconnections with a simple, low-loss and low-temperature electrofluidic interconnection method. We design 4-chip microelectrofluidic bench, having three electrical pads and two fluidic I/O ports. Each device chip, having three electrical interconnections and a pair of two fluidic I/O interconnections, can be assembled to the microelectofluidic bench with electrical and fluidic interconnections. In the fluidic and electrical characterization, we measure the average pressure drop of $13.6{\sim}125.4$ Pa/mm with the nonlinearity of 3.1 % for the flow-rates of $10{\sim}100{\mu}l/min$ in the fluidic line. The pressure drop per fluidic interconnection is measured as 0.19kPa. Experimentally, there are no significant differences in pressure drops between straight channels and elbow channels. The measured average electrical resistance is $0.26{\Omega}/mm$ in the electrical line. The electrical resistance per each electrical interconnection is measured as $0.64{\Omega}$. Mechanically, the maximum pressure, where the microelectrofluidic bench endures, reaches up to $115{\pm}11kPa$.

Adaptive Optics System (적응광학시스템)

  • 이준호
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.194-196
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    • 2003
  • 적응광학은 넓은 의미로 실시간으로 빛을 제어하는 분야를 의미하며, 천문학 관련 분야에 제한하면 대기에 의해 왜곡된 빛의 파면을 실시간으로 보상시켜주는 기술을 의미한다. 적응광학은 대기과학, 광학분야, 광전자분야, 전기분야, 기계분야 등의 복합학문으로 1950년 Backcock에 의하여 제안된 후 1970~80년대 미소에 의해 고에너지레이저(HEL, High Enegry Laser)와 위성추적시스템의 구성요소로 개발되었다 1980년 일반에 공개되었다. (중략)

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Suppression of Microwelding on RF MEMS Direct Contact Switches (직접접촉식 RF MEMS 스위치에서의 미소용접 현상 억제)

  • Lee, Tae-Won;Kim, Seong-Jun;Park, Sang-Hyun;Lee, Ho-Young;Kim, Yong-Hyup
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.33 no.4
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    • pp.41-46
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    • 2005
  • In this paper, a new method for suppressing microwelding on the RF MEMS (Radio Frequency Microelectromechanical System) direct contact switches is introduced. Two kinds of refractory metals, tungsten and molybdenum were coated onto the contact point of the switches and the effect of the coating was examined. The changes in insertion loss and isolation at the switch were measured by using network analyzer and power loss was evaluated by power measurement. The results revealed that while tungsten and molybdenum showed higher contact resistance than gold in low input power range, they enhanced the power handling capability and reliability of the switches in high input power region.

Electrical and Fluidic Characterization of Microelectrofluidic Bench Fabricated Using UV-curable Polymer (UV경화성 폴리머를 이용한 미소유체 통합접속 벤치 개발 및 전기/유체적 특성평가)

  • Youn, Se-Chan;Jin, Young-Hyun;Cho, Young-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.5
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    • pp.475-479
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    • 2012
  • We present a novel polymer fabrication process involving direct UV patterning of a hyperbranched polymer, AEO3000. Compared to PDMS, which is the most widely used polymer in bioMEMS devices, the present polymer has advantages with regard to electrode integration and fast fabrication. We designed a four-chip microelectrofluidic bench having three electrical pads and two fluidic I/O ports. We integrated a microfluidic mixer and a cell separator on the bench to characterize the interconnection performance and sample manipulation. Electrical and fluidic characterization of the microfluidic bench was performed. The measured electrical contact resistance was $0.75{\pm}0.44{\Omega}$, which is small enough for electrical applications, and the pressure drop was 8.3 kPa, which was 39.3% of the value in the tubing method. By performing yeast mixing and a separation test in the integrated module on the bench, we successfully showed that the interconnected chips could be used for bio-sample manipulation.

Database Generation and Management System for Small-pixelized Airborne Target Recognition (미소 픽셀을 갖는 비행 객체 인식을 위한 데이터베이스 구축 및 관리시스템 연구)

  • Lee, Hoseop;Shin, Heemin;Shim, David Hyunchul;Cho, Sungwook
    • Journal of Aerospace System Engineering
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    • v.16 no.5
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    • pp.70-77
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    • 2022
  • This paper proposes database generation and management system for small-pixelized airborne target recognition. The proposed system has five main features: 1) image extraction from in-flight test video frames, 2) automatic image archiving, 3) image data labeling and Meta data annotation, 4) virtual image data generation based on color channel convert conversion and seamless cloning and 5) HOG/LBP-based tiny-pixelized target augmented image data. The proposed framework is Python-based PyQt5 and has an interface that includes OpenCV. Using video files collected from flight tests, an image dataset for airborne target recognition on generates by using the proposed system and system input.

Performance Analysis of a Linear Micro-actuator Operated by Radiometric Phenomena in Rarefied Gas Flow Field (희박기체 상태의 라디오미터릭 효과에 의해 구동되는 선형 마이크로 액추에이터의 성능해석)

  • 황영규;허중식
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.10
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    • pp.1394-1405
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    • 2002
  • The performance of micro-actuators utilizing radiometric forces are studied numerically. The Knudsen number based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo(DSMC) calculations have been performed to estimate the performance of the micro-actuators. In the present DSMC method, the variable hard sphere molecular model and no time counter technique are used to simulate the molecular collision kinetics. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies.

Multistable Microactuators Functioning on the Basis of Electromagnetic Lorentz Force: Nonlinear Structural and Electrothermal Analyses (전자기 로렌츠력을 이용한 다중안정성 마이크로 액추에이터의 비선형 구조 및 전기-열 해석)

  • Han, Jeong-Sam
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.8
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    • pp.1119-1127
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    • 2010
  • In this paper, the design and nonlinear simulation of a multistable electromagnetic microactuator, which provides four stable equilibrium positions within its operating range, have been discussed. Quadstable actuator motion has been made possible by using both X- and Y-directional bistable structures with snapping curved beams. Two pairs of the curved beams are attached to an inner frame in both X- and Y-directions to realize independent bistable behavior in each direction. For the actuation of the actuator at the micrometer scale, an electromagnetic actuation method in which Lorentz force is taken into consideration was used. By using this method, micrometer-stroke quadstability in a plane parallel to a substrate was possible. The feasibility of designing an actuator that can realize quadstable motion by using the electromagnetic actuation method has been thoroughly clarified by performing nonlinear static and dynamic analyses and electrothermal coupled-field analysis of the multistable microactuator.