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http://dx.doi.org/10.5139/JKSAS.2005.33.4.041

Suppression of Microwelding on RF MEMS Direct Contact Switches  

Lee, Tae-Won (서울대학교 기계항공공학부 대학원)
Kim, Seong-Jun (서울대학교 기계항공공학부 대학원)
Park, Sang-Hyun (서울대학교 기계항공공학부 대학원)
Lee, Ho-Young (서울대학교 기계항공공학부)
Kim, Yong-Hyup (서울대학교 기계항공공학부)
Publication Information
Journal of the Korean Society for Aeronautical & Space Sciences / v.33, no.4, 2005 , pp. 41-46 More about this Journal
Abstract
In this paper, a new method for suppressing microwelding on the RF MEMS (Radio Frequency Microelectromechanical System) direct contact switches is introduced. Two kinds of refractory metals, tungsten and molybdenum were coated onto the contact point of the switches and the effect of the coating was examined. The changes in insertion loss and isolation at the switch were measured by using network analyzer and power loss was evaluated by power measurement. The results revealed that while tungsten and molybdenum showed higher contact resistance than gold in low input power range, they enhanced the power handling capability and reliability of the switches in high input power region.
Keywords
MEMS; RF Switch; Direct Contact; Microwelding; Reliability;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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