• 제목/요약/키워드: 미세 전자기계 시스템

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Multichannel Liquid Phase Microextraction System (다채널 액상 미세 추출 시스템 설계 및 제작)

  • Zhang, XinJie;Cheng, Shuo;Piao, Xiang Fan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.10
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    • pp.1-7
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    • 2020
  • In this study, a multichannel gas-liquid microextraction system is designed by integrating the automatic elution of extraction line and multichannel gas-purging liquid phase microextraction. The system uses an injection pump and inert gas to push the extraction solvent to a sample bottle of a gas-phase color autosampler and then implements multichannel gas-liquid microextraction and gas chromatography-mass spectrometry. The system also employs a three-way integrated micro-high-temperature heater, syringe pump, and microflow controller to realize the simultaneous processing of multiple groups of samples, thus improving the sample pretreatment speed and reproducibility and reducing human error. Autoinjection experiments were implemented with polycyclic aromatic hydrocarbon standard samples. The experiments show that the average recovery rate of the system exceeds 70%, and the relative standard among the channels is less than 15%.

Electrohydrodynamic Inkjet Printing System for Ultrafine Patterning (초정밀 미세 패턴을 위한 전기 수력학 잉크젯 프린팅 시스템)

  • Roh, Hyeong-Rae;Go, Jung-Kook;Kwon, Kye-Si
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.37 no.9
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    • pp.873-877
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    • 2013
  • The application of inkjet technology has been broadening from home printers to manufacturing tools. Recently, there have been demands for high-resolution printing, especially in the field of printed electronics applications. To improve upon the conventional inkjet printing patterning method, electrohydrodynamic (EHD) inkjet technology has recently attracted attention because droplets smaller than the nozzle diameter can be ejected and materials with wider viscosity range can be used for jetting. In this study, an EHD jet printing system for fine patterning is presented. To print various patterns based on drop on demand printing, vector and raster printing algorithm are implanted in the printing software. Fine conductive patterns with line width of less than $7{\mu}m$ can be easily achieved via EHD jet using a nozzle with inner diameter of $8{\mu}m$.

A Consideration on the Process Technology and Application of MEMS to prepare for upcoming MEMS-based technological paradigm (MEMS 기반의 새로운 기술적 패러다임에 대비한 공정 기술 분석 및 적용에 대한 고찰)

  • Ko, Yun-Seok
    • The Journal of the Korea institute of electronic communication sciences
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    • v.8 no.7
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    • pp.979-986
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    • 2013
  • Recently, in the electric, electronic, robotic, and medical industries, a great attention has been paid to the development of MEMS-based smart devices with a compact size and highly intelligency. The MEMS technology is very effective in designing into a compact size and lightweight by combining into one the complex electrical, mechanical, chemical, and biological features which are required by smart devices, and at the same time, in bulk batch manufacturing. Therefore, this study, to prepare for upcoming new MEMS-based technological paradigm, analyzes MEMS processes and then considers its Applications.

Technical Overview of Optical MEMS in Information and Telecommunication (정보통신 광 MEMS 기술의 동향분석)

  • Pack, M.C.;Han, G.P.;Kim, Y.Y.;Sohn, Y.J.;Kim, T.Y.;Cho, K.I.
    • Electronics and Telecommunications Trends
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    • v.16 no.4 s.70
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    • pp.23-40
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    • 2001
  • 광 MEMS(Optical MEMS)는 미세 기계, 전자 및 광학기술이 조합하여 이루어지는 종합적인 기술분야로서 정보통신 핵심부품의 정밀화, 고성능화, 경량화 추세에 의해 그 중요성을 더해가고 있다. 본 논문은 정보통신 기술분야에 적용되고 있는 광 MEMS 기술에 대하여 살펴본 것으로, MEMS 시스템을 구성하고 있는 광학적 구성요소의 기술개발 현황, 신소재 및 새롭게 도출된 아이디어 등에 대하여 최신 연구동향을 중심으로 조사.분석하였다. 정보통신 기술의 발전에 따라 응용분야도 다양해지며 신소재의 출현에 따른 새로운 연구분야가 확대되는 등 광 MEMS 기술의 전반적인 기술추세에 대해 전망하였다.

Techniques for Measuring Mechanical Properties of Polysilicon using an ISDG (ISDG를 이용한 다결정실리콘 기계적 물성값 측정법)

  • 오충석
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.7
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    • pp.171-178
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    • 2004
  • Techniques and procedures are presented for measuring mechanical properties on thin-film Polysilicon. Narrow platinum lines are deposited 250 ${\mu}{\textrm}{m}$ apart on tensile specimens that are 3.5 ${\mu}{\textrm}{m}$ thick and 600 ${\mu}{\textrm}{m}$ wide. Load is applied by a piezo-actuator and by hanging weights. Strain is measured by an ISDC at temperatures up to 500 $^{\circ}C$. Measurements of the elastic modulus with jig modifications, loading speed and temperature change are presented first. And then, the preliminary data for the coefficient of thermal expansion and creep behavior are presented as a reference.

Development and Verification of ELT System Using the MEMS Accelerometer (MEMS 가속도계를 적용한 ELT 시스템 개발과 검증)

  • Lee, Sang-Chul;Lee, Dong-Kyu;Kang, Ja-Young
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.38 no.3
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    • pp.294-299
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    • 2010
  • ELT(Emergency Locator Transmitter) is used to send distress signal in the event of an aircraft crash. It is very useful but the ELT may transmit wrong signal caused by misjudging between crash and hard-landing. The reason of this problem is the low accuracy of the mechanical G-switch currently in use. To improve the ELT, we developed an ELT system using the MEMS(Micro Electro-Mechanical Sensor) accelerometer. The ELT system consists of acceleration data acquisition/analysis system, program of crash recognition, and GPS receiving system for the position information of an aircraft crash site. A free-drop table was developed for verification of the ELT system. The free-drop table was designed to replicate the acceleration and the pulse duration of the hard landing and the crash. By using the free-drop table, we showed that the ELT system performed well.

Tuning of Micromachined Gyroscope by the Axial Loads (축방향 하중을 이용한 마이크로 자이로스코프의 고유진동수 조율)

  • Cho, Choong-Hyoun;Park, Youn-Sik;Park, Young-Jin
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2005.11a
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    • pp.88-91
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    • 2005
  • Although the MEMS element is made through a very precise manufacturing process, usually there is the difference between the modeling design and the actual product. So tuning is required. Through the frequency tuning(changing the characteristics of device), we can calibrate the fabrication error and uncertainty. I'll propose the method of changing the natural frequency through the imposing the axial force on the anchor part to separate the sensing part and the tuning part. When the shape of section is the form of rectangular, the degree of the natural frequencies' change under axial force appears D be different. Applying a tuning force of 30 $\mu$N, the natural frequencies' difference can be reduced by 5 percent.

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Effects of $Fe_2O_3$ and $MnO_2$ Additives on Dielectric and Piezoelectric Properties of $Pb(Ni_{1/3}Nb_{2/3})O_3-PbTiO_3-PbZrO_3$ Ceramics for Actuator Applications (액츄에이터 응용을 위한 $Fe_2O_3$$MnO_2$ 첨가에 따른 $Pb(Ni_{1/3}Nb_{2/3})O_3-PbTiO_3-PbZrO_3$ 세라믹스에서의 유전 및 압전 특성)

  • Lim, Eun-Kyeong;Paik, Jong-Hoo;Kim, Chang-Il;Shin, Bum-Seung;Lim, Jong-In;Lee, Young-Jin;Choi, Byung-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.329-330
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    • 2006
  • 본연구에서는 초음파 모터 등의 고출력 액츄에이터에 응용 가능한 $0.4Pb(Ni_{1/3}Nb_{2/3})O_3$-$0.6Pb(Zr_{0.405}Ti_{0.595})O_3$ + 0.25wt% $Fe_2O_3$ 조성시스템에 $MnO_2$ (0~1 wt.%)첨가하여 압전, 유전특성 및 미세구조에 관해 고찰하였다. 본조성을 $1125{\sim}1175^{\circ}C$ 온도에서 2시간 소결하여 시편을 제조하였으며 이의 결정구조 및 미세조직을 분석하였다. $MnO_2$ 첨가량 증가에 따라 압전 상수와 전기기계결함계수는 감소하였으며, 기계적 품질계수는 0.5 wt% 첨가시까지 증가하였으나 첨가량이 그 이상 증가함에 따라 감소하였다. 압전특성은 $1125^{\circ}C$에서 소결한 $MnO_2$ 0.5wt%조성에서 ${\varepsilon}r$ = 2040, kp = 0.66, $d_{33}$ = 504, Qm=438의 우수한 특성을 나타내었다.

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Elastic Property Extraction System of Polycrystalline Thin-Films for Micro-Electro-Mechanical System Device and Its Applications (MEMS 부품을 위한 다결정 박막의 탄성 물성치 추출 시스템과 적용)

  • Jung Hyang Nam;Choi Jae Hwan;Chung Hee Taeg;Lee June Key
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.12 s.177
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    • pp.170-174
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    • 2005
  • A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, effects of kinetics parameters on the extraction of effective elastic properties of polycrystalline thin-films are studied by using statistical method. Effects of the fraction of the potential site($f_p$) among the parameters for deposition process of microstructure on the extraction of effective elastic properties of polycrystalline thin-films are investigated. For this research, polysilicon is applied to this system as the polycrystalline thin-films.

특집 : 레이저 기반 초정밀 초고속 가공시스템 - PCB pattern 미세화에 따른 UV laser driller의 개발

  • Park, Hong-Jin;Seo, Jong-Hyeon
    • 기계와재료
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    • v.22 no.1
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    • pp.22-29
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    • 2010
  • 최근 휴대폰 등 모방일 전자기기 산업에서 차세대 고부가 PCB(MLB, HDI, FPC, 등) 및 고기능 PCB(COF, MOF, SOF)의 급속한 적용 확대로 직경$20{\mu}m$급의 비아홀(viahole) 및 interconnection 홀 가공을 위한 초정밀/초고속 레이저 드릴링 공정 및 장비기술 개발에 대한 시장의 요구가 급증하고 있다. 이에 반해 기존의 CO2 레이저 드릴링은 기술적 한계에 도달하여 시장의 요구에 대응이 불가하며, 선진업체에서는 최근 UV 레이저 드릴링 장비에 대한 시장 점유율을 높여가고 있다. 특히 국내시장은 미국의 ESI사가 독점하고 있어 기술개발 투자를 통한 국산화가 절실한 상황이다. 이에 당사에서는 초고속/초정밀 UV laser 시스템을 이용한 FPC iva hole drilling을 연구과제로 개발을 진행하고 있으며 국산화를 넘어서 세계시장점유를 목표로 공정장비개발을 진행중이다.

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