Browse > Article

Techniques for Measuring Mechanical Properties of Polysilicon using an ISDG  

오충석 (금오공과대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.7, 2004 , pp. 171-178 More about this Journal
Abstract
Techniques and procedures are presented for measuring mechanical properties on thin-film Polysilicon. Narrow platinum lines are deposited 250 ${\mu}{\textrm}{m}$ apart on tensile specimens that are 3.5 ${\mu}{\textrm}{m}$ thick and 600 ${\mu}{\textrm}{m}$ wide. Load is applied by a piezo-actuator and by hanging weights. Strain is measured by an ISDC at temperatures up to 500 $^{\circ}C$. Measurements of the elastic modulus with jig modifications, loading speed and temperature change are presented first. And then, the preliminary data for the coefficient of thermal expansion and creep behavior are presented as a reference.
Keywords
MEMS; Thin-film; Polysilicon; Tensile specimen; ISDG; Elastic modulus; CTE; Creep;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Read, D. T., Cheng, Y.-W., Keller, R. R., McColskey, J. D., 'Tensile Properties of Free-Standing Aluminum Thin Films,' Scripta Materialia, Vol. 45, pp. 583-589, 2001   DOI   ScienceOn
2 Norton, R. L., Machine Design, Prentice Hall, Ch. 2, 2000
3 Oh, C.-S., Sharpe, W. N., Jr., 'Techniques for Measuring Thermal Expansion and Creep of Polysilicon,' Sensors and Actuators A:Physical, Vol. 112, pp. 66-73, 2004   DOI   ScienceOn
4 Read, D. T., Dally, J. W., 'A New Method for Measuring the Constitutive Properties of Thin Films,' Journal of Materials Research, Vol. 8, pp. 1542-1549, 1992   DOI
5 Sharpe, W. N., Jr., Jackson, K., Coles, G., Eby, M. A., Edwards, R. L., 'Tensile Tests of Various Thin Films,' Mechanical Properties of Structural Thin Films, ASTM STP 1413, American Society of Testing and Materials, Orlando, pp. 229-247, 2001
6 Johnson, G. T., Jones, P. T., Howe, R. T., 'Materials Characterization for MEMS: a Comparison of Uniaxial and Bending Tests,' Proceeding of the SPIE, Vol. 3874, pp. 94-101, 2000   DOI
7 Huh, Y.-H., Kim, D.-I., Yoon, K.-J., Kim, K.-S., Oh, C.-S., 'Measurement of Micro-Tensile Properties using ESPI Technique,' J. of the KSPE, Vol. 18, No. 5, pp. 90-97, 2001   과학기술학회마을
8 Sutton, M. A., Wolters, W. J., Peters, W. H., Ranson, W. F., McNeil, S. R., 'Determination of Displacements Using an Improved Digital Image Correlation Method,' Image Vision Computing, Vol. 1, pp. 133-139, 1983   DOI   ScienceOn
9 Chasiotis, I., Knauss, W. G., 'A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy,' Experimental Mechanics, Vol. 42, pp. 51-57, 2002   DOI
10 Sharpe, W. N., Jr., 'An Interferometric Strain/Displacement Measurement System,' NASA Technical Memorandum 101638, 1989
11 Sharpe, W, N., Jr., Oh, C.-S., 'High-Temperature Strain Measurement at the Micrometer Scale,' ATEM'03, JSME-MMD, OS06W0394, 2003
12 Sharpe, W. N., Jr., 'Mechanical Properties of MEMS Materials,' The MEMS Handbook, CRC Press, 3-1 to 3-33, 2001
13 Sharpe, W. N., Jr., Yuan, B., Edwards, R. L.., 'A New Technique for Measuring the Mechanical Properties of Thin Films,' Journal of Microelectromechanical Systems, Vol. 6, pp. 193-199, 1997   DOI   ScienceOn
14 Xie, H., Li, B., Geer, R., Xu, B., Castracane, J., 'Focused Ion Beam Moire Method,' Optics and Lasers in Engineering, Vol. 40, pp. 163-177, 2003   DOI   ScienceOn
15 Sharpe, W. N., Jr., Yuan, B., Vaidyanathan, R., Edwards, R. L., 'New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials,' Proceedings of the SPIE Symposium on Microlithography and Metrology in Micromachining II, pp. 78-91, 1996
16 Sharpe, W. N., Jr., Danley, D., Lavan, D., 'Microspecimen Tensile Tests of A533-B Steel,' Small Specimen Test Techniques, ASTM STP 1329, American Society for Testing and Materials, pp. 497-512, 1998
17 Oh, C.-S., Coles, G., Sharpe, W. N., Jr., 'High Temperature Behavior of Polysilicon,' Mat. Res. Soc. Symp. Proc. Vol. 741, J3.6.1-J3.6.6, 2002
18 Michalicek, A. M., Sene, D. E., Bright, V. M., 'Advanced Modeling of Micromirror Devices,' Proc. Intn'l Conf. on Integrated Micro/Nanotechnology for Space Applications, pp. 214-229, 1995
19 Kahn, H., Huff, M. A., Heuer, A. H., 'Heating Effect on the Young's Modulus of Films Sputtered onto Micromachined Resonators,' Materials Research Society, Vol. 518, pp. 33-38, 1998   DOI