통합 검색 | Korea Science

김태송
- 세라미스트
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- 제7권3호
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- pp.48-54
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- 2004
반도체 집적화 공정 기술을 바탕으로 기계적 구조물(Micromachined mechanical structure)구현을 가능하게 한 Microelectromechanical systems (MEMS) 기술은 최근 들어 새로운 연구분야로서 크게 각광받고 있다. 이러한 MEMS 기술은 자동차, 산업, 의공학, 정보과학 등에 폭넓게 응용되고 있으며 실리콘 가공 기술 및 미세전기소자 (Microelectronics) 기술이 융합되어 전기$.$기계적인 미세소자를 제작하는데 널리 이용되고 있다. (중략)
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제태진;이응숙;최두선;이선우
- 한국정밀공학회:학술대회논문집
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- 한국정밀공학회 2001년도 춘계학술대회 논문집
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- pp.934-937
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- 2001
It is well-known that the micro fabrication technology of micro parts are the high energy beam or silicon-based micro machining method such as LIGA Process, Laser machining, photolithography and etching technology. But, for fabricating complex 3-D structure it is better to use mechanical machining. This machining method by the mechanical machine tool with nanometer accuracy is getting attention in some field-especially micro optics machining such as grating, holographic lens, micro lens array, fresnel lens, encoder disk etc.. In this study, we survey the micro fabrication by mechanical cutting method and set up the mechanical micro machining system. And we carried out micro cutting experiments for micro parts with v-shape groove.
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송기형;이동윤;박경희;이석우;김현철;제태진
- 한국기계가공학회지
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- 제11권2호
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- pp.7-12
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- 2012
In order to cope with the requirements of smaller patterns, larger surfaces and lower costs in the fields of displays, optics and energy, greater attentions are now being paid to the development of micro-pattern machining technology. Compared with flat moulds, large drums with micro patterns (roll moulds) have the advantages of short delivery, ease of manufacturing larger surfaces, and continuous moulding. This paper introduced the machining process technology of the roll moulds for display industry. The environmental effects were discussed and the importance of temperature maintenance was experimentally emphasized. The real time monitoring system for micro machining was introduced. A commercial solution was used to simulate the micro grooving and a deformation model of micro machined pattern was finally introduced.
KSCI

이천
- 전기의세계
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- 제43권11호
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- pp.15-21
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- 1994
레이저의 첨단기술에의 응용은, 의학, 생물학, 화학, 물리계측, 가공, 통신, 정보처리 등 다분야에 걸쳐, 수 mW에서 수 십 kW까지의 출력 영역의 레이저가 이용되고 있다. 본고에서는, 첫째, 레이저를 이용한 첨단기술의 하나인 초미세가공 기술로서, 특히, 반도체의 레이저 프로세스로 화제를 모으고 있는 1) 에칭, 2) CVD(Chemical Vapor Deposition), 3) 적층성장(epitaxy), 4) 리소그라피, 5) 홀로그라피 등에 대하여, 다른 프로세스(이온 빔 프로세스, 플라즈마 프로세스, X선에 의한 프로세스등)와 비교하여 원리, 특징, 응용상태, 장래의 전망에 대하여논하고, 둘째, 엑시머 레이저의 응용 분야에서의 가장 실용화에 접근한것 중의 하나인 애블레이숀(ablation) 가공에 대하여 논한다.
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백형창;김병희;장인배
- 산업기술연구
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- 제19권
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- pp.1-7
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- 1999
This is the pre-study to pile up the basic technique for the electro-discharge machining in the field of micro-drilling. The machined chips are flowed out from the machining area by the flow arisen from the high speed rotation of the electrode. The cylindrical shape electrode, whose diameter is 0.5mm, is clamped by the three point clamping type clamper and the clamper is attached at the front shaft of the high speed rotating DC motor. The current for machining is controlled by pulse width modulation technique and the machining conditions such as frequency and duty ratio are changed to find out the effect of the variables for machined results.
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