• Title/Summary/Keyword: 미끄럼속도

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Particle Deposition Characteristics with Electrostatic Effect on Semiconductor Wafers (정전효과를 고려한 반도체 웨이퍼의 입자침착 특성)

  • Lee, Kun-Hyung;Chae, Seung-Ki;Moon, Young-June
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.779-785
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    • 2006
  • Particle transport and deposition characteristics on semiconductor wafers inside the chamber were experimentally investigated via a particle generation & deposition system and a wafer surface scanner. Especially the relation between particle size($0.083{\sim}0.495{\mu}m$) and particle deposition velocity with ESA(Electrostatic Attraction) effect was studied. Spot deposition technique with the deposition system using nozzle type outlets of the chamber was newly conducted to derive particle deposition velocity and all experiment results were compared with the previous study and were in a good agreement as well.

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Optimum Monitoring Parameters for the Safety of Mechanical Seals (미캐니컬 씰의 안전운용 감시를 위한 최적 계측인자)

  • Soon-Jae Lim;Man-Yong Choi
    • Journal of the Korean Society of Safety
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    • v.12 no.4
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    • pp.214-219
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    • 1997
  • The mechanical seals, which are installed in rotating machines like pump and compressor, are generally used as sealing devices in the many fields of industries. The failure of mechanical seals such as leakage, crack, breakage, fast and severe wear, excessive torque, and squeaking results in big problems. To identify abnormal phenomena on mechanical seals and to propose the proper monitoring parameter for the failure of mechanical seals, sliding wear experiments were conducted. Acoustic emission, torque, and temperature were measured during experiments. Optical microstructure was observed for the wear processing after every 10 minute sliding at rotation speed of 1750 rpm and scanning electron microscopy was also observed. Except for the initial part of every experiment, the variation of acoustic emission was well coincided with torque variation during the experiments. This study concludes that acoustic emission and torque are proper monitoring parameters for the failure of mechanical seals. The intensity of acoustic emission signals is measured in root mean square voltage. Temperature of sealing face will be used as a parallel parameter for increasing the reliability of monitoring system.

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Sliding Wear Properties of Graphite as Sealing Materials for Cut off Hot Gas (고온차단 기밀용 그라파이트의 고온 미끄럼마모 특성 평가)

  • Kim, YeonWook;Kim, JaeHoon;Yang, HoYeong;Park, SungHan;Lee, HwanKyu;Kim, BumKeun;Lee, SeungBum;Kwak, JaeSu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.11
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    • pp.1349-1354
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    • 2013
  • Sealing structure to prevent flowing hot gas into the driving device, located between the driving shaft and the liner of On-Off valve for controlling the hot gas flow path was studied. Wear occurs due to the constant movement of the driving shaft controlled by actuator on graphite as the sealing material. In this paper, the dynamic wear behavior in high temperature of graphite(HK-6) to be used as sealing material was evaluated. Reciprocating wear test was carried out for the graphite(HK-6) to the relative motion between shaft materials(W-25Re). The results of friction coefficient and specific wear rate according to contact load, sliding speed at room temperature and $485^{\circ}C$ considering the actual operating environment were evaluated. Through the SEM analysis of the worn surface, third body as lubricant films were observed and lubricant effect of third body was considered.

Automobile Collision Reconstruction Using Post-Impact Velocities and Crush Profile (충돌 후 속도와 충돌 변형으로부터 자동차 충돌 재구성)

  • 한인환
    • Journal of Korean Society of Transportation
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    • v.18 no.4
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    • pp.107-115
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    • 2000
  • We suggest a method which solves the planar, two vehicle collision reconstruction problem. The method based on the Principle of impulse and momentum determines the pre-impact velocity components from Post-impact velocity components, vehicle Physical data and collision geometry. A novel feature is that although the impact coefficients such as the restitution coefficient and the impulse ratio are unknown, the method can estimate automatically the coefficients and calculate the pre-impact velocity components. This reverse calculation is important for vehicle accident reconstruction, since the pre-impact velocities are unknown and Post-impact Phase is the starting Point in a usual collision analysis. However. an inverse solution is not always Possible with the analytical rigid-body impact model. Mathematically, one does not exist under the common velocity condition. On the other hand, our method has a capability of reverse calculation under the condition if the absorbed energy during the collision process can be estimated using the crush profile. To validate the developed collision reconstruction a1gorithm, we use car-to-car collision test results. The analysis and experimental results agree well in the impact coefficients and the Pre-impact velocity components.

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Papers : Analysis of Numerical Instability of AUSM - type Schemes (논문 : AUSM 계열 수치기법의 수치적 불안정성에 대한 분석)

  • Kim,Gyu-Hong;Lee,Gyeong-Tae;Kim,Jong-Am;No,O-Hyeon
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.30 no.3
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    • pp.27-36
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    • 2002
  • Numerical stability is studied based on numerics and mathematics. It is frequently observed in the region where velocity is zero. In that region, the Euler equation have numerous solutions and, thus, it is impossible to determine a unique solution with only governing equations. However, a unique solution can be determined by additional outer flow conditions or outer numerical discontinuity calculation since the information or a unique solution under undisturbed conditions is lost by disturbances. In this reason, the numerical scheme comsistent with Euler equations cannot remove shock instability completely.

Effects of Humidity and Sliding Speed on the Wear Properties of $Si_3N_4$ Ceramics (습도 및 미끄럼 속도에 따른 질화규소의 마찰 마모 특성에 관한 연구)

  • 이기현;김경웅
    • Tribology and Lubricants
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    • v.9 no.2
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    • pp.63-69
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    • 1993
  • The wear properties of two types of $Si_3N_4$(silicon nitride) exposed to high and low humidity were examined experimentally for various sliding speed. Bearing steel was used as the disk material at pin-on-disk type sliding. Wear rates of pressureless sintered-plus-hot-isostatic pressed Si3N4 were slightly lower than those of pressureless sintered $Si_3N_4$. It was observed that adsorbed moisture and sliding speed markedly influenced the wear properties of $Si_3N_4$. The highest wear rate was obtained under the high humidity and low sliding speed condition. As the sliding speed was increased, wear rates were decreased and the humidity effect on the wear rates of $Si_3N_4$ was lowered. The result that the $Si_3N_4$ pin showed a high wear rate under the high humidity condition was explained by the property change due to the adsorbed moisture, plowing action by the hard particles of $Fe_2O_3$ from the disk, and the corrosion effect at $Si_3N_4$ surface. Increase in sliding speed was supposed to have reduced the humidity effect on wear rate of $Si_3N_4$ by raising the temperature of both the bearing steel disk and $Si_3N_4$ pin specimen.

$H_{\infty}$ Robust Yaw-Moment Control Based on Brake Switching for the Enhancement of Vehicle Performance and Stability (차량 성능 및 안정성 향상을 위한 $H_{\infty}$ 요 모멘트 강인제어)

  • Ahn, Woo-Sung;Park, Jong-Hyeon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.8 s.179
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    • pp.1899-1909
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    • 2000
  • This paper proposes a new $H_{\infty}$ yaw moment control scheme using brake torque switching for improving vehicle performance and stability especially in high speed driving. In the scheme, one wheel is selected, depending on the vehicle states, at which a brake torque for control is applied. Steering angles are modeled as a disturbance to the system and the $H_{\infty}$ controller is designed to minimize the difference between the performance of the vehicle and that of the desired model. Its performance robustness as well as stability robustness to system parameter variations is assured through ${\mu}$-analysis. Various simulations with a nonlinear 8-DOF vehicle model show that proposed controller enhances the vehicle performance and stability under disturbances and parameter variations as well as under the normal driving condition.

Three-dimensional Rarefied Flows in Rotating Helical Channels (헬리컬 채널내부의 3차원 희박기체유동)

  • Hwang, Y.K.;Heo, J.S.
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.625-630
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    • 2000
  • Numerical and experimental investigations are peformed for the rarefied gas flows in pumping channels of a helical-type drag pump. Modern turbomolecular pumps include a drag stage in the discharge side, operating roughly in $10^{-2}{\sim}10Torr$. The flow occurring in the pumping channel develops from the molecular transition to slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic particle approach through the use of the direct simulation Monte Carlo(DSMC) method. The flow in a pumping channel is three-dimensional(3D), and the main difficulty in modeling a 3D case comes from the rotating frame of reference. Thus, trajectories of particles are no longer straight lines. In the Present DSMC method, trajectories of particles are calculated by integrating a system of differential equations including the Coriolis and centrifugal forces. Our study is the first instance to analyze the rarefied gas flows in rotating frame in the presence of noninertial effects.

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3-D Flow Analysis for Compression Molding of Fiber-Reinforced Polymeric Composites with Ratio of Extensional & Shear Viscosity (인장 및 전단점성비를 고려한 섬유강화 플라스틱 복합재의 압축성형에 있어서 3차원 유한요소해석)

  • 조선형;윤두현;김형철;김이곤
    • Composites Research
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    • v.12 no.1
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    • pp.11-18
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    • 1999
  • The compression molding is widely used in the automotive industry to produce products that are large, thin, lightweight and stiff. The molded product is formed by squeezing a fiber-reinforced plastic composites. During a molding process of fiber reinforced thermoplastic composites, control of filling patterns in mold, orientation and distribution of fibers are needed to predict the effects of molding parameters on the flow characteristics. It is the objective of this paper to develop an isothermal compression molding simulation that can handle both thin and thick charges and motion of the flow front, and can predict pressure distributions and accurate velocity gradients. The composites are treated as an incompressible Newtonian fluid. The effects of slip parameter $\alpha$ and extensional/shear viscosity ratio $\zeta$ on the mold filling parameters are also discussed.

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Autonomous Aerobatic Flight for Fixed Wing Aircraft (고정익 항공기의 자율 곡예비행)

  • Park, Sang-Hyuk
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.37 no.12
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    • pp.1217-1224
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    • 2009
  • A simple and effective guidance and control scheme that enables autonomous three-dimensional path-following for a fixed wing aircraft is presented. The method utilizes the nonlinear path-following guidance law for the outer loop that creates steering acceleration command based on the desired flight path and the current position and velocity of the vehicle. The scheme considers the gravity in the guidance level, where it is subtracted from the acceleration command to form the specific force acceleration command which the aircraft is better suited to follow than the total acceleration command in the inner-loop. A roll attitude control scheme is also presented that enables inverted flight or sideslip maneuvers such as slow roll and knife-edge. A series of aerobatic maneuvers are demonstrated through simulations to show the potential of the proposed scheme.