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InSb 적외선 감지 소자 pn 접합 형성 연구

  • Park, Se-Hun;Lee, Jae-Yeol;Kim, Jeong-Seop;Yang, Chang-Jae;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.128-128
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    • 2010
  • 중적외선 영역은 장애물에 의해서 파장의 흡수가 거의 일어나지 않기 때문에 적외선 소자에서 널리 이용되고 있다. 현재 대부분의 중적외선 소자에는 HgCdTe (MCT)가 사용되고 있지만, 3성분계 화합물이 가지는 여러 문제를 가지고 있다. 반면에, 2성분계 화합물인 인듐안티모나이드 (InSb)는 중적외선 영역 ($3-5\;{\mu}m$) 파장 대에서 HgCdTe와 대등한 소자 특성을 나타냄과 동시에 낮은 기판 가격, 소자 제작의 용이성, 그리고 야전과 우주 공간에서 소자 동작의 안정성 때문에 HgCdTe를 대체할 물질로 주목을 받고 있다. InSb는 미국과 이스라엘과 같은 일부 선진국을 중심으로 연구가 되었지만, 국방 분야의 중요한 소자로 인식되었기 때문에 소자 제작에 관한 기술적인 내용은 국내에 많이 알려지지 않은 상태이다. 따라서 본 연구에서는 InSb 소자 제작의 기초연구로 절연막과 pn 접합 형성에 대한 연구를 수행하였다. 절연막의 특성을 알아보기 위해, InSb 기판위에 $SiO_2$$Si_3N_4$를 PECVD (Plasma Enhanced Chemical Vapor Deposition)로 증착을 하였다. 절연막의 계면 트랩 밀도는 77K에서 C-V (Capacitance-Voltage) 분석을 통하여 계산하였으며, Terman method 방법을 이용하였다.[1] $SiO_2$$120-200^{\circ}C$의 온도 영역에서 계면 트랩 밀도가 $4-5\;{\times}\;10^{11}cm^{-2}$범위를 가진 반면, $240^{\circ}C$의 경우 계면 트랩 밀도가 $21\;{\times}\;10^{11}cm^{-2}$로 크게 증가하였다. $Si_3N_4$$SiO_2$ 절연막에 비해서 3배 정도의 높은 계면 트랩 밀도 값을 나타내었으며. Remote PECVD 장비를 이용하여 $Si_3N_4$ 절연막에 관한 연구를 추가적으로 진행하여 $7-9\;{\times}\;10^{11}cm^{-2}$ 정도의 계면 트랩 밀도 값을 구할 수가 있었다. 따라서 InSb에 대한 절연막은 $200^{\circ}C$ 이하에서 증착된 $SiO_2$와 Remote PECVD로 증착 된 $Si_3N_4$가 적합하다고 할 수 있다. 절연막 연구와 더불어 InSb 소자의 pn 접합 연구를 진행하였다. n-InSb (100) 기판 ($n\;=\;0.2-0.85\;{\times}\;10^{15}cm^{-3}$ @77K)에 $Be^+$이온 주입하여 p층을 형성하여 제작 되었으며, 열처리 조건에 따른 소자의 특성을 관찰 하였다. $450^{\circ}C$에서 30초 동안 RTA (Rapid Thermal Annealing)공정을 진행한 샘플은 -0.1 V에서 $50\;{\mu}A$의 높은 암전류가 관찰되었으며, 열처리 조건을 60, 120, 180초로 변화하면서 소자의 특성 변화를 관찰하였다.

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고온 GaN 버퍼층 성장방법을 이용한 비극성 a-plane GaN 성장 및 특성평가

  • Park, Seong-Hyeon;Kim, Nam-Hyeok;Lee, Geon-Hun;Yu, Deok-Jae;Mun, Dae-Yeong;Kim, Jong-Hak;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.125-125
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    • 2010
  • 극성 [0001] 방향으로 성장된 질화물 기반의 LED (light emitting diode) 는 분극현상에 의해 발생하는 강한 내부 전기장의 영향을 받게 된다. 이러한 내부 전기장은 양자우물 내의 전자와 정공의 공간적 분리를 야기하고 quantum confined Stark effect (QCSE)에 의한 발광 파장의 적색 편이가 발생하며 양자효율의 저하를 가져오게 된다. 이러한 문제를 해결하기 위해 InGaN/GaN이나 AlGaN/GaN 양자 우물구조를 GaN의 m-plane (1$\bar{1}$00) 이나 a-plane (11$\bar{2}$0) 등 비극성면 위에 성장하려는 시도를 하고 있다. 그러나 비극성 면의 비등방성 (anisotropy) 으로 인하여 결정성이 높은 비극성 GaN을 성장하는 데에는 많은 어려움이 있다. GaN 층의 표면을 평탄화하고 결정성을 향상시키기 위해서 저온 GaN 또는 AlN 버퍼층을 성장하는 2단계 방법이나 고온 버퍼층을 이용하여 성장하는 연구들이 많이 진행되고 있다. 본 연구에서는 고온 GaN 버퍼층을 이용하여 기존의 2단계 성장과정을 단순화한 비극성 a-plane GaN을 r-plane 사파이어 기판위에 유기금속 화학증착법 (MOCVD)으로 성장하였다. 사파이어 기판위에 AlN 층을 형성하기 위한 nitridation 과정 후 1030 도에서 두께 45 ~ 800 nm의 고온 GaN 버퍼층을 성장하고 총 박막 두께가 2.7 ~ 3 um 가 되도록 a-plane GaN을 성장하여 표면 양상의 변화와 결정성을 확인하였다. 또한 a-plane GaN 박막 성장 시에 성장 압력을 100 ~ 300 torr 로 조절하며 박막 성장의 변화 양상을 관찰하였다. 고온 GaN 버퍼층 성장 두께가 감소함에 따라 결정성은 증가하였으나 표면의 삼각형 형태의 pit 밀도가 증가함을 확인하였다. 또한 성장 압력이 감소함에 따라 표면 pit은 감소하였으나 결정성도 감소하는 것을 확인하였다. 성장 압력과 버퍼층 성장 두께를 조절하여 표면에 삼각형 형태의 pit이 존재하지 않는 RMS roughness 0.99 nm, 관통전위밀도 $1.78\;{\times}\;10^{10}/cm^2$, XRD 반가폭이 [0001], [1$\bar{1}$00] 방향으로 각 798, 1909 arcsec 인 a-plane GaN을 성장하였다. 이 연구를 통해 고온 GaN 버퍼 성장방법을 이용하여 간소화된 공정으로 LED 소자 제작에 사용할 수 있는 결정성 높은 a-plane GaN을 성장할 수 있는 가능성을 확인하였다.

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Comparative Analysis of Elementary Mathematics Textbooks in Korea and China: Focused on the area of Geometry (우리나라와 중국의 초등수학 교과서의 도형영역 비교.분석)

  • Yu, Jaehyuk;Lee, Daehyun
    • Education of Primary School Mathematics
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    • v.16 no.1
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    • pp.57-70
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    • 2013
  • This study is aimed to compare the area of geometry of elementary mathematics textbooks in korea and china. Through this study, we would like to suggest some guidelines in order to develop geometric curriculum and textbooks in korea and to search for more efficient methods of learning mathematics. For this, we have looked through the general characteristics of geometry domain in mathematics curriculums and the textbooks in korea and china. Furthermore, we have found the similarities and differences while comparing specific contents in the two countries. The followings are the conclusions of this study. First, The mathematics curriculum in korea is divided into 'figure' domain, but the one in china is divided into 'space and figure' domain, which deals with figure and measurement. And china constructs the contents of the basic figure as a whole unit. Second, korea gives clear learning aims about contents whereas china gives learning activities. Lastly, when starting teaching a plain figure, korea focuses on checking and finding definitions and characters through fundamental figures. However, china focuses on figuring out components and the relations among them throughout various plain figure activities.

Supplementation of the Indoor Location Tracking Techniques Based-on Load-Cells Mechanism (로드셀 기반의 실내 위치추적 보완 기법)

  • YI, Nam-Su;Moon, Seung-Jin
    • Journal of Internet Computing and Services
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    • v.17 no.6
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    • pp.1-8
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    • 2016
  • Current indoor intrusion detection and location tracking methods have the weakness in seamless operations in tracking the objective because the object must possess a communicating device and the limitation of the single cell size (approximate $100cm{\times}100cm$) exits. Also, the utilization of CCTV technologies show the shortcomings in tracking when the object disappear the area where the CCTV is not installed or illumination is not enough for capturing the scene (e.g. where the context-awarded system is not installed or low illumination presents). Therefore, in this paper we present an improved in-door tracking system based on sensor networks. Such system is built on a simulated scenario and enables us to detect and extend the area of surveillance as well as actively responding the emergency situation. Through simulated studies, we have demonstrated that the proposed system is capable of supplementing the shortcomings of signal cutting, and of estimating the location of the moving object. We expect the study will improve the better analysis of the intruder behavior, the more effective prevention and flexible response to various emergency situations.

Pin Distribute Method of Twist Cable at Military Unmanned Vehicle Wiring Unit Connector (군용 무인 이동체 배선장치 커넥터에서 트위스트 케이블 핀 배치 최적화 방안)

  • Eun, Hee-hyun;Roh, Dong-gyu;Kwak, Gyu-min;Kim, Jae-seung;Lee, Chul
    • Journal of Advanced Navigation Technology
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    • v.24 no.4
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    • pp.245-250
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    • 2020
  • Currently, unmanned military vehicles under development in Korea have more devices to carry out various missions, and interface cables between them are also increasing. In addition, due to a small space problem inside the unmanned vehicle, devices are required to be miniaturized and integrated. For two reasons, connectors also need to be selected, which makes them vulnerable to noise due to the closer distance between the pins. In this paper, we analyzed how much the magnetic field produced by noise at the connector pin where cable twist is released affects the surrounding pin and presented the guide for optimal pin placement. First, the effect of magnetic field is greater than the crosstalk between pin and pin. Second, the magnetic field on both sides between + and - is strong when approaching one step with noise source. Third, the magnetic field strength is improved when setting the ground pin as the ground pin between the noise and the original signal when approaching the A noise source and the two steps. Fourth, in the case of a differential mode communication, the optimal placement area of the sensitive signal was presented according to positions Tx± and Rx±.

Inference of the Conceptual Model of Wild Gardens - A Comparative Study of William Robinson and Gertrude Jekyll - (와일드 가든(Wild Garden)의 개념적 모형 유추 - 윌리암 로빈슨(William Robinson)과 거투르드 제킬(Gertrude Jekyll)의 비교 연구 -)

  • Park, Eun-Yeong;Yoon, Sang-Jun
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.31 no.4
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    • pp.62-69
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    • 2013
  • The origin of natural planting, which is getting the spotlight in modern time facing natural and environmental problems, can be found from wild gardens. They were started by William Robinson and concretely embodied by Gertrude Jekyll. It is worth shedding new light on wild gardens, as they served as a pathbreaker for ecological design and an important foundation for the specialization of naturalism, which are part of the most important topics in modern gardens. This study aimed to infer the conceptual model of wild gardens and identify their historic significance by comparatively analyzing Robinson's Gravetye Manor and Jekyll's Munstead Wood. The results are: Firstly, they inherited inspirations for spatial organization from basic cottage gardens and introduced informal forms. Secondly, in terms of the use of materials, they had observed various climates in their journeys so that they could use both native and naturalized plants based on their understanding of the plants' hardiness and exotic species. They also displayed interests in plants in the woodlands and forests. Thirdly, in terms of design techniques, they investigated the colors and textures of individual plants and their relationships to produce a variety of views that resembled nature in microcosm. Fourthly, in terms of maintenance, their basic orientation was the minimum maintenance to allow plants to live according to their nature.

Extracting Typical Group Preferences through User-Item Optimization and User Profiles in Collaborative Filtering System (사용자-상품 행렬의 최적화와 협력적 사용자 프로파일을 이용한 그룹의 대표 선호도 추출)

  • Ko Su-Jeong
    • Journal of KIISE:Software and Applications
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    • v.32 no.7
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    • pp.581-591
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    • 2005
  • Collaborative filtering systems have problems involving sparsity and the provision of recommendations by making correlations between only two users' preferences. These systems recommend items based only on the preferences without taking in to account the contents of the items. As a result, the accuracy of recommendations depends on the data from user-rated items. When users rate items, it can be expected that not all users ran do so earnestly. This brings down the accuracy of recommendations. This paper proposes a collaborative recommendation method for extracting typical group preferences using user-item matrix optimization and user profiles in collaborative tittering systems. The method excludes unproven users by using entropy based on data from user-rated items and groups users into clusters after generating user profiles, and then extracts typical group preferences. The proposed method generates collaborative user profiles by using association word mining to reflect contents as well as preferences of items and groups users into clusters based on the profiles by using the vector space model and the K-means algorithm. To compensate for the shortcoming of providing recommendations using correlations between only two user preferences, the proposed method extracts typical preferences of groups using the entropy theory The typical preferences are extracted by combining user entropies with item preferences. The recommender system using typical group preferences solves the problem caused by recommendations based on preferences rated incorrectly by users and reduces time for retrieving the most similar users in groups.

Tag Trajectory Generation Scheme for RFID Tag Tracing in Ubiquitous Computing (유비쿼터스 컴퓨팅에서 RFID 태그 추적을 위한 태그 궤적 생성 기법)

  • Kim, Jong-Wan;Oh, Duk-Shin;Kim, Kee-Cheon
    • The KIPS Transactions:PartD
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    • v.16D no.1
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    • pp.1-10
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    • 2009
  • One of major purposes of a RFID system is to track moving objects using tags attached to the objects. Because a tagged object has both location and time information expressed as the location of the reader, we can index the trajectory of the object like existing spatiotemporal objects. More efficient tracking may be possible if a spatiotemporal trajectory can be formed of a tag, but there has not been much research on tag trajectory indexes. A characteristic that distinguishes tags from existing spatiotemporal objects is that a tag creates a separate trajectory in each reader by entering and then leaving the reader. As a result, there is a trajectory interruption interval between readers, in which the tag cannot be located, and this makes it difficult to track the tag. In addition, the point tags that only enter and don't leave readers do not create trajectories, so cannot be tracked. To solve this problem, we propose a tag trajectory index called TR-tree (tag trajectory R-tree in RFID system) that can track a tag by combining separate trajectories among readers into one trajectory. The results show that TR-tree, which overcomes the trajectory interruption superior performance than TPIR-tree and R-tree.

The Design and Implementation of a Web Site for Self-directed Learning for Music Stages in Middle School (중학교 음악교과에서 자기주도적 학습을 위한 웹 사이트 설계 및 구현)

  • Park, So-Young;Kim, Chang-Suk
    • Journal of the Korean Institute of Intelligent Systems
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    • v.16 no.1
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    • pp.66-71
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    • 2006
  • Lately teaching-learning system on the web site offers broad educational environment without any restriction of time and place to the teachers and learners. Using a web site in music education turned out to be effective. It provokes learner's interest and guides self-directed learning. Therefore, on this research, the web site for self-directed learning in music subject was designed and embodied as an assistant material of learning which is suitable for learner's level and demand As a result of using the web site in music class, there are some responses of students. First, there were 27 students positive responses$(79.4\%)$ of 34 students in the learning effect of the web site, and 25 students$(73.5\%)$ of 34 showed their will to use the web site continually if it is modified and supplemented. Second, some students answered that using this program in Diagnosis Evaluation and Formative Test could have an instant result, which was used for the material of feedback. Third, there was a positive evaluation of helping self-directed learning.

Model Predictive Control for Distributed Storage Facilities and Sewer Network Systems via PSO (분산형 저류시설-하수관망 네트워크 시스템의 입자군집최적화 기반 모델 예측 제어)

  • Baek, Hyunwook;Ryu, Jaena;Kim, Tea-Hyoung;Oh, Jeill
    • Journal of the Korean Institute of Intelligent Systems
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    • v.22 no.6
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    • pp.722-728
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    • 2012
  • Urban sewer systems has a limitation of capacity of rainwater storage and problem of occurrence of untreated sewage, so adopting a storage facility for sewer flooding prevention and urban non-point pollution reduction has a big attention. The Korea Ministry of Environment has recently introduced a new concept of "multi-functional storage facility", which is crucial not only in preventive stormwater management but also in dealing with combined sewer overflow and sanitary sewer discharge, and also has been promoting its adoption. However, reserving a space for a single large-scale storage facility might be difficult especially in urban areas. Thus, decentralized construction of small- and midium-sized storage facilities and its operation have been introduced as an alternative way. In this paper, we propose a model predictive control scheme for an optimized operation of distributed storage facilities and sewer networks. To this aim, we first describe the mathematical model of each component of networks system which enables us to analyze its detailed dynamic behavior. Second, overflow locations and volumes will be predicted based on the developed network model with data on the external inflow occurred at specific locations of the network. MPC scheme based on the introduced particle swarm optimization technique then produces the optimized the gate setting for sewer network flow control, which minimizes sewer flooding and maximizes the potential storage capacity. Finally, the operational efficacy of the proposed control scheme is demonstrated by simulation study with virtual rainstorm event.