• Title/Summary/Keyword: 무초점 광학계

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Design and Analysis of a Receiver-Transmitter Optical System for a Displacement-Measuring Laser Interferometer (위치변위 레이저 간섭계용 송수신 광학계의 설계 및 분석)

  • Yun, Seok-Jae;Rim, Cheon-Seog
    • Korean Journal of Optics and Photonics
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    • v.28 no.2
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    • pp.75-82
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    • 2017
  • We present a new type of receiver-transmitter optical system that can be adapted to the sensor head of a displacement-measuring interferometer. The interferometer is utilized to control positioning error and repetition accuracy of a wafer, down to the order of 1 nm, in a semiconductor manufacturing process. Currently, according to the tendency of scale-up of wafers, an interferometer is demanded to measure a wider range of displacement. To solve this technical problem, we suggest a new type of receiver-transmitter optical system consisting of a GRIN lens-Collimating lens-Afocal lens system, compared to conventional receiver-transmitter using a single collimating lens. By adapting this new technological optical structure, we can improve coupling efficiency up to about 100 times that of a single conventional collimating lens.

Design of 4:1 I$\mathbb{R}$ zoom afocal telescope (원적외선 대역 4 : 1 줌 망원경 광학계 설계)

  • 김현숙;김창우;홍석민
    • Korean Journal of Optics and Photonics
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    • v.9 no.3
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    • pp.134-141
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    • 1998
  • A high performance afocal zoom telescope has been designed to operate in the 7.6${\mu}{\textrm}{m}$ to 10.3${\mu}{\textrm}{m}$ waveband for thermal imaging system. This IR zoom telescope is characterized by using of two movable optical element groups, variator and compensator, with mechanically compensated method and the positioning of these groups is controlled by means of a computerized program. The optical performance over the entire 4:1 zoom range and $\pm$2.31~$\pm$9.36 degrees field of view is near diffraction limit while maintaining a constant F-number. The all refracting surfaces of this system except only one aspheric surface are spherical curvature and the material for the optical elements is selected Ge and ZnSe which is used for correction of chromatic aberration.

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Optical Design of Afocal Zoom Telescope System for Thermal Imagery (열상장비용 줌무초점망원경 설계)

  • 홍경희;김창우
    • Korean Journal of Optics and Photonics
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    • v.6 no.1
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    • pp.1-7
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    • 1995
  • A IR zoom telescope system was designed for thermal imagery. The magnification is 4-14 and the focal length of eye piece is 25 mm. First, the frame was built up with first order optics and started design with 3rd order optics. There after, we can get the final design by optimization technique through finite ray tracing. The optical system was optimized with ray aberration or angular aberration including higer orders. Finally, The performance of the optical system was accessed by calculating the diffraction MTF from the design data. data.

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Optical system design for stereoscopic video-recorder (비디오 입체영상녹화를 위한 광학계 설계)

  • Hong, Kyung-Hee
    • Korean Journal of Optics and Photonics
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    • v.13 no.6
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    • pp.506-509
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    • 2002
  • An optical system for a stereoscopic video recorder is designed with the field of view 42$^{\circ}$ and effective diameter 22 mm. We can use it by attaching it to the front lens of any video camera or camcorder to record a stereoscopic scene. This system is a double Kepler type afocal system to make the image erect and a bi-ocular type to record and display the stereoscopic scene. The optical tube length is folded with several flat mirrors and a beam splitter to be compact. This optical system is composed of 4 groups of lenses and each group serves as a relay lens for minimizing the vignetting effect. Whole field stereoscopic scenes may be captured by perpendicularly polarized alternated recording with a chopper and two perpendicular polarizers, without any loss of light energy. The displayed images may be seen stereoscopically with polarized spectacles and are kinetic because of an afterimage effect.

Design and Analysis of a Laser Lift-Off System using an Excimer Laser (엑시머 레이저를 사용한 LLO 시스템 설계 및 분석)

  • Kim, Bo Young;Kim, Joon Ha;Byeon, Jin A;Lee, Jun Ho;Seo, Jong Hyun;Lee, Jong Moo
    • Korean Journal of Optics and Photonics
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    • v.24 no.5
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    • pp.224-230
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    • 2013
  • Laser Lift-Off (LLO) is a process that removes a GaN or AIN thin layer from a sapphire wafer to manufacture vertical-type LEDs. It consists of a light source, an attenuator, a mask, a projection lens and a beam homogenizer. In this paper, we design an attenuator and a projection lens. We use the 'ZEMAX' optical design software for analysis of depth of focus and for a projection lens design which makes $7{\times}7mm^2$ beam size by projecting a beam on a wafer. Using the 'LightTools' lighting design software, we analyze the size and uniformity of the beam projected by the projection lens on the wafer. The performance analysis found that the size of the square-shaped beam is $6.97{\times}6.96mm^2$, with 91.8 % uniformity and ${\pm}30{\mu}m$ focus depth. In addition, this study performs dielectric coating using the 'Essential Macleod' to increase the transmittance of an attenuator. As a result, for 23 layers of thin films, the transmittance total has 10-96% at angle of incidence $45-60^{\circ}$ in S-polarization.

Development and Design of the Optical System of a Night Scope (Night Scope 광학계의 설계 및 개발)

  • Lee, Dong-Hee;Lim, Yang-Moo
    • Journal of Korean Ophthalmic Optics Society
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    • v.9 no.1
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    • pp.11-17
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    • 2004
  • We tried to design and manufacture a night scope which is used in the leisure sports field. The whole system consists of an IR light source part, an objective lens part, an intensifier tube part and an eye_piece lens part. We designed an objective lens part to the infinite object imaging optical-system with 80mm focal-length, 40mm effective-aperture and 14mm image-field-size of which the chromatic aberration is reduced by using materials of BK7 and FD4. The resolution of this system is about 25lines/mm at the 40% MTF value criterion. The eye_piece lens is adopted goods to be used commercially to save cost of production. The design technique which gets in this development will be utilized greatly in good developments of the dot, the sight and the day/night riflescope system at the hereafter.

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