• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.316-316
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• 2012

본 연구에서는 Si wafer에 마스크 공정 및 Slit-etching 공정을 적용하여 25 um 피치의 probe unit을 개발하기 위해 Deep Si Etching 장비를 이용하여 식각공정 조건에 따른 특성을 평가하였다. 25 um pitch는 etch 폭의 크기에 따라 3종류로 설계하였으며, 식각공정은 2수준, 4인자 실험계획법에 의해 8회 실험을 수행하였다. 실험계획법에 의해 미니탭을 활용하여 최적조건을 구한 결과 12.5 um etch 폭에서는 가스유량은 200 sccm, 에칭시간 7 sec, 코일 파워 1500W, 에칭 압력은 43.7 mtorr의 조건이 etch 형태 및 profile angle이 목표치에 근접한 결과를 얻었다. 또한 probe pitch를 30~60 um까지 증가시켰을 경우 Etch depth는 증가하였으며, 식각율 또한 증가한 현상을 보였다. 재현성 실험을 위해 위의 최적조건을 이용하여 2회 반복하여 실험한 경우 모든 시편이 목표치에 도달하였다. 이는 미세피치화 되는 프로브 유닛의 기초데이터로 활용될 수 있다.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2000.11a
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• pp.89-92
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• 2000

Liquid Phase Epitaxy 법을 이용하여 La이 첨가된 YIG(Yitrium Ion Garnet)막을 성장시켰다. X선 회절 분석을 이용하여 La의 첨가량을 변화시키며 제조된 막의 격자상수를 조사한 결과, La의 첨가량이 증가함에 따라 성장된 막의 격자상수도 증가하였으며 Y/La이 20인 경우, 막의 격자상수가 기판으로 사용한 GGG의 격자상수와 일치하였다. VSM(Vibration Sample Magnetometer)를 이용하여 구한 막의 포화자화 값은 La의 첨가량과 관계없이 순수한 YIG의 경우와 같은 값인 1750정도로 거의 일정하였다. FMR(FerroMagnetic Resonance) 측정장치를 이용한 막의 강자성 공명선폭을 측정결과 막의 공명선폭은 La의 첨가량과 관계없이 모든 경우에 순수한 YIG보다 감소하였다. 실험범위내의 La의 첨가에 대해서 기판과의 격자불일치가 순수한 YIG의 경우보다 감소하기 때문이다. La의 첨가량이 많은 조건에서 성장시킨 막은 공명선폭이 크고 두께의 증가에 따라서 선폭이 증가하였으며, YLa가 20과 30일 때 성장시킨 막에서는 공명선폭의 절대값도 작고 두께에 따른 공명선폭의 변화도 관찰되지 않았다.

• Journal of Power System Engineering
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• v.5 no.4
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• pp.24-30
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• 2001

The substructure synthesis method(SSM) is developed for overcoming disadvantages of the Finite Element Method(FEM). The concept of the SSM is as follows. After dividing a whole structure into several substructures, every substructures are analyzed by the FEM or experiment. The whole structure is analyzed by using connecting condition and the results of substructures. The concept of the transfer stiffness coefficient method(TSCM) is based on the transfer of the nodal stiffness coefficients which are related to force vectors and displacement vectors at each node of analytical mode1. The superiority of the TSCM to the FEM in the computation accuracy, cost and convenience was confirmed by the numerical computation results. In this paper, the author suggests an efficient vibration analysis method of structures by using the TSCM and the SSM. The trust and the validity of the present method is demonstrated through the numerical results for computation models.

• Journal of Power System Engineering
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• v.7 no.3
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• pp.29-34
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• 2003

Genetic algorithm is a optimization technique based on the mechanics of natural selection and natural genetics. Global optimum solution can be obtained efficiently by operations of reproduction, crossover and mutation in genetic algorithm. The authors developed a computer program which can optimize marine propulsion shafting by using binary-coded genetic algorithm and modal analysis method. In order to confirm the effectiveness of the developed computer program, we apply the program to a optimum design problem which is to obtain optimum diameters of intermediate shaft and propeller shaft in marine propulsion shafting. Objective function is to minimize total mass of shafts and constraints are that torsional vibration stresses of shafts in marine propulsion shafting can not exceed the permissible torsional vibration stresses of the ship classification society. The computational results by the program were compared with those of conventional design technique.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.9
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• pp.674-684
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• 2002

In order to decrease remarkably the computation time and storage used in the direct integration method without the loss of accuracy, authors suggest a new transient analysis algorithm. This algorithm is derived from the combination of three techniques, that is, the transfer technique of the transfer stiffness coefficient method, the modeling technique of the finite element method, and the numerical integration technique of the Newmark method. In this paper, the transient analysis algorithm of a frame structure is formulated by the proposed method. The accuracy and computation efficiency of the proposed method are demonstrated through the comparing with the computation results by the direct integration method for three computation models under various excitations.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.8
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• pp.749-756
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• 2004

While designing shafting in reciprocating machines with internal combustion engines which derive generators, pumps, and vehicles, it is very important to calculate the additional stress of shafting by torsional vibration. In this paper, the transfer stiffness coefficient method which is based on the successive transfer of stiffness coefficient was applied to the calculation of the additional stress of shafting in reciprocating machine by torsional vibration. In order to confirm the effectiveness of the present method, a propulsion shafting with a diesel engine in a vessel was considered as the computational example of shafting in reciprocating machine. The results calculated by the present method were compared with those of the modal analysis method, the mechanical impedance method, and free vibration analysis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.89-92
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• 2000

Liquid Phase Epitaxy 법을 이용하여 La이 첨가된 YIG(Yitrium Ion Garnet)막을 성장시켰다. X선 회절 분석을 이용하여 La의 첨가량을 변화시키며 제조된 막의 격자상수를 조사한 결과, La의 첨가량이 증가함에 따라 성장된 막의 격자상수도 증가하였으며 Y/La이 20인 경우, 막의 격자상수가 기판으로 사용한 GGG의 격자상수와 일치하였다. VSM(Vibration Sample Magnetometer)를 이용하여 구한 막의 포화자화 값은 La의 첨가량과 관계없이 순수한 YIG의 경우와 같은 값인 1750정도로 거의 일정하였다. FMR(Ferro Magnetic Resonance) 측정장치를 이용한 막의 강자성 공명선폭을 측정결과 막의 공명선폭은 La의 첨가량과 관계없이 모든 경우에 순수한 YIG보다 감소하였다. 실험범위내의 La의 첨가에 대해서 기판과의 격자불일치가 순수한 YIG의 경우보다 감소하기 때문이다. La의 첨가량이 많은 조건에서 성장시킨 막은 공명선폭이 크고 두께의 증가에 따라서 선폭이 증가하였으며, Y/La가 20과 30일 때 성장시킨 막에서는 공명선폭의 절대값도 작고 두께에 따른 공명선폭의 변화도 관찰되지 않았다.

• Journal of KSNVE
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• v.8 no.2
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• pp.361-368
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• 1998

Complex and large lattice type structures are frequently used in design of bridge, tower, crane and aerospace structures. In general, in order to analyze these structures we have used the finite element method(FEM). This method is the most widely used and powerful tool for structural analysis. However, it is necessary to use a large amount of computer memory and computation time because the FEM resuires many degrees of freedom for solving dynamic problems exactly for these complex and large structures. For overcoming this problem, the authors developed the transfer stiffness coefficient method(TSCM). This method is based on the concept of the transfer of the nodal dynamic stiffness coefficient which is related to force and displacement vector at each node. In this paper, the authors formulate vibration analysis algorithm for a complex and large lattice type structure using the transfer of the nodal dynamic stiffness coefficient. And we confirmed the validity of TSCM through numerical computational and experimental results for a lattice type structure.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.226-230
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• 2001

Electronic Speckle Pattern Interferometry (ESPI) has been recently developed and widely used because it has advantage to be able to measure surface deformations of engineering components and materials in industrial areas with non-contact. The spekle patterns to be formed with interference phenomena of scattering phenomena measure the out-of-plane deformations, together with the use of digital image equipment to process the informations included in the speckle patterns and the display consequent interferogram on a computer monitor. In this study, the experimental results of a canti-levered plate using ESPI were compared with those obtained from the simple beam theory. The ESPI results of the canti-levered plate analyzed by 4-step phase shifting method are close to the theoretical expectation. Also, out-0of-plane displacements of a spot welded canti-levered plate were measured by ESPI with 4-step phase shifting technique. The phase map of the spot welded canti-levered plate is quite different from that of the canti-levered plate without spot welding.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.9 s.180
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• pp.2201-2210
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• 2000

Vibration of a rotating disk-spindle system is analyzed by using Hamilton's principle, FEM and substructure synthesis. A rotating disk undergoes the rigid body motion and the elastic deformation. It s equation of motion is derived by Kirchhoff plate theory and von Karman nonlinear strain. A rotating shaft is described by Rayleigh beam theory considering the axial rigid body motion. The stationay shaft supporting the rotating disk-spindle-bearing system is modeled by Euler beam theory, and the stiffness of ball bearing is determined by A.B.Jones' theory. FEM is used to solve the derived governing equations, and substructure synthesis is introduced to assemble each structure of the rotating disk-spindle system. The developed theory is applied to the spindle system of a 35' computer hard disk drive with 3 disks to verify the simulation results. The simulation results agree very well with the experimental ones. The proposed theory may be effectively expanded to the complex structure of a disk-spindle system.