• Journal of the KSME
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• v.50 no.11
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• pp.43-46
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• 2010

이글에서는 마이크로 기술, 특히 Microelectromechanical System(MEMS) 기술을 활용하여 심장세포의 기계적/물리적 특성 분석을 위한 심장세포용 바이오센서 및 심장세포의 기계적 힘을 이용한 심장세포 기반의 바이오 하이브리드(biohybrid) 디바이스에 대하여 소개하고자 한다.

• 전기의세계
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• v.43 no.9
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• pp.9-16
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• 1994

본 고에서는 미세 가공기술의 실제적인 응용 예로써 일본 동북대학의 연구 내용을 간략히 소개하고자 한다. 동북대학은 미세 가공기술을 이용하여 미세 구조물의 제작 뿐 아니라 센서 및 주변회로의 집적에 의한 미세 시스템의 연구에 많은 힘을 기울이고 있으며 특히 모든 연구의 최대 목표가 철저하게 실제 응용이 가능한 시스템의 개발에 있으므로 이곳에서의 연구 내용을 전반적으로 살펴보는 것은 국내 연구에서의 방향설정 및 참고 자료로서 도움이 될 수 있으리라 판단된다. 동북대학에서의 미세 가공기술 관련 연구는 매우 방대하고 다소 산만한 느낌도 있으나 전체적으로 1. 가속도 센서를 중심으로 한 집적화 용량형 센서의 개발, 2. 고감도 센서의 개발, 3. 마이크로 액튜에이터의 제작, 4. 입체적 미세 가공기술의 개발 등으로 분류할 수 있다. 이중에서 비교적 연구 성과가 나타나고 있는 대표적인 몇가지 예에 대해서 개략적으로 살펴보도록 하겠다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.637-640
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• 2005

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of $0\~30{\mu}N$ by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), and the force vs. deflection. From this relationship, the force constant of the cantilever was calculated to 3.45 N/m with a standard deviation of 0.01 N/m. It shows that there is a big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer s specifications.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.45-48
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• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• Journal of the Korean Vacuum Society
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• v.16 no.1
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• pp.52-57
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• 2007

The interaction force between biomolecules(DNA-DNA, antigen-antibody, ligand-receptor, protein-protein) defines not only biomolecular function, but also their mechanical properties and hence bio-sensor. Atomic force microscopy(AFM) is nowadays frequently applied to determine interaction forces between biological molecules and biomolecular force measurements, obtained for example using AFM can provide valuable molecular-level information on the interactions between biomolecules. A proper modification of an AFM tip and/or a substrate with biomolecules permits the direct measurement of intermolecular interactions, such as DNA-DNA, protein-protein, and ligand-receptor, etc. and a microcantilever-based sensor appeared as a promising approach for ultra sensitive detection of biomolecular interactions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1026-1029
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• 2003

There are always some errors in force sensing of multi-axis force sensors that aggravate sensor performance. Error sources may be classified mainly in two groups. One is structural error due to inaccuracy of sensor body, and the other is error due to noise signals existing in the sensed information. This paper presents a brief review about the principle of multi-axis force sensors, and then a method that can reduce the effect of noise signals. The method is to read digital signals in computer instead of analog voltage signals. We can eliminate the bad effect of electromagnetic waves emitted from computer and of 60 Hz noise emitted from AC source by the proposed method. The proposed method is investigated through experimental demonstration. The experimental results show the proposed method improves the sensor performance significantly.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.10
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• pp.1772-1777
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• 2003

This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fme alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.149-163
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• 2019

Under non-uniform electric field, a directional force along the electric field gradient is applied to matter having permanent or induced dipoles. The transport of particles by the directional force is called dielectrophoresis (DEP). Since the strength and direction of the DEP force depend on parameters, such as permittivity and conductivity of particles and surrounding media, and frequency of the applied AC electric field, particle can be precisely manipulated by controlling the parameters. Moreover, unlike electrophoresis, DEP can be applied to any particles where dipole is effectively induced by electric field. Such a DEP technique has been used in various fields, ranging from microfluidic engineering to biosensor and microchip research. This paper first describes the fundamentals of DEP, and discusses representative microelectrode designs used for DEP study. Then, exemplary applications of DEP, such as separation, capture and self-assembly of particles, are introduced.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.829-830
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• 2012

• Proceedings of the KIEE Conference
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• 2006.07d
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• pp.1791-1792
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• 2006

이 논문에서는 저속 회전체의 불균일 질량측정을 위한 새로운 신호처리 방법을 제안하고 이를 이용한 자동차 타이어의 보정(balancing) 방법에 관해 설명한다. 타이어를 포함한 시스템의 동력학 모델을 기반으로 타이어의 불균일 질량에 의해 발생되는 진동과 이로 인해 로드셀에 작용하는 힘의 관계식을 유도하고, 센서의 측정계수(scale factor)를 포함한 매개변수를 실험 데이터로부터 계산한다. 또한, 기존 방법과 달리 불균일 질량의 크기와 위치를 정확하고 효율적으로 측정할 수 있는 방법을 소형 마이크로 프로세서를 이용하여 구현하고 실험을 통해 그 성능을 검증한다.