Browse > Article
http://dx.doi.org/10.3795/KSME-A.2003.27.10.1772

Design, Fabrication, and Performance Evaluation of a Sensorized Superelastic Alloy Microrobot Gripper  

Kim, Deok-Ho (한국과학기술연구원 마이크로시스템센터)
Kim, Byung-Kyu (한국과학기술연구원)
Kang, Hyun-Jae (한국과학기술연구원 마이크로시스템센터)
Kim, Sang-Min (한국과학기술연구원 마이크로시스템센터)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.10, 2003 , pp. 1772-1777 More about this Journal
Abstract
This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fme alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.
Keywords
Microgripper; Microassembly; Piezoelectric Polymer; Superelastic Alloy; Micro Force Sensing;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Design and Performance Evaluation of Impact Type Actuator using Magnetic Force /
[ Min,H.J.;Lim,H.J.;Kim,B;Kim,S.H. ] / Transaction of the KSME,A   DOI
2 Kim, C. J., and Pisano, A. P., 1992, 'Polysilicon Microgripper,' Senors and Actuators, A, Vol. 33, pp. 221-227   DOI   ScienceOn
3 Zhou, Y., and Nelson, B. J., 2000, 'The Effect of Material Properties and Gripping Force on Micrograsping,' Proceedings of 2000 IEEE Conference on Robotics and Automation, pp. 1115-1120   DOI
4 Menciassi, A., Scalari, G., Eisinberg, A., Anticoli, C., Francabandiera, P., Carrozza, M.C., and Dario, P., 2001, 'An Instrumented Probe for Mechanical Characterization of Soft Tissues,' Biomedical Microdevices, pp. 149-156   DOI   ScienceOn
5 Tanikawa, T., and Arai, T., 1999, 'Development of Micro-manipulation System having a Two-fingered Micro-hand,' IEEE Transactions on Robotics and Automation, Vol. 15, No. 1, pp. 152-162   DOI   ScienceOn
6 M. Goldfarb and N. Celanovic, 1999, 'A Flexure-based Gripper for Small-scale Manipulation,' Robotica, Vol. 17, No. 2, pp. 181-188   DOI   ScienceOn
7 Arai, F., Lee, G. U., and Colton, R. J., 1998, 'Integrated Microendeffector for Micromanipulation,' IEEE/ASME Transactions on Mechatronics, Vol. 3, No. 1, pp. 17-23   DOI   ScienceOn
8 Kim, S.-M., Kim, K., Shim, J.-H., Kim, B. K., Kim, D.-H., and Chung, C.-C., 2002, 'Position and Force Control of a Sensorized Microgripper,' Proceedings of the 2002 International Conference on Control, Automation and System, pp. 319-322   과학기술학회마을
9 Fung, C., Elhajj, I., Li, W. J., and Xi, N., 2002, 'A 2D PVDF Force Sensing System for Micromanipulation and Microassembly,' Proceedings of IEEE International Conference on Robotics and Automation, pp. 1489-1494   DOI
10 Dargahi, J., Parameswaran, M., and Payandeh, S., 2000, 'A Micromachined Piezoelectric Tactile Sensor for an Endoscopic Grasper-Theory, Fabrication and Experiments,' Journal of Microelectromechanical Systems, Vol. 9, No. 3, pp. 329-335   DOI   ScienceOn
11 K. B. Lee and Y.-H. Cho, 2001, 'Laterally-driven Electrostatic Repulsive-force Microactuator,' Transaction of the KSME, A, Vol. 25, No. 3, pp. 424-433   과학기술학회마을
12 Min, H.-J., Lim, H.-J., Kim, B., and Kim, S. H., 2002, 'Design and Performance Evaluation of Impact Type Actuator using Magnetic Force,' Transaction of the KSME, A, Vol. 26, No. 7, pp. 1438-1445   과학기술학회마을   DOI