• Title/Summary/Keyword: 마이크로스프링

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Design of Micro-Spring for Vertical Type Probe Card (마이크로 스프링을 이용한 수직형 프로브 카드 제작)

  • Min, Chul-Hong;Kim, Tae-Seon
    • Proceedings of the IEEK Conference
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    • 2005.11a
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    • pp.667-670
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    • 2005
  • 본 논문은 100um와 80um의 텅스텐 와이어를 이용하여 세라믹(Ceramic)기판에 홀(Hole)을 뚫어 텅스텐 와이어를 수직으로 세우는 방식으로 수직형의 마이크로 스프링을 제작하였다. 마이크로 스프링의 설계를 위해 제한된 실험 결과와 신경회로망을 이용하여 텅스텐 와이어의 두께와 높이, 쉬프트(Shift)의 양을 변화시키면서 장력(Tension force)을 모델링하였고 제작을 통해 검증하였다. 이는 기존의 수평형 프로브카드의 한계를 대체할 수 있는 수직형 프로브카드의 핵심 모듈로서 멀티다이(Multi Die) 뿐만 아니라 범핑(Bumping)타입의 칩 테스트도 가능하다.

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Surface profile measurement with optically trapped micro-particles (광포획된 마이크로 입자를 이용한 표면형상 측정)

  • 주지영;김준식;김승우
    • Proceedings of the Optical Society of Korea Conference
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    • 2001.02a
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    • pp.116-117
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    • 2001
  • 정밀 삼차원 미세 형상 측정기에서 성능의 관건은 고속, 고분해능으로 측정하는 것이다. 그러기 위해서는 공진주파수가 높아야 하고 스프링 상수가 작아야 한다. 광포획 현미경(optical trap microscope, OTM)은 광포획 된 마이크로 입자를 프로브로 사용하는 것으로 입자에 작용하는 복원력이 광에 의한 힘뿐이므로 스프링 상수가 낮다. 또한 공진주파수는 f=√k/m 으로 입자의 질량이 매우 작으므로 공진주파수도 비교적 높다. (중략)

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Fabrication of Micro-optical Components and Actuators using Surface Micromachining (표면 미세가공기술을 이용한 마이크로 광학소자 및 구동기의 제작)

  • Kim, K.N.;Park, K.B.;Jung, S.W.;Lee, B.N.;Kim, I.H.;Moon, H.C.;Park, H.D.;Shin, S.M.
    • Proceedings of the KIEE Conference
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    • 1999.11d
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    • pp.1151-1153
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    • 1999
  • 3-layer polysilicon 표면미세가공공정을 이용하여 micro zone plate 렌즈와 미러 및 이를 구동하기 위한 구동기를 일체화시킨 마이크로 구동형 광학소자를 설계, 제작하였다. 650nm의 파장대역에서 초점거리가 $500{\mu}m$가 되도록 마이크로 zone plate 렌즈를 설계하였으며, 렌즈의 광학축은 실리콘 기판 상에서 $121{\mu}m$거리에 위치하도록 제작하였다. 마이크로 hinge와 스프링 latch 및 측면지지 plate를 이용하여 마이크로 렌즈와 미러가 실리콘 기판상에서 out-of-plane동작이 가능하도록 하였다. 마이크로렌즈 초점거리의 가변을 위하여 6개의 SDA(Scratch Drive Actuator)어레이를 설계, 제작하였다. 또한 빔 반사를 위한 마이크로 미러를 설계하고 $45^{\circ}$ self-assembly를 위하여 마이크로 hinge와 SDA array를 제작하였다.

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Effect of Measuring Method on the Evaluation of Piezoelectric and Dielectric Properties of PMN-PT Single Crystal (PMN-PT 단결정의 압전 및 유전 특성 평가에 미치는 측정 방법의 영향)

  • Kim, Yong Soo;Park, Jae Hwan;Lee, Jeongho;Lee, Sang Goo
    • Journal of the Microelectronics and Packaging Society
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    • v.26 no.4
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    • pp.69-74
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    • 2019
  • The influence of measuring fixtures on the measurement of dielectric and piezoelectric properties of PMN-PT single crystal specimens was investigated. As the pressure of the jig pin which applied the AC electrical signal to the sample decreased, the lower resonance resistance was measured and the higher mechanical quality factor was calculated. The mechanical quality factor was 418 when the spring tension of the jig pin was 20grf, and the value of the quality factor was reduced by half when the spring tension was 200grf. The 4-probe fixture method is unsuitable for measuring piezoelectric properties, but it was suitable for the measurement of dielectric loss. In order to accurately evaluate the piezoelectric properties of PMN-PT, it is necessary to lower the spring tension of the jig pin as much as possible.

Evaluation of the Spring Constant of a Micro Coil Spring (마이크로 코일 스프링의 스프링 상수 평가)

  • Lee J. K.;Jeon B. H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2001.10a
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    • pp.255-259
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    • 2001
  • The spring constant of a micro coil spring was measured by uniaxial tensile test. The inner diameter of it is $35{\mu}m$ and the pitch size is about $23{\mu}m$. A suing constant measurement system was developed. It consists of control units, load cell units, linear stages and several specially designed jigs and fixtures. Load and displacement are measured using a commercial load cell of 1000g capacity and a magnetic scale of $0.5{\mu}m$ resolution. In this study, a method to measure the spring constant of micro coil spring is presented and the relationship between misalignment of specimen and measurement error is discussed.

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Distribution Characteristics of a Mini -Sprinkler without a Bridge (Non-bridge 형 미니스프링쿨러의 살수 특성)

  • 이남호
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.42 no.1
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    • pp.66-72
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    • 2000
  • A study was conducted to find distribution patterns of minisprinkler without a bridge for the desing of microirrigation systems. The experiments were executed in a plastic house to minimize the effect of the wind. Data were collected at four different operation pressures and at 3 different riser heights. Sprayed water were collected by aluminium cans with 65mm diameter and 100mm height placed at 0.3m grid spacing . A schematic distribution pattern with distance from a minisprinkler was suggested for the layout design of the minisprinkler. Distribution pattern of the minisprinkler was found irregular in space. Distributin performance characteristics of the minisprinkler such as effective radius. , effective area, mean application depth, absolute maximum application depth, effective maximum application depth and coefficient of variation were determined. It was indicated that there is a trend of decrease in variation coefficient adn better water distribution by the increase in operation pressures and riser heights.

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Optimal Design of Micro Actuator Plate Spring Considering Vibration Characteristic (진동 특성을 고려한 마이크로 엑추에이터 판 스프링의 최적설계)

  • 이종진;이호철;유정훈
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2003.11a
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    • pp.220-225
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    • 2003
  • Recent issue of optical actuator is applying to mobile device. It leads actuator to become smaller than conventional type. This paper proposes the design of micro actuator plate spring and analysis of its vibration characteristic. Considering natural frequency of spindle motor, 1st and 2nd eigenfrequency of micro actuator must avoid its natural frequency. First, magnetic circuit is designed by using fine pattern coil and magnetic force is acquired by simulation program. Then, concept design is achieved by topology optimization. From concept design, micro actuator plate spring is embodied through DOE(design of experiment). Finally, considering vibration characteristic simultaneously, optimal plate spring design is determined by RSM(response surface method).

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Realization for Nonlinear Movement Controlling System with Image Pattern Recognition (영상인식에 의한 움직임 제어 시스템 구현)

  • Ryu Jae-Hoon;Jung Tae-Lim;Ryu Kwang-Ryol
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2006.05a
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    • pp.213-216
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    • 2006
  • A realization for control system on image recognition is presented in this paper. System consist of control system and image processing system. Control system can control for spring by micro controler. Image processing system using vertical matching algorithm. The experiment results are that response time is about 2sec and the voltage of wind pressure is average 75mVolt.

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