• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.5
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• pp.716-723
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• 2002

Heat transfer in linear motor driven stages for surface mounting device applications was investigated. A simple one-dimensional thermal resistance model (TRM) was introduced. In order to reduce three-dimensional nature to one-dimensional, a few assumptions and simplifications were employed suitably. A good agreement with a finite element heat transfer analysis in temperature profile was obtained. For validation, the analysis was compared with the measurement with respect to motor driving power. Overall discrepancy was less than 7$^{\circ}C$. The influence of two high thermal resistance parts, insulation sheet and thermal contact between the coil assembly and the mounting plate, was examined through the analysis. Additionally, the thermal resistance analysis was applied to another stage including an internal cooling-air passage, and was found available for this system as well. After validation, the cooling effect was surveyed in terms of motor power, and cooling-air and -water flow rate.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.96-101
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• 2001

Heat transfer in linear motor driven stages for surface mounting device applications was investigated. A simple one-dimensional thermal resistance model was introduced. In order to reduce three-dimensional nature to one-dimensional, a few assumptions and simplifications were employed suitably. A good agreement with a finite element heat transfer analysis in temperature profile was obtained. For validation, the analysis was compared with the measurement with respect to motor driving power. Overall discrepancy was less than $7^{\circ}C$. The influence of two high thermal resistance parts, insulation sheet and thermal contact between the coil assembly and the mounting plate, was examined through the analysis. Additionally, the thermal resistance analysis was applied to another stage including an internal cooling-air passage, and was found available for this system as well. After validation, the cooling effect was surveyed in terms of motor power, and cooling-air flow rate.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.54 no.1
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• pp.33-39
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• 2005

In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.11-14
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• 2007

An additive servo-system is developed to improve straightness of linear motor stages. For linear motor stages used in the field of high-precision linear motion process, high straightness accuracy is necessary as well as positioning accuracy in the longitudinal axis. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to modeling error and friction disturbance, a sliding mode control is addressed. The effectiveness of the suggested mechanism and the control are illustrated along with some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.553-561
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• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.11
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• pp.1613-1622
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• 2010

In this paper, the ultraprecision positioning control of an ultrasonic linear motor in a high-vacuum environment is presented. The bolt-clamped Langivin type transducer (BLT) with the 3rd longitudinal; and 6th lateral vibration modes was developed, which was excited by using the Eigen resonance frequency for two vibration modes in order to generate stable and high power. In practical applications, however, even if a geometrical design has an Eigen frequency, discordance between both mode frequencies can be generated by the contact mechanism and because of manufacturing errors as well as environmental factors. Both mode frequencies were precisely matched by adjusting the impedence. By using this method, the BLT can be driven under any environmental conditions. The nominal characteristic trajectory following(NCTF) control method was adopted to control the positioning of the system in vacuum. The developed linear motor stage show high positioning accuracy with 5 nm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.800-803
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• 2004

The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12$\mu$m to 0.17$\mu$m by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15$\mu$m. English here.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.4
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• pp.265-272
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• 2017

Velocity ripple in manufacturing processes reduces productivity and limits the precision of the product. In practice, the frequency and phase of velocity ripples always change minutely, which makes it impossible to compensate for the ripple by simply inserting an opposite feed-forward signal in the system. In this study, an active-phase compensation algorithm was developed to enable the velocity-ripple controller to track the phase change of the ripples in real time. The proposed controller can compensate for the velocity ripple whatever its cause, including disturbance by the torque ripple. The algorithm consists of three functional modules: the velocity-ripple extractor, the synchronized integrator, and the phase shifter. Experimental results showed that the proposed controller clearly reduces velocity ripples with phase variation.