• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.46 no.6
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• pp.519-526
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• 2018

In order to analyze space resources, it had to be brought to earth. However, using laser-induced breakdown spectroscopy(LIBS) and Raman spectroscopy, it is possible to analyze qualitative and quantitative analysis of space minerals in real time. LIBS is a spectroscopic method in which a high energy laser is concentrated on a material surface to generate a plasma, and the emitted light is acquired through a spectroscope to analyze the atomic composition. Raman spectroscopy is a spectroscopic method that analyzes the molecular structure by measuring scattered light. These two spectroscopic methods are complementary spectroscopic methods for analyzing the atoms and molecules of unknown minerals and have an advantage as space payloads. In this study, data were analyzed qualitatively by using principal component analysis(PCA). In addition, a mixture of two minerals was prepared and a quantitative analysis was performed to predict the concentration of the material.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.6
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• pp.479-487
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• 2020

A new double-pulse laser system that combines Raman and laser induced plasma spectroscopy (LIPS) in a single unit is proposed. The study attempts to enhance the laser induced plasma signals while simultaneously extracting the desired molecular signals from Raman spectroscopy. In low pressure conditions such as the lunar atmosphere, the measuring of plasma emission is hard because of the low electron density and short persistence time causing a rapid plasma expansion. Furthermore, in the integration of the detecting system aimed at space exploration, the minimization of laser system is important in terms of the payload mass. Simultaneous molecular and atomic detection that gave highly resolved spectral data at pressure below 0.07 torr is demonstrated amongst eight rock samples test. The plasma stacking produced from the double-pulse laser enhanced the signal intensity of calcium and oxygen lines in calcite matrix by twofold, compared to a conventional LIPS.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.12
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• pp.1013-1020
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• 2020

Spark-induced breakdown spectroscopy (SIBS) utilizes an electric spark to induce a strong plasma for collecting atomic emissions. This study analyses the potential for usinga compact SIBS instead of conventional laser-induced breakdown spectroscopy (LIBS) in discriminating rocks and soils for planetary missions. Targeting bulky solids using SIBS has not been successful in the past, and therefore a series of optimizations of electrode positioning and electrode materials were performed in this work. The limit of detection (LOD) was enhanced up to four times compared to when LIBS was used, showing a change from 78 to 20 ppm from LIBS to SIBS. Because of the higher energy of plasma generated, the signal intensity by SIBS was higher than LIBS in three orders of magnitude with the same spectrometer setup. Changing the electrode material and locating the optimum position of the electrodes were considered for optimizing the current SIBS setup being tested for samples of planetary origin.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.412-412
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• 2010

플라즈마는 미세 전기 소자 제작에 있어 박막의 증착, 식각, 세정등 여러 가지 공정에서 널리 사용되고 있다. 미세 소자의 선폭의 감소와 높은 생산성을 위한 웨이퍼 면적의 대형화가 진행됨에 따라 플라즈마의 균일도는 공정 수율 향상의 관점에서 중요한 요소로 그것의 계측과 공정 중 실시간 감시에 필요성이 부각되고 있다. 플라즈마에 존재하는 라디칼의 밀도, 이온의 밀도, 전자 온도 등의 웨이퍼 상에서의 공간 분포와 공정 결과물과의 상관관계에 대한 연구는 현재까지 다양하게 진행 되었으며 특히, 라디칼의 공간 분포가 공정 결과물의 균일도와 큰 상관 관계가 있는 것으로 알려져 있다. 라디칼의 농도 분포를 계측은 레이저 유도 형광법, 발광 분광법, 흡수 분광법 등을 통하여 이루어져 왔으며, 특히 발광 분광법의 경우 계측의 민감성, 편의성등을 이유로 가장 널리 사용되고 있다. 그러나 현재 까지 진행된 발광 분광법을 이용한 라디칼의 공간 분포 계측은 그 자체로 공간 분포를 계측하는 것이 아닌 플라즈마 밀도의 축 대칭성을 가정하여 Abel inversion을 적용하거나, 광섬유를 플라즈마에 직접 삽입하는 방식을 사용하기 때문에 실제 반도체 제작공정을 비롯한 미세소자 공정 플라즈마의 라디칼 밀도 분포를 실시간, 비 접촉 방식으로 계측 하는데 한계가 있다. 본 연구에서는 반도체 공정 플라즈마의 밀도 균일성 분석을 위한 공간 분해 발광 분광기를 제안한다. 기존의 발광 분광법과 비교하여 공간 분해능 향상을 위하여 직렬로 설치된 다수의 렌즈, 개구, 그리고 핀홀을 이용하였다. 공간 분해 발광 분광기의 공간 분해능을 계산하였으며, 실험을 통하여 검증 하였다. 또, HDP CVD를 이용한 $SiO_2$ 박막 증착 공정에서 산소 라디칼의 농도와 증착된 박막의 두께 분포의 상관 관계를 계측 함으로써 공간 분해 발광 분광기의 플라즈마 공정 적용 가능성 입증 하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.81-81
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• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.5 no.3
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• pp.189-197
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• 2007

The solubility of U(VI) hydrolysis products was determined by using a laser-induced breakdown detection (LIBD) technique. The experiments were carried out at uranium concentrations in range from $2{\times}10^{-4}\;M\;to\;4{\times}10^{-6}\;M$, pH values between 3.8 and 7.0, the constant ionic strength of 0.1 M $NaClO_4$ and the temperature of $25.0{\pm}0.1^{\circ}C$. The solubility product of U(VI) hydrolysis products was calculated from LIBD results by using the hydrolysis constants selected in NEA-TDB. The solubility product extrapolated to zero ionic strength, ${\log}K^{\circ}_{sp}=-22.85{\pm}0.23$ was calculated by using a specific ion interaction theory (SIT). The spectral features of ionic species in uranium solutions were investigated by using a conventional UV-visible absorption spectrophotometer and a fluorophotometer, respectively, $(UO_2)_2(OH)_2^{2+}\;and\;(UO_2)_3(OH)_5^+$ were dominant species at uranium concentration of $2{\times}10^{-4}\;M$.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.9 no.4
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• pp.207-217
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• 2011

In this study the complex formation reactions between uranium(VI) and 2,6-dihydroxybenzoate (DHB) as a model ligand of humic acid were investigated by using UV-Vis spectrophotometry and time-resolved laser-induced fluorescence spectroscopy (TRLFS). The analysis of the spectrophotometric data, i.e., absorbance changes at the characteristic charge-transfer bands of the U(VI)-DHB complex, indicates that both 1:1 and 1:2 (U(VI):DHB) complexes occur as a result of dual equilibria and their distribution varies in a pH-dependent manner. The stepwise stability constants determined (log $K_1$ and log $K_2$) are $12.4{\pm}0.1$ and $11.4{\pm}0.1$. Further, the TRLFS study shows that DHB plays a role as a fluorescence quencher of U(VI) species. The presence of both a dynamic and static quenching process was identified for all U(VI) species examined, i.e., ${UO_2}^{2+}$, $(UO_2)_2{(OH)_2}^{2+}$, and $(UO_2)_3{(OH)_5}^+$. The fluorescence intensity and lifetimes of each species were measured from the time-resolved spectra at various ligand concentrations, and then analyzed based on Stern-Volmer equations. The static quenching constants (log $K_s$) obtained are $4.2{\pm}0.1$, $4.3{\pm}0.1$, and $4.34{\pm}0.08$ for ${UO_2}^{2+}$, $(UO_2)_2{(OH)_2}^{2+}$, and $(UO_2)_3{(OH)_5}^+$, respectively. The results of Stern-Volmer analysis suggest that both mono- and bi-dentate U(VI)-DHB complexes serve as groundstate complexes inducing static quenching.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.23 no.1
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• pp.32-48
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• 2018

The mechanisms of $CH_4$ uptake into and release from the ocean are not well understood due mainly to complexity of the biogeochemical cycle and to lack of regional-scale and/or process-scale observations in the marine boundary layers. Without complete understanding of oceanic mechanisms to control the carbon balance and cycles on a various spatial and temporal scales, however, it is difficult to predict future perturbation of oceanic carbon levels and its influence on the global and regional climates. High frequency, high precision continuous measurements for carbon isotopic compositions from dissolved $CH_4$ in the surface ocean and marine atmosphere can provide additional information about the flux pathways and production/consumption processes occurring in the boundary of two large reservoirs. This paper introduces recent advances on optical instruments for real time $CH_4$ isotope analysis to diagnose potential applications for in situ, continuous measurements of carbon isotopic composition of dissolved $CH_4$. Commercially available, three laser absorption spectrometers - quantum cascade laser spectroscopy (QCLAS), off-axis integrated cavity output spectrometer (OA-ICOS), and cavity ring-down spectrometer (CRDS) are discussed in comparison with the conventional isotope ratio mass spectrometry (IRMS). Details of functioning and performance of a CRDS isotope instrument for atmospheric ${\delta}^{13}C-CH_4$ are also given, showing its capability to detect localized methane emission sources.

• Analytical Science and Technology
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• v.23 no.1
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• pp.1-14
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• 2010

It is of importance that all countries in worldwide, including EU and China, have adopted the Restrictions on the use of certain Hazardous Substances (RoHS) for all electronics. IEC62321 document, which was published by the International Electronics Committee (IEC) can have conflicts with the standards in the market. On the contrary Publicly Accessible Specification (PAS) for sampling published by IEC TC111 can be adopted for complementary application. In this work, we tried to find a route to disassemble and disjoint cellular phone sample, based on PAS and compare the screening methods available in the market. For this work, the cellular phone produced in 2001, before the regulation was born, was chosen for better detection. Although X-ray Fluorescence (XRF) showed excellent performance for screening, fast and easy handling, it can give information on the surface, not the bulk, and have some limitations due to significant matrix interference and lack of variety of standards for quantification. It means that screening with XRF sometimes requires supplementary tool. There are several techniques available in the market of analytical instruments. Laser ablation (LA) ICP-MS, energy dispersive (ED) XRF and scanning electron microscope (SEM)-energy dispersive X-ray (EDX) were demonstrated for screening a cellular phone. For quantitative determination, graphite furnace atomic absorption spectrometry (GF-AAS) was employed. Experimental results for Pb in a battery showed large difference in analytical results in between XRF and GF-AAS, i.e., 0.92% and 5.67%, respectively. In addition, the standard deviation of XRF was extremely large in the range of 23-168%, compared with that in the range of 1.9-92.3% for LA-ICP-MS. In conclusion, GF-AAS was required for quantitative analysis although EDX was used for screening. In this work, it was proved that LA-ICP-MS can be used as a screening method for fast analysis to determine hazardous elements in electrical products.