• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.67-71
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• 2010

Impingement of a high power laser pulse (above 1 GW/$cm^2$) on a metal foil causes its ablation, which is characterized by a rapid expulsion of matter and the initiation of a strong shock wave inside the solid metal. The shock propagates through the foil and reverberates on the rear side, causing its deformation and microparticle ejection, which were deposited on the foil prior to ablation. Based on this principle, we are developing a new drug delivery system - Biolistic gun. Current study is focused on the controllability, stability, efficiency of the system, and characterization of the penetration shapes in various conditions. We have tested the system by applying direct and confined ablation. Several different media combinations were used for confinement-BK7 glass, water, BK7 glass with water, and succulent jelly(ultrasono jelly, RHAPAPHRM). Biological tissue was replicated by a 3% gelatin solution. Present data shows that the confinement results in enhancement of penetration shape reached by 5 um cobalt microparticles. Based on the analysis of the experimental results we observe that the penetration shape of microparticles can be controlled by adjusting the thickness of confinement media.

• Korean Journal of Optics and Photonics
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• v.14 no.3
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• pp.312-320
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• 2003

The basic mechanistic aspects of the interaction and practical considerations related to polymer ablation were briefly reviewed. Photochemical and photothermal effects, which highly depend on laser wavelength have close correlation with each other. In this study, multi-scanning laser ablation processing of polymer with a DPSS (Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser (355 nm) was developed to fabricate a three-dimensional micro shape. Polymer fabrication using DPSSL has some advantages compared with the conventional polymer ablation process using KrF and ArF laser with 248 nm and 193 nm wavelength. These advantages include pumping efficiency and low maintenance cost. And this method also makes it possible to fabricate 2D patterns or 3D shapes rapidly and cheaply because CAD/CAM software and precision stages are used without complex projection mask techniques. Photomachinability of polymer is highly influenced by laser wavelength and by the polymer's own chemical structure. So the optical characteristics of polymers for a 355 nm laser source is investigated experimentally and theoretically. The photophysical and photochemical parameters such as laser fluence, focusing position, and ambient gas were considered to reduce the plume effect which re-deposits debris on the surface of substrate. These phenomena affect the surface roughness and even induce delamination around the ablation site. Thus, the process parameters were tuned to optimize for gaining precision surface shape and quality. This maskless direct photomachining technology using DPSSL could be expected to manufacture tile prototype of micro devices and molds for the laser-LIGA process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.12
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• pp.1001-1007
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• 2001

In this study, high dielectric materials, (Pb,La)Ti $O_3$ thin films were fabricated by PLD (Pulsed Laser Deposition) method and investigated in terms of structural and electrical characteristics in order to develope the dielectric materials for the use of new capacitor layers of Giga bit-level DRAM. The deposition conditions were examined in order to fabricate uniform thin films through systematic changes of oxygen pressures and substrate temperature. The uniform thickness and smooth morphology of (P $b_{0.72}$L $a_{0.28}$)Ti $O_3$ thin films were obtained at the conditions of substrate-target distance 5.5[cm], laser energy density 2.1[J/$\textrm{cm}^2$], oxygen pressure 200[mTorr] and substrate temperature 500[$^{\circ}C$]. After the (P $b_{0.72}$L $a_{0.28}$)Ti $O_3$ thin films were fabricated under the above conditions, they were post-annealed by RTA process in order to increase the dielectric constant. The film thickness of 1200 [$\AA$] had dielectric constant 821. Assuming that operating voltage is 2V, leakage current density of (P $b_{0.72}$L $a_{0.28}$)Ti $O_3$ thin films would result into 10$^{-7}$ [A/$\textrm{cm}^2$] and satisfied the specification of 256M DRAM planar capacitor, 4$\times$10$^{-7}$ [A/$\textrm{cm}^2$]m}^2$]

• Journal of the Korean Magnetics Society
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• v.10 no.1
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• pp.30-36
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• 2000

SmCo films were deposited on Si(100) substrate by a Nd-YAG pulsed laser ablation of the targets of Sm$\_$100-x/Co$\_$x/ (73$\leq$x$\leq$93) at the substrate temperature of 600∼700$\^{C}$ and the laser beam energy density of Q switching mode or fixed Q mode. The magnetic properties of the films obtained from the Q switching mode exhibited a 4 $\pi$ Ms of 5200∼7700 Gauss, iHc of 190-250 Oe, and 4$\pi$M$\_$r//4$\pi$M$\_$s/ of 0.4∼0.74, respectively, while the fixed Q mode gave the magnetic properties of corresponding films of a 4$\pi$M$\_$r//4$\pi$M$\_$s/ = 0.32∼0.91 and iHc of 430-6290 Oe, respectively. The fixed Q mode gave the better magnetic properties of the SmCo films which seems to be due to a formation of magnetically hard minor phases in droplet of Sm-rich intermetallics. However, the resultant rough surface of the SmCo films is a problem to be solved by a continued study.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.32 no.2
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• pp.77-82
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• 2022

Recently, research on the development of low-cost/high-efficiency water electrolysis catalysts to replace noble metal catalysts is being actively conducted. Since overvoltage reduces the overall efficiency of the water splitting device, lowering the overvoltage of the oxygen evolution reaction (OER) is the most important task in order to generate hydrogen more efficiently. Currently, noble metal catalysts show excellent characteristics in OER performance, but they are experiencing great difficulties in commercialization due to their high price and efficiency limitations due to low reactivity. In this study, a water electrolysis catalyst Ni-MWCNT was prepared by successfully doping Ni into the MWCNTs structure through the pulsed laser ablation in liquid (PLAL) process. High resolution-transmission electron microscopy (HR-TEM) and X-ray photoelectron spectroscopy (XPS) were performed for the structure and chemical composition of the synthesized Ni-MWCNT. Catalytic oxygen evolution reaction evaluation was performed by linear sweep voltammetry (LSV) overvoltage characteristics, Tafel slope, electrochemical impedance spectroscopy (EIS), cyclic voltammetry (CV) and Chronoamperometry (CA) was used for measurement.