• Title/Summary/Keyword: 레이저간섭계

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Computer Simulation and Control Performance Evaluation for Feedback System of Ultra Positioning by using Laser Interferometer (Laser Interferometer를 이용한 초정밀위치결정 피드백시스템의 컴퓨터 시뮬레이션 및 제어성능 평가)

  • 김재열;이규태;곽이구;한재호;김창현
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.11 no.1
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    • pp.17-25
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    • 2002
  • This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed far fee positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator Coarse positioning using lead screw is thrived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMUUNK including various frictions those are composed of pre-design and system modeling.

A Study on the MTF Graphics using Simpson Approximation (심프슨 근사법을 이용한 MTF 그래프 작성에 관한 연구)

  • Che, Gyu-Shik;Chang, Won-Seok;Oh, Jake
    • Journal of Advanced Navigation Technology
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    • v.16 no.2
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    • pp.401-408
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    • 2012
  • There is a clear need for characterizing optical components with the growing role played by optical devices in measurement, communication, and photonics. A basic and useful measuring parameter to meet this need, especially for imaging systems, is the Modulation Transfer Function, or MTF. Over the past few decades new instrument, including the laser interferometer, the CCD camera, and the computer have revolutionized the measurement and calculation of the MTF. This has made what was tedious and involved into virtually an instantaneous measurement. We proposed a Simpson approxiamtion method to create MTF graph and illustrated real example to verify its method in this paper. This method is very useful while it is very useful because its error is very minor and small although its approximation.

효율적인 무반사 특성을 갖는 주기적인 실리콘 계층 나노구조 제작 연구

  • Lee, Su-Hyeon;Im, Jeong-U;Gwan, Sang-U;Kim, Jeong-Tae;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.312.2-312.2
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    • 2014
  • 실리콘은 광센서, 태양전지, 발광다이오드 등 광소자 응용 분야에서 널리 사용되고 있는 물질이다. 그러나 실리콘의 높은 굴절율(n~3.5)은 표면에서 약 30% 이상의 Fresnel 반사를 발생시켜 소자의 효율을 감소시키는 원인이 된다. 따라서, 반사손실을 줄이기 위해서는 실리콘 표면에 효율적인 무반사 코팅을 필요로 한다. 기존의 단일 혹은 다중 박막을 이용한 무반사 코팅 기술은 물질간 열팽창계수의 불일치, 접착력 문제, 박막 두께 조절 및 적합한 굴절율을 갖는 물질 선택 어려움 등의 단점을 지니고 있다. 최근, 이러한 무반사 코팅 기술의 대안으로 곤충 눈 구조를 모방한 나노크기의 서브파장 격자구조 (subwavelength gratings, SWGs)에 대한 연구가 활발히 이루어지고 있다. 이러한 SWGs 구조는 공기와 반도체 표면 사이에 점진적, 선형적으로 변화하는 유효굴절율을 갖기 때문에, 광대역 파장영역뿐만 아니라 다양한 각도에서 입사하는 빛에 대해서도 효과적으로 Fresnel 표면 반사를 낮출 수 있다. 본 연구에서는 실리콘 기판 표면 위에 효율적인 무반사 특성을 갖는 계층적 SWGs 나노구조를 제작하기 위해, 레이저간섭리소그라피 및 열적응집금속 입자를 이용한 식각 마스크 패터닝 방법과 유도결합플라즈마 식각 공정을 이용하였다. 제작된 무반사 실리콘 SWGs 나노구조의 표면 및 식각 프로파일은 전자주사현미경으로 관찰하였고, 표면 접촉각 측정 장비를 이용하여 샘플 표면의 젖음성을 확인하였다. 제작된 샘플의 광학적 특성을 조사하기 위해 UV-vis-NIR 스펙트로미터와 엘립소미터 측정 시스템들을 이용하였다.

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Tilt Measurement of Drilling Machine Using the Laser Interferometer (레이저 간섭계를 이용한 드릴링 머신의 틸트 측정)

  • 이승수;손영지;김순경;전언찬
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1996.11a
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    • pp.479-484
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    • 1996
  • This paper describes a method of measuring tilt motion. This method measures the tilt motion of drilling machines using a laser interferometer, a simple sliding linear bearing, measurement of the probe and the LSC(least square center) method. The next order of business is discussing the procedure of measurement. First, The measured position is considered to be the point of contact between the drill shank and the probe. The revolution of the drill axis delivers the point of contact to the probe. Second, because the laser interferometer is attached on the sliding linear bearing, any movement of probe influences laser reflector. Thus, the laser program displays the moving factor of laser reflector. Namely, this is tilt factor. Third. the points of measurement are a full circle which has 8 points (each are 45$^{\circ}$), After it is finished measuring the 8 points, let the spindle of the drilling machine move down about 5 cm. Repeating this procedure three times, we can get tilt motion's values which are calculated by LSC method. Many error factors affect the accurate measurement of tilt motion. However in this paper we ignore some error factors because they are less significant than tilt motion.

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Development of a Signal Conditioning Circuit for Capacitive Displacement Sensors Using a Commercial Single Chip Solution (상용 Single Chip Solution을 이용한 정전용량형 변위 센서 신호 처리 모듈 개발)

  • Kim J.A.;Kim J.W.;Eom T.B.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.31-32
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    • 2006
  • A signal conditioning circuit for capacitive sensors was developed using a commercial single chip solution. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. Up to now, several companies already have succeeded in the development of the capacitive sensors system and they are commercially available in the market. In this research, to construct the signal processing circuits more easily and simply, we used a universal LVDT signal conditioner (AD698). Since the AD698 provides one chip solution for a basic signal processing including modulation and demodulation using various internal components, we can build the processing circuits successfully with minimal additional circuits: a compensation circuits for the drift caused by the bias current of OP amplifiers and a fine adjustment circuit for the elimination of nonlinearity. The signal processing circuits shows nonlinearity less than 0.05% in the comparison with a laser interferometer.

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Analysis on Shock Wave and Sensitivity of Explosives in Through-Bulkhead Initiator (격벽착화기 화약의 충격파와 민감도 분석)

  • Jang, Seung-gyo;Hwang, Jung-min;Baek, Sung-Hyun
    • Journal of the Korean Society of Propulsion Engineers
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    • v.21 no.4
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    • pp.36-43
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    • 2017
  • We studied attenuation characteristics of shock waves induced by a donor charge and the sensitivity of an acceptor for optimal design of a TBI (Through-bulkhead initiator). The attenuation behavior of shock waves was studied by measuring free surface velocity using a VISAR (Velocity Interferometer System for Any Reflector), and the sensitivity of the acceptor explosives was analyzed via SSGT (Small Scale Gap Test). It was found that the acceptor sensitivity obtained by the SSGT may be inappropriate for the design of the small-scale explosive devices such as TBI due to the different shock duration time.

Design and Construction of a High Temperature Creep Tester for Thin Film Specimens (박막시험편용 고온 크리프 시험기의 설계 및 제작)

  • Ko, Gyoung-Dek;Lee, Sang-Shin;Kang, Ki-Ju
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.2 s.257
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    • pp.253-259
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    • 2007
  • A new material tester has been developed to measure mechanical properties of thin film specimens at high temperature. It is useful for observing oxide film growth or local deformation on the surface, and for measuring creep strength. Main characteristics of the tester is as follows; First, high temperature is achieved by Joule heating generated by electricity passing through the specimen, which does not need to enclose the specimen by a furnace or a heating chamber. The exposed specimen enables one to observe the surface during the test. Because the overall size of the test rig is compact, the whole test rig can be placed in a chamber for environmental controlled tests. The loading device is from a level scales. Not only static load with fixed counter weight, but also variable load by moving counter weight controlled remotely can be applied for an ordinary creep test and creep-fatigue test, respectively. The detail of the construction, operation principle, and the specification are described. And also, an example of test result obtained using the creep tester is presented.

A Study on Measurement of In-Plane Displacement using ESPI in Mechanical Structure under torsional load (비틀림하중을 받는 기계구조물의 ESPI를 이용한 면내변위 측정에 관한 연구)

  • Jang, Seok-Won;Lee, Hak-Ju;Choe, Eun-O;Jeong, Chan-Hui
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.4
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    • pp.693-700
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    • 2002
  • Recently, the mechanical structures applied to many industrial products, especially in electronic products, appear to be miniaturized and complicated. This trend makes it difficult to analyze the stress distribution of those mechanical structures and generates new challenges for precise measurement of strain. In order to solve this measurement problem many optical measurement techniques have been suggested. Among those, the ESPI(Electronic Speckle Pattern Interferometry) has been considered as one of the most useful tools. But the shortage of recognition and difficulties of measurement have limited its industrial applications in spite of its excellent capabilities. Therefore in this study, not only the verification of the FEA result but the enhancement of industrial application of ESPI was tried by measuring the in-plane displacement of mechanical structure with ESPI, which is difficult to be measured with strain gauge.

Performance and Jitter Effects Analysis of Single Bit Electro-Optical Sigma-Delta Modulators (단일 비트 전자-광학 시그마-델타 변조기의 성능 및 지터 효과 분석)

  • Nam, Chang-Ho;Ra, Sung-Woong
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.6
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    • pp.706-715
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    • 2012
  • Electro-optical sigma-delta modulators are the core module of digital receiver to digitize wideband radio-frequency signals directly at an antenna. Electro-optical sigma-delta modulators use a pulsed laser to oversample an input radio-frequency signals at two Mach-Zehnder Interferometer(MZI) and shape the quantization noise using a fiber-lattice accumulator. Decimation filtering is applied to the quantizer output to construct the input signal with high resolution. The jitter affects greatly on reconstructing the original input signal of modulator. This paper analyzes the performance of first order single bit electro-optical sigma-delta modulator in the time domain and the frequency domain. The performance of modulator is analyzed by using asynchronous spectral averaging of the reconstructed signal's spectrum in the frequency domain. The reference value of time jitter is presented by analyzing the performance of jitter effects. This kind of jitter value can be used as a reference value on the design of modulators.

Passive Temperature Compensation for All Optical Fiber Type DWDM Interleaver (고밀도 파장분할용 전광섬유형 인터리버의 수동 온도보상)

  • Chang Jin Hyeon;Kim Yung Kwon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.12
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    • pp.35-42
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    • 2004
  • In this paper, we report Mach Zehnder Interleaver of optical fiber type is fabricated by the fabrication system only for interfermeter design, and it is used $CO_2$ laser to adjust precisely the wavelength. The optical fiber is very sensitive in the thermal variation around. Thus, When fabrication the prototype, it is applied a technique to compensate the optical thermal effect because the center wavelength at the output is shifted according to the thermal variation around. it can he done by applying a substrate with high thermal expansion coefficient as well as an adjusting the position between two optical fiber couplers. Consequently, the output wavelength is shifted within 0.05 nm when the surrounding temperature varies until $60^{\circ}C$.