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Computer Simulation and Control Performance Evaluation for Feedback System of Ultra Positioning by using Laser Interferometer  

김재열 (조선대학교 기계공학부)
이규태 (조선대학교 기계공학부)
곽이구 (조선대학교 대학원 정밀기계공학과)
한재호 (조선대학교 대학원 정밀기계공학과)
김창현 (조선대학교 대학원 정밀기계공학과)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.11, no.1, 2002 , pp. 17-25 More about this Journal
Abstract
This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed far fee positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator Coarse positioning using lead screw is thrived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMUUNK including various frictions those are composed of pre-design and system modeling.
Keywords
Laser Interferometer; Piezoelectric Actuator; Fine Positioning; Coarse Positioning; Resolution; DSP(digital signal processing); Simulation; Matlab Simulink; PID Controller;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
연도 인용수 순위
1 /
[ Chegal, Won ] / A study on position control of piezo-driven translation actuator using fuzzy algorithms
2 /
[ Benjamin C. Kuo ] / Automatic Control Systems
3 performance Evaluation Lead screw Positioning System with Five Kinds og Control Methode(2nd Report) /
[ Kaiji SATO ] / JSPE
4 Laser Interferometer를 이용한 초정밀위치결정 피드백시스템의 컴퓨터 시뮬레이션 및 제어성능 평가 /
[ 김재열;김영석;윤성운;곽이구;한재호;유신 ] / 2001 공작기계추계학술대회 논문집
5 /
[ H. NAKAZAWA ] / Principles of Precision Engineering
6 工作機械におけるPZT精度位置決定のに開する硏究 /
[ 竹林進一;玄葉佳則 ;지內莘 ] / 日本精密工學會秋季大會學術講演會論文集
7 /
[ S.T.Smith;D.G.Chetwynd ] / Foundation of Ultra Precision Mechanism Design
8 Control performance of Lead Screw Positioning with Intelligent Control Methods /
[ Simokohbe ] / JSPE
9 DC Servo Motor를 이용한 초정밀위치결정기구의 컴퓨터 시뮬레이션 및 제어성능 평가 /
[ 박기형;김재열;곽이구;한재호 ] / 한국공작기계학회지   과학기술학회마을
10 2重驅動精密ロボットに開する硏究 /
[ 葛欣;高野政晴;佐 木健 ] / 日本精密工學會誌