Abstract
This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed far fee positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator Coarse positioning using lead screw is thrived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMUUNK including various frictions those are composed of pre-design and system modeling.
