• Title/Summary/Keyword: 디본딩

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GaAs 본딩장비용 Resin Coater의 동적 안전성 평가

  • 김옥구;송준엽;강재훈;지원호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.202-202
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    • 2004
  • 화합물 반도체는 초고속, 초고주파 디바이스에 적합한 재료인 갈큠비소(GaAs), 인듐-인산듐(InP) 등 2 개 이상의 원소로 구성되어 있고, 실리콘에 비해 결정내의 빠른 전자이동속도와 발광성, 고속동작, 고주파특성, 내열특성을 지니고 있어 발광 소자 (LED)와 이동통신(RE)소자의 개발 등에 다양하게 이용되고 있다. 이와 같이 화합물 반도체는 고부가가치의 첨단산업 부품들로 적용되는 만큼 생산제조 공정에 해당하는 연마, 본딩, 디본딩에 관한 방법과 기술에 대한 연구가 꾸준히 진행되고 있다.(중략)

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Development of Bonding Dispenser and Press Machine to Regenerate Retainer Ring for Semiconductor CMP Process (반도체 CMP 공정용 리테이너 링 재생을 위한 본딩 디스펜서 및 프레스 머신 개발)

  • Hyoung-Keun Park
    • The Journal of the Korea institute of electronic communication sciences
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    • v.19 no.3
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    • pp.507-514
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    • 2024
  • In the semiconductor manufacturing line, continuous efforts are being made to reduce the cost of products produced, and the demand for this is accelerating in the chemical mechanical polishing(CMP) process, and a representative example of these cost reduction items is the 5-Zone Ring. After about 150 hours of use in the CMP process, the thickness of the ring decreases to less than 1 mm and must be replaced with a new product. Therefore, in this study, bonding dispensers and press machines with a dispensing amount error of 10g±0.8% or less and a pressure uniformity of ±1.8% or less were developed to reduce semiconductor manufacturing costs by repeatedly regenerating worn parts of the retainer ring, and to minimize environmental pollution caused by industrial waste treatment.

Study of Epoxy Bonding Film Process Condition on Micro-pattern Formation (에폭시계 본딩 필름의 공정조건에 따른 미세 패턴 형성에 관한 연구)

  • Kim, Seung-Taek;Jung, Yeon-Kyung;Park, Sae-Hoon;Yoo, Myong-Jae;Park, Seong-Dea;Lee, Woo-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.340-341
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    • 2008
  • 본 논문에서는 미세 패턴을 구현하기 위해 폴리머 소재의 조성에 따른 공정의 영향에 대해서 연구를 하였다. 제작된 본딩 필름은 난연계 에폭시수지와 고내열 특성을 위해서 경화제 조화 성분 폴리머를 이용하였다. 또한, CTE 값을 향상하기 위해서 필러로서 SiO2 분말을 이용하였다. 조성물은 혼합하여 슬러리를 만들고, 테입 캐스터를 이용하여 필름을 제작하였다. 제작된 필름은 150 및 160도의 온도에서 가열 가압하여 경화하였다. 제작된 수지는 유전율 3.2의 유전율과 loss tan 6값이 0.015값을 나타내었다. 또한 제작된 본딩 필름의 조화특성 연구를 위해서 경화조건, 스웰링 조건, 디스미어 시간에 따른공정 변화의 영향에 대해 고찰하였으며 제작된 시편의 조도는 SEM으로 관찰하여 조화성분 함량에 따른 최적 조건을 선정하였다.

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The Effect of Pyro Shock on Canister with Composite Sandwich Panel (복합재 샌드위치 패널 발사관의 폭발충격 영향도 분석)

  • Choi, Wonhong
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.26 no.6_spc
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    • pp.667-673
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    • 2016
  • Canister with composite sandwich panel has been suggested owing to its higher stiffness and strength over a weight for square shaped canisters. The pyro shock induced by a short time explosion inside a canister is generally considered to be the most severe source of load affecting on the entire structure. Therefore, in this study, the approach and modeling method to identify the effect of pyro shock on canister with composite sandwich panel in a numerical way were mainly discussed. Moreover, the verification was implemented through comparison with test results.

A study on the acoustic emission characteristics of laminated composite structures (복합재료 적층 구조물의 음향방출 특성 연구)

  • 박재성;김광수;이호성
    • Composites Research
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    • v.16 no.6
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    • pp.16-22
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    • 2003
  • This paper studied the AE(acoustic emission) characteristics of the laminated composite structures. The composite stiffened panels under the compressive loading emitted various AE signals when they buckled or changed the buckling modes. In addition, the failure initiated and propagation generated a lot of complex signals. From the continuous signal generation. we identified when the failures initiated and whether they propagated or not. The single lap joint of laminated plates under tensional load also generated AE signals when bonding region failed. The first failure occurrence and its propagation are monitored by generated AE signals. The characteristics of AE signals used in this analysis are cumulative hits, hit distribution, peak frequency of generated AE waveform and amplitude of signals. The analysis of AE signals shows that continuous increment of cumulative hits can be regarded as damage propagation and three dominant peak frequencies can correspond to typical failure modes in the laminated composites.

An Experimental Study on the Failure of a Novel Composite Sandwich Structure (새로운 형상의 복합재 샌드위치 체결부 구조의 파손거동 연구)

  • Kwak, Byeong-Su;Kim, Hong-Il;Dong, Seung-Jin;Choi, Jin-Ho;Kweon, Jin-Hwe
    • Composites Research
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    • v.29 no.4
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    • pp.209-215
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    • 2016
  • The failure of composite sandwich structures with thickness and material variation was studied. The main body of the structure is sandwich plate made of the carbon composite face and Aluminum honeycomb core. It is connected with composite laminated flange without core through transition region of tapered sandwich panel with foam core. Tension and compression tests were conducted for the total of 6 panels, 3 for each. Test results showed that the panels under compression are vulnerable to the face failure along the material discontinuity line between two different cores. However the failure load of which panel does not show such failure can carry 16% more load and fails in honeycomb core and face debonding. For the tensile load, the extensive delamination failure was observed at the corner radius which connects the panel and the flange. The average failure load for compression is about 7 times the tensile failure load. Accordingly, these sandwich structures should be applied to the components that endure the compressive loadings.

Quantitative Defects Detection in Wind Turbine Blade Using Optical Infrared Thermography (광 적외선열화상을 이용한 풍력 블레이드의 결함 크기 정량화 연구)

  • Kwon, Koo-Ahn;Choi, Man-Yong;Park, Hee-Sang;Park, Jeong-Hak;Huh, Yong-Hak;Choi, Won Jae
    • Journal of the Korean Society for Nondestructive Testing
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    • v.35 no.1
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    • pp.25-30
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    • 2015
  • A wind turbine blade is an important component in wind-power generation, and is generally exposed to harsh environmental conditions. Ultrasonic inspection is mainly used to inspect such blades, but it has been difficult to quantify defect sizes in complicated composite structures. Recently, active infrared thermography has been widely studied for inspecting composite structures, in which thermal energy is applied to an object, and an infrared camera detects the energy emitted from it. In this paper, a calibration method for active optical lock-in thermography is proposed to quantify the size. Inclusion, debonding and wrinkle defects, created in a wind blade for 100 kW wind power generation, were all successfully detected using this method. In particular, a ${\phi}50.0mm$ debonding defect was sized with 98.0% accuracy.

A Study on the Impact Fracture Behavior of Carbon Fiber Reinforced Plastics (CFRP 복합재료의 충격파괴거동에 관한 연구)

  • 고성위;김학돌;엄윤성;최영근;김형진;김재동;김엄기
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.38 no.4
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    • pp.300-306
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    • 2002
  • In this paper the failure mechanisms and Charpy impact tests of carbon fiber polypropylene composites have been studied in the temperature range -5$0^{\circ}C$ to 6$0^{\circ}C$ and 3 different supported length of specimen (span length). There are significant effects of temperature and span length on impact fracture toughness, which shows a peak at ambient temperature and decrease as temperature is reduced. Fracture toughness shows a maximum at span length s=20mm. Failure mechanisms are characterized based on SEM examination, which is correlated the measured fracture toughness. Mafor mechansms of this composites can be classified as fiber matrix debonding, delamination, fiber pull-out and matrix deformation.

Experimental Debonding Failure Behaviors of Composite Skin-Stiffener Bonded Specimens (복합재료 스킨-보강재 접합 시편의 파손 특성에 대한 시험 연구)

  • Kim, Kwang-Soo;An, Jae-Mo;Jang, Young-Soon;Yi, Yeong-Moo
    • Composites Research
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    • v.20 no.6
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    • pp.8-14
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    • 2007
  • Debonding failure characteristics of the composite skin-stiffener specimens were experimentally investigated. The influences of bonding methods, types of stiffener shape and various secondary bonding parameters were evaluated. Present test results combined with the previous test results[1] showed that the failure displacement of the skin-stiffener specimens well evaluates the skin-stiffener debonding failure strength of the composite stiffened panels. The specimens with an open type stiffener had lower bending stiffness and larger failure displacement than those with a closed type stiffener. Secondary bonding and co-curing with adhesive had better failure strength than co-curing without adhesive film. Secondary bonded specimens failed by adhesive failure and co-cured specimens failed by delamination failure. As the bondline thickness was thinner, the skin-stiffener specimens had higher failure strength. The fillets had no influence on failure strength of the specimens. The influence of the surface roughness was shown according to types of stiffener shape.

Effect of Temperature on Tensile Fracture Behavior of Glass Fiber Polypropylene Composites (온도변화에 따른 GF/PP복합재료의 인장파괴거동)

  • 고성위;엄윤성;허경환;김엄기;김형진
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.37 no.3
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    • pp.240-245
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    • 2001
  • The tensile strength and failure mechanisms of glass fiber polypropylene (GF/PP) composites are investigated in the temperature range from ambient to 8$0^{\circ}C$. The tensile strength increases as fiber volume fraction ratio increase. The tensile strength shows a maximum at ambient temperature, and it tens to decrease as temperature goes up. Major failure mechanisms of GF/PP composites can be classified as fiber matrix debonding, fiber pull-out, delamination and matrix deformation.

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