• Analytical Science and Technology
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• v.19 no.5
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• pp.400-406
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• 2006

Hydrogen analysis by elastic recoil detection has been performed utilizing polyimide film as a reference sample of known hydrogen content assuming the soundness of ion beam current integration. However beam current integration at higher incidence angle is not reliable. Scattering yield per unit fluence by current integration which is normalized per unit path length decreases as the sample tilt angle is getting higher. Moreover because beam current integration at high tilt angle is incomplete, hydrogen evaluation is very risky by direct comparison of sequentially collected recoil spectra between reference and target sample. In this study, primary ion beam dose is determined by backscattering spectrum that is collected simultaneously with recoil spectrum instead of ion beam current integration in order to reduce uncertainty arising in the process of current integration and to enhance the reliability of quantitative analysis. Three test samples are selected $-7.6{\mu}m$ polyimide film, hydrogen implanted silicondioxide and Au deposited carbon wafer- and analyzed by two methods and compared.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.06a
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• pp.30-30
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• 1998

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.7
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• pp.567-578
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• 2015

Single droplet-wall collision heat transfer characteristics on a heated plate above Leidenfrost temperature were experimentally investigated considering the effects of impact velocity. The collision characteristics of the droplet impinged on the heated wall and the changes in temperature distribution were simultaneously measured using synchronized high-speed video and infrared cameras. The surface heat flux distribution was obtained by solving the three-dimensional transient heat conduction equation for the heated substrate using the measured surface temperature data as the boundary condition for the collision surface. As the normal impact velocity increased, heat transfer effectiveness increased because of an increase in the maximum spreading diameter and a decrease in the vapor film thickness between the droplet and heated wall. For We < 30, droplets stably rebounded from a heated wall without breakup. However, the droplets broke up into small droplets for We > 30. The tendency of the heat transfer to increase with increasing impact velocity was degraded by the transition from the rebounding region to the breakup region; this was resulted from the reduction in the effective heat transfer area enlargement due to the breakup phenomenon.

• Korean Journal of Materials Research
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• v.2 no.4
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• pp.293-297
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• 1992

The magnetic properties of the amorphous Fe/sub 32/Ni/sub 36/Cr/sub 14/P/sub 12/B/sub 6/ has been studied by Mossbauer spectroscopy in the temperature range of 88-400K. The analysis of the spectrum of B8K, the magnetic hyperfine field and quadrupole splitting are found to be 140.5kOe and almost zero, which means that the magnetic hyperfine field is randomly oriented with respect to the principal axes of the electric field gradient, respectively. The values of quadrupole splitting in paramagnetic phase with Tc=280K are independent on the changes of temperature. Debye temperature is found to be about 288k from the analysis of recoilless fraction.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.7
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• pp.871-880
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• 1999

In this paper an experimental study is presented of the problem of dynamic behavior of a water droplet impinging upon a heated surface. The experiments are mainly focused on the effects of impinging angle of a droplet and surface temperature on the impact dynamics of the droplet. It Is clarified that the droplet exhibits much different behavior depending on the normal momentum of an impinging droplet before impact. At surface temperature In the nucleate boiling regime. the disintegration of a droplet doesn't occur, whereas the deforming droplet adheres to the surface. The spreading and contraction of the liquid film is repeated a couple of times for the horizontal surface but the expanded droplet just slips without noticeable contraction for the inclined surfaces. In the film boiling regime, the impinging droplet spreads over the surface as a liquid film which is separated from the surface by produced vapor. Depending on the magnitude of the normal momentum of the droplet the disintegration into the several irregular shapes of liquid elements occurs for the horizontal and 30o-inclined surfaces, whereas the impinging droplet for the 60o-inclined surface doesn't break up and tends to recover the original spherical shape.

• Journal of the Korean Vacuum Society
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• v.5 no.1
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• pp.25-32
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• 1996

An ERD-TOF system is constructed for the nondestructive depth profiling of light elements in thin films in the range of several thousand angstroms. The particles, recoiled by 10 $MeV^{35}Cl$ projectiles, were detected by a Time-Of-Flight spectrometer composed of a MCP (Micro Channel Plate) and a SSB (Silicon Surface Barrier) detector. A two parameter data acquisition system composed of two PC's was constructed for registering simultaneous time and energy signals. A $Si_3N_4$/poly-Si/$SiO_2$/Si sample was anlayzed and the result is compared with RBS. The detection limit, maximum probable depth and depth resolution for light elements in silicon are about $4\times10^{14}atoms/\textrm{cm}^2$, 5, 000$\AA$ and 100$\AA$, respectively.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.4
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• pp.107-112
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• 2016

In this paper, the hydrophobic rough surfaces were prepared by employing a conventional nano-imprint lithography technique, and the effects of surface parameter, ratio of the top surface to the flat unit cell, on the impingement behaviors of liquid droplet were investigated to improve robustness of hydrophobic functionality. The critical height defined for the transition from rebound to fragmentation is measured by droplet impingement test in order to study dynamic behavior of an impinged droplet. It showed the critical height decreased with high surface parameter while it increased with low surface parameter. However, the critical height decreased again as surface parameter decreased further. Observed results suggest that the optimized surface pattern should be designed for the increased critical height.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.431-439
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• 2001

In this paper, the a-Diamond films were synthesized using filtered vacuum arc source (FVAS), FVAS was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were composed of one permanent magnet and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Cathode was made of graphite with 80 mm in diameter. The effects of solenoid magnet on plasma extraction were investigated by computer simulation and experiment using Taguchi's methode. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. The beam current density was 3.2 mA/$\textrm{cm}^2$ and average deposition rate was 5 $\AA$/sec when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, 5 A, and 5 A, respectively. The beam current density and the efficiency of beam transportation were increased with the positive bias voltage of the plasma duct.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.190-190
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• 1999

박막 표면에 대한 경원소 분석법인 탄성 되튐 반도법을 개발하여 수소, 탄소, 질소등 분석에 이용하고 있다. 이때 입사 입자로 Cl 9.6MeV를 이용하였는데, 표적 표면에 탄소막이 흡착되는 현상을 발견하였다. cold trap 및 cold finger를 사용하여 진공도를 개선하므로서, 탄소막 흡착의 한 원인으로 알려져 잇는 chamber 주변의 진공도 변화를 시켜보았다. 하지만 전혀 탄소막이 생기지 않는 10-10torr 이하 진공을 만드는 것은 많은 비용과 장비를 필요로 하는 상당히 힘든 작업이어서, 이차적으로 탄소막이 표적 표면에 달라 붙게 하는 원인으로 추정되는 이차 전자의 발생을 고에너지 이온빔으로 조사하였다. 일반적으로 이차전자의 발생은 이온빔과 표적과의 충돌에 의한 고체 표면으로부터의 전자방출 현상으로 오래전부터 연구되어져 왔다. 여기에는 두가지 다른 구조가 존재하는 것으로 알려져 있다. 그 중 하나는 입사 입자의 전하와 표적 표면사이 작용하는 potential 에너지가 표적 표면의 일함수(재가 function) 보다 클 때에 일어나는 potential emission이다. 즉 표적 궤도에 존재하는 전자와 입사 이온빔 사이의 potential 이 표적의 전자를 들뜨게 만들고, 이 potential의 크기가표적의 표면 장벽 potential 보다 충분히 클 뜸 전자가 방출하는 현상을 말한다. 다른 또 하나의 방출구조로는 입사 이온이 표적 표면의 원자와의 충돌에 의해 직접저인 에너지 전달을 통한 전자 방출을 말하는데, 이를 kienetic emission(이하 KE)이라 한다. 본 연구에서는 Tandem Van de graaff 가속기로 고에너지 이온빔을 만들어 Au에 충돌시키므로서 kinetic emission을 통하여 Au에서 발생한는 이차전자의 방출 수율 및 에너지를 측정하였다.장구조로 전체 성장 양식을 예견할 수 있다. 일반적인 경향은 Ep가 커질수록 fractal 성장형태가 되며, Ed가 적을수록 cluster 밀도가 작아지나, 같은 Ed+Ep에 대해서는 동일한 크기의 팔 넓이(수평 수직 방향 cluster 두께)를 가진다. 따라서 실험으로부터 얻은 cluster의 팔 넓이로부터 Ed+Ep 값을 결정할 수 있고, cluster 밀도와 fractal 차원으로부터 각각 Ed와 Ep값을 분리하여 얻을 수 있다. 또한 다층 성장에 대한 거칠기(roughness) 값으로부터 Es값도 구할 수 있다. 양방향 대칭성을 갖지 않은 fcc(110) 표면과 같은 경우, 형태는 다양하지만 동일한 방법으로 추정이 가능하다. (110) 표면의 경우 nearest neighbor 원자가 한 축으로 형성되고 따라서 이 축과 이것과 수직인 축에 대한 상호작용이나 분산 장벽 모두가 비대칭적이다. 따라서 분산 장벽도 x-축, y-축 방향에 따라 분리하여 Edx, E요, Epx, Epy 등과 같이 방향에 따라 다르게 고려해야 한다. 이러한 비대칭적인 분산 장벽을 고려하여 KMC 시뮬레이션을 수행하면 수평축과 수직축의 분산 장벽의 비에 따라 cluster의 두께비가 달라지는 성장을 볼 수 있었고, 한 축 방향으로의 팔 넓이는 fcc(100) 표면의 경우 동일한 Ed+Ep값에 대응하는 팔 넓이와 거의 동일한 결과가 나타나는 것을 볼 수 있다. 따라서 이러한 비대칭적인 모양을 가지는 성장의 경우도 cluster 밀도, cluster 모양, cluster의 양 축 방향 길이 비, 양 축 방향의 평균 팔 넓이로부터 각 축 방향의 분산 장벽을 얻어낼 수 있을 것으로 보인다. 기대할 수 있는 여러 장점들을 보고하고자 한다.성이 우수한 시편일수록 grain의 크기가 큰 것으로 나타났고 결정성이 우수한 시편의 경우에서는 XR