• Journal of the Microelectronics and Packaging Society
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• v.11 no.2 s.31
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• pp.17-22
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• 2004

In this study, BNT($BaO-Nd_{2}O_3-TiO_2$) and $70P_{2}O_5-5B_{2}O_3-(25-x)BaO-xNa_{2}O$ glass-ceramic composites were fabricated and investigated in order to apply for low temperature cofired ceramic. The prepared BNT based glass-ceramic composites were sintered at $800{\sim}950^{\circ}C$ with the glass fit contents ranging from 10 to $15\;wt\%$. The properties such as sintering and dielectric property were investigated in the ceramic compositions according to the phosphate glass frit. The dielectric constant was varied between 10 to 40 and shrinkage rate was increased according to increasing glass frit.

• Proceedings of the KWS Conference
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• 2010.05a
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• pp.84-92
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• 2010

현재 가동 중인 몇몇 가압 경수로 원전 안전 1등급 설비의 이종금속 용접부는 일차수응력부식균열(PWSCC : Primary Stress Corrosion Cracking) 발생의 세가지 조건(민감 재질, 부식 환경, 인장응력)을 동시에 충족하고 있다. 즉, 이종금속 용접부는 PWSCC에 민감한 재질인 Alloy 600 계열 합금으로 제작 또는 용접되어 있으며 고온 수화학 부식 환경 하에 놓여있다. 아울러 오스테나이트 스테인리스 강의 예민화 예방을 위한 용접 후열처리 미실시로 높은 인장 용접 잔류응력이 작용하고 있다. 이러한 이종금속 용접부의 특성상 PWSCC가 발생할 잠재성이 있을 뿐만 아니라 국내외적으로 Alloy 600 계열 합금으로 제작 및 용접된 가압 경수로 원전 안전 1등급 설비의 이종금속 용접부에 실제 PWSCC가 발생된 사례들이 다수 보고되고 있다. 운전 환경 및 재질 변화 없이 PWSCC 발생을 예방하기 위해서는 인장 잔류응력을 이완시켜 낮은 인장 또는 압축 응력화하여야 한다. 이러한 인장 잔류응력 이완방법들로는 PWOL(Pre-emptive Weld Overlay), 레이저 피닝(Laser Peening), MSIP(Mechanical Stress Improvement Process), 워터 제트 피닝(Water Jet Peening), IHSI(Induction Heating Stress Improvement) 방법들이 있는데 공정 시간이 짧고 열 에너지 원이 필요 없으며 전체적인 소성 변형을 야기시키지 않는 레이저 피닝을 본 연구의 대상 방법으로 한다. 본 연구에서는 동적 유한요소 해석을 통해 용접 잔류응력을 이완시키는 레이저 피닝의 효과를 검증하고 용접 잔류응력에 미치는 레이저 피닝 변수의 영향을 고찰하고자 한다. 내부 보수용접이 수행된 경수로 원전 가압기 노즐 이종금속 용접부에 레이저 피닝을 적용한 경우에 대해 상용 유한요소 해석 프로그램인 ABAQUS를 이용하여 동적 유한요소해석을 수행한 결과, 고온 수화학 일차수와 접하는 Alloy 600 계열 합금 내면에서의 인장 잔류응력이 상당히 이완됨을 확인하였다. 또한, 최대충격 압력이 증가할수록, 충격압력 지속시간이 증가할수록, 레이저 스팟 직경이 증가할수록 내표면 인장 잔류응력 이완 정도는 감소하나 이완되는 영역의 깊이는 증가함을 알 수 있다. 또한, 레이저 피닝 방향이 잔류응력 이완에 미치는 영향은 미미함을 알 수 있다.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.33-38
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• 2006

Aerosol slurry composed of dielectric materials, distilled water, and deflocculants was sprayed on the substrates, through a high-pressure spray gun as an aerosol. The coated layers were cofired together with $Al_{2}O_{3}$ substrates and green sheets on which the inner connectors were printed. Although the coating rate of coated layers strongly depended on slurry viscosity, spray shape, and the pressure of the spray gun, the coated density was not changed. Buried conductors were maintained as printed by high pressure spray coating method, because the pressing process was not used. At the optimum condition of air controller step 3-4 and slurry viscosity c.p 2000-4000, dense and uniform layers could be achieved. Comparing with conventional lamination process using green sheets, spray coating method enabled thin dielectric layers of $20{\sim}50{\mu}m$.

• Journal of the Korean Ceramic Society
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• v.42 no.2 s.273
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• pp.110-116
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• 2005

Suitable compositions which are sinterable at low temperature in the $BaO-B_{2}O_{3}-ZnO$ glass system were investigated as a function of the ratio between BaO and ZnO. The effect of $Al_{2}O_3$ filler on densification and physical characteristics of the glass was also examined. When the amount of $Al_{2}O_3$ filler increased, the densification rate and the values of dielectric constant, thermal expansion coefficient and hardness in the glass-filler composites decreased gradually. The decreasing rate of the physical properties accelerated when fine $Al_{2}O_3$ filler was used. However, the fracture toughness of the composite rather increased due to the existence of filler particles and pores which effectively suppressed crack propagation with addition of fine $Al_{2}O_3$ filler.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.265-265
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• 2014

일반적으로 태양전지 및 반도체 공정에서 불순물 주입 과정인 도핑(Doping)공정은 크게 몇 가지 방법으로 구분해 볼 수 있다. 소성로(Furnace)를 이용하여 열을 통해 불순물을 웨이퍼 내부로 확산시키는 열확산 방법과 진공 챔버 내부에서 전자기장을 걸어 이온을 극도로 가속시켜 진행하는 이온 주입(Ion implantation)이나 이온 샤워(Ion shower)를 이용한 도핑 방법이 있다. 또한 최근 자외영역 파장의 레이저광을 조사하여 광화학 반응에 의해 도펀트 물질를 분해하는 동시에 조사 부분을 용해하여 불순물을 도포하는 기법인 레이져 도핑(Laser doping) 방법이 개발중이다. 그러나 레이져나 이온 도핑 공정기술은 고가의 복잡한 장비가 필요하여 매출 수익성 및 대량생산에 비효율적이며 이온 주입에 의한 박막의 손상을 치료하기 위한 후속 어닐링(Post-annealing) 과정이 요구되는 단점을 가지고 있고 열확산 도핑 방법은 정량적인 불순물 주입 제어가 어렵고 시간 대비 생산량의 한계가 있다. 반면 대기압 플라즈마로 도핑을 할 경우 기존에 진공개념을 벗어나 공정상에서 보다 저가의 생산을 가능케 할 뿐아니라 멀티 플라즈마 소스 개발로 이어진다면 시간적인 측면에서도 단연 단축시킬 수가 있어 보다 대량 생산 공정에 효과적이다. 따라서 본 연구에서는 새로운 도핑 방법인 대기압 플라즈마를 이용한 도핑 공정기술의 가능성을 제안하고자 도핑 공정 시 웨이퍼 내 전류 패스(Current path)에 대한 메카니즘을 연구하였다. 대기압 플라즈마 방전 시 전류가 웨이퍼 내부에 흐를 때 발생되는 열을 이용하여 도핑이 되는 형식이란 점을 가정하고 이 점에 대한 원리를 증명하고자 실험을 진행하였다. 실험 방식은 그라운드(Ground) 내 웨이퍼의 위치와 웨이퍼 내 방전 위치에 따라 적외선 화상(IR image: Infrared image) 화상을 서로 비교하였다. 적외선 화상은 실험 조건에 따라 화상 내 고온의 표식이 상이하게 변하는 경향성을 나타내었다. 이 고온의 표식이 전류 패스라는 점을 증명하고자 시뮬레이션을 통해 자기장의 전산모사를 한 결과 전류 패스의 수직 방향으로 자기장이 형성이 됨을 확인하였으며 이는 즉 웨이퍼 내부 전류 패스에 따라 도핑이 된다는 사실을 명백히 말해주는 것이며 전류 패스 제어의 가능성과 이에 따라 SE(Selective Emitter) 공정 분야 응용 가능성을 보여준다.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.29 no.2A
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• pp.214-217
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• 2004

In this paper, a Ka-band LTCC (low temperature co-fired ceramic) narrow bandpass filter (BPF) is firstly presented. This BPF shows very narrow 3dB fractional bandwidth of 4.5 ％ centered at 28.7㎓. The advantages of multi-layered LTCC technology such as high integration and vertical stacking capabilities were employed to design three-dimensional interdigital end-coupled embedded microstrip narrow BPF. The difficulties in controlling the precise distance between two adjacent resonators in LTCC end-coupled BPF were overcome by locating the resonators on different layers. The measured insertion loss is 3dB at 28.7㎓, pass band is from 27.9 ㎓ to 29.2 ㎓, and the return loss in the pass band is less than 10 dB.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.23 no.4
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• pp.988-996
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• 1998

BN ceramics with 0.07wt% $V_{2}O_{5}$ and 0.03wt% CuO(BNC3V7) sintered at $900^{\circ}C$ where it is possible for these to be co-fired with Ag electrode. Dielectricconstant of 44.3, TCF of 22 ppm$/^{\circ}C$ and $Qxf_{o}$ value of 22,000 GHz can be obtained from BNC3V7, multilayer type band pass filters using tapped method and conventional method were designed for PCS (Personal Communication System) applications. Tapped method by adopting input/output-tapping scheme the chip filter stucture becomes simpler and needs fewer layers than that using the conventional input/output-coupling scheme. A multilayer type band pass filter fabricated by screen-printing with silver electrode after tape casting. The simulated characteristics of the fabricated filters sintered at $900^{\circ}C$ were compared with the designed ones. Even though the centered frequencies of tapped and conventional band pass chaip filters were measured to shift about 90MHz downward, the band pass characteristics of both filters were similar that of designed ones. The spuriousresonance characteristic of tapped pass chip filter was better than that of conventional chip filer.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.36 no.6
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• pp.716-722
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• 2003

This study determined the optimum dosage for coagulation reactions of red tide organisms (RTO) using a combination of ignited oyster shell powder (10sp) and loess and examined the electrokinetic and rheological characteristics of their flocs. Two kinds of RTO, Cylindrotheca closterium and Skeletonema costatum, were sampled in Masan Bay and cultured in the laboratory. Coagulation experiments were conducted using various concentrations of IOSP, loess, IOSP+1oess, RTO, and a jar tester RTO cell numbers were counted for both the supernatant and RTO culture solution. The removal rates increased rapidly with increasing IOSP concentrations up to 50 mg/L and loess concentrations up to 800 mg/L. A removal rate of $100\%$ was reached at 400 mg/L of IOSP and 6,400 mg/L of loess. The highest increment $(16.7\%)$ of the rates of coagulation reaction occurred using both IOSP and loess (50+200 mg/L) in comparison with IOSP alone. The rate of coagulation reaction using both IOSP and loess (50+200 mg/L), $90.6\%,$ was similar to employing either IOSP of 150 mg/L or loess of 3,200 mg/L. All of the coagulation liquids for RTO, IOSP (200 mg/L), loess (200 ma/L), and IOSP+1oess (200+200 mg/L) revealed non-Newtonian fluid properties and therefore their shear rate vs. shear stress curves were non-linear. The coagulation liquids revealed elastic body properties at a lower shear rate increasing in the following order: RTO, IOSP (200 mg/L), loess (200 mg/L), and IOSP+1oess (200+200 mg/L. IOSP+1oess (200+200 mg/L) especially demonstrated plastic flow properties at a lower shear rate.

• Geotechnical Engineering
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• v.8 no.2
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• pp.45-58
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• 1992

An elasto-plastic constitutive model for geological materials, which satisfies the flezibility and stability at the same time, can be used in a number of geotechnical problems. Using the spacing ratio of critical state, a flexible model is proposed based on the stability of modified Camflay model. The spacing ratio of critical state can be simply evaluated, and practically used in describing the undrained shearing behavior of clay. The proposed model has precisely predicted the stress paths and stress -strain relationships, compared with the modified Camflay model, with respect to undrained triaxial test results. Besides, the effects of strain rate, creep, and relaxation can also be considered. Using the quasi-state boundary surface, the constitutive relations are well predicted. Therefore, it is found that the assumption of associative flow rule is well posed for undrained behavior of normally consolidated clay.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.4
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• pp.297-302
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• 2011

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of sputtering gas ratio and annealing temperature on the crystal structure of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrate with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Pt / Ti / LTCC substrates by RF magnetron sputtering method. The results showed that the crystallization of the films were enhanced as increasing $O_2$ mixing ratio. At about 25% $O_2$ mixing ratio, was well crystallized in the perovskite structure. PZT thin films was annealed at various temperatures. When the annealing temperature is lower, the PZT thin films become a phyrochlore phase. However, when the annealing temperature is higher than $600^{\circ}C$, the PZT thin films become a perovskite phase. At the annealing temperature of $700^{\circ}C$, perovskite PZT thin films with good quality structure was obtained.