• Title/Summary/Keyword: 단면두께

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Effects of $WSi_x$, thickness and F concentration on gate oxide characteristics in tungsten polycide gate structure (Tungsten polycide gate 구조에서 $WSi_x$ 두께와 fluorine 농도가 gate oxide 특성에 미치는 영향)

  • 김종철
    • Journal of the Korean Vacuum Society
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    • v.5 no.4
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    • pp.327-332
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    • 1996
  • In this study, the effects of $WSi_x$, thickness and fluorine concentration in tungsten polycide gate structure on gate oxide were investigated. As $WSi_x$, thickness increases, gate oxide thickness increases with fluorine incorporation in gate oxide, and time-to-breakdown($T_{BD,50%}$) of oxide decreases. The stress change with $WSi_x$ thickness was also examined. But it is understood that the dominant factor to degrade gate oxide properties is not the stress but the fluorine, incorporated during $WSi_x$ deposition, diffused into $WSiO_2$ after heat treatment. In order to understand the effect of fluorine diffusion into oxidem fluorine ion implanted gates were compared. The thickness variation and $T_{BD,50%}$ of gate oxide is saturated over 600 $\AA$ thickness of $WSi_x$. The TEM and SIMS studies show the microstructure less than 600 $\AA$ thickness is dense and flat in surface. However, over 600$\AA$, the microstructure of $WSi_x$ is divided into two parts: upper porous phase with rugged surface and lower dense phase with smmoth interface. And this upper phase is transformed into oxygen rich crystalline phase after annealing, and the fluorine is captured in this layer. Therefore, the fluorine diffusion into the gate oxide is saturated.

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폴리이미드 필름의 초발수화를 통한 금속배선화 공정 개발

  • Na, Jong-Ju;Lee, Geon-Hwan;Choe, Du-Seon;Kim, Wan-Du
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.12.2-12.2
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    • 2009
  • 전자 디스플레이 산업의 중요성과 미래사회에서 요구되는 정보기기로써 유연한 기판을 사용한 소자에 대한 수요가 급격히 증가하고 있으며, 이들 산업에 응용되기 위해서는 저비용, 고생산 공정이 요구되고 있다. 이를 위해 인쇄전자 기술에 대한 연구가 활발히 진행되고 있다. 특히, 금속배선은 모든 소자의 기본이면서 낮은 저항과 높은 신뢰성을 동시에 요구하고 있어 인쇄전자 기술이 해결해야 할 가장 어려운 난제 중의 하나이다. 따라서 본 연구에서는 낮은 저항과 높은 신뢰성을 만족시킬 수 있는 새로운 금속배선 공정으로서 폴리이미드 필름을 초발수 처리한 후 친수 패턴을 하여 전도성 잉크에 함침함으로서 친수 패턴을 따라 금속배선이 이루어 지도록 하는 방법을 제안하고자 한다. 폴리이미드 필름의 표면을 플라즈마 처리하여 표면에 나노돌기를 형성시키고 불소기를 함유한 코팅층을 형성시킴으로써 물에 대한 접촉각이 $150^{\circ}$이상이 되도록 초발수 처리할 수 있었다. 초발수 처리된 폴리이미드 기판에 쉐도우 마스크를 사용하여 UV조사함으로써 조사된 부분만 친수성을 가지는 패턴을 형성하였다. 이렇게 친수 패턴이 제작된 초발수 폴리이미드 유연기판을 실버잉크에 함침함으로써 선폭 $200{\mu}m$를 가지는 금속배선을 형성시켰다. 형성된 금속배선의 단면 형상을 측정하였으며, 열처리를 통하여 비저항이 $30{\mu}{\Omega}$-cm를 얻을 수 있었다. 통상 1회의 함침으로는 금속배선의 두께가 150nm정도로 금속배선으로 사용하기에는 얇아 배선의 두께를 증가시키기 위하여 수 회 함침을 시도하여 $2{\mu}m$의 두께로 증가시킬 수 있었다. 이때 선폭과 선간 간격은 크게 변하지 않고 두께만 증가시킬 수 있었다. 이는 금속배선을 형성한 후에도 폴리이미드 유연기판의 초발수성은 그대로 유지되어 여러번 함침할 때 잉크가 이미 형성된 배선에만 묻게 되어 두께는 증가하나 선폭과 선간 간격은 증가하지 않는 것으로 판단된다. 사용한 실버잉크는 실버의 함량은 10~20wt%인 수계 잉크였다.

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Comparison of flexural strength according to thickness between CAD/CAM denture base resins and conventional denture base resins (CAD/CAM 의치상 레진과 열중합 의치상 레진의 두께에 따른 굴곡 강도 비교)

  • Lee, Dong-Hyung;Lee, Joon-Seok
    • Journal of Dental Rehabilitation and Applied Science
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    • v.36 no.3
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    • pp.183-195
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    • 2020
  • Purpose: The purpose of this study is to compare the flexural strength of CAD/CAM denture base resins with conventional denture base resins based on their thicknesses. Materials and Methods: For the conventional denture base resins, Lucitone 199® (C-LC) was used. DIOnavi - Denture (P-DO) and DENTCA Denture Base II (P-DC) were taken for the 3D printing denture base resins. For the prepolymerized PMMA resins, Vipi Block Gum (M-VP) and M-IVoBase® CAD (M-IV) were used. The final dimensions of the specimens were 65.0 mm x 12.7 mm x 1.6 mm / 2.0 mm / 2.5 mm. The 3-point bend test was implemented to measure the flexural strength and flexural modulus. Microscopic evaluation of surface of fractured specimen was conducted by using a scanning electron microscope (SEM). After testing the normality of the data, one-way ANOVA was adopted to evaluate the differences among sample groups with a significance level of P = 0.05. The Tukey HSD test was performed for post hoc analysis. Results: Under the same thicknesses, there are significant differences in flexural strength between CAD/CAM denture base resins and conventional denture base resins except for P-DO and C-LC. M-VP showed higher flexural strength than conventional denture base resins, P-DC and M-IV displayed lower flexural strength than conventional denture base resins. Flexural modulus was highest in M-VP, followed by C-LC, P-DO, P-DC, M-IV, significant differences were found between all materials. In the comparison of flexural strength according to thickness, flexural strength of 2.5 mm was significantly higher than that of 1.6 mm in C-LC. Flexural strength of 2.5 mm and 2.0 mm was significantly higher than that of 1.6 mm in P-DC and M-VP. In M-IV, as the thickness increases, significant increase in flexural strength appeared. SEM analysis illustrates different fracture surfaces of the specimens. Conclusion: The flexural strength of different CAD/CAM denture base resins used in this study varied according to the composition and properties of each material. The flexural strength of CAD/CAM denture base resins was higher than the standard suggested by ISO 20795-1:2013 at a thickness of 1.6 mm or more though the thickness decreased. However, for clinical use of dentures with lower thickness, further researches should be done regarding other properties at lower thickness of denture base resins.

Genetic Parameter Estimates for Reproductive and Productive Traits of Pig in a Herd (돼지의 번식형질과 산육형질에 대한 유전모수 추정)

  • Cho, Chung-Il;Ahn, Jin-Kuk;Lee, Joon-Ho;Lee, Deuk-Hwan
    • Journal of Animal Science and Technology
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    • v.54 no.1
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    • pp.9-14
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    • 2012
  • The purpose of this study was to estimate heritabilities and genetic correlations for reproductive and productive traits and to apply their estimates to selection strategies in a swine population. Reproductive and productive traits considered in this study were number of born alive piglet (NBA), number of weaned piglet (NW), loin eye area (LEA), days to 90 kg (D90KG), back fat thickness (BF), and lean meat content (LEAN). Data were collected from 9,886 litters on 2,447 sows for reproductive traits and 10,181 gilts and boars for productive traits from Jan. 2000 to Dec. 2008 in a swine GGP farm. The statistical model to estimate genetic parameters for considering traits was a multiple traits animal model with including animal and maternal additive effects and litter effects on reproductive traits and animal additive effects on productive traits as random as well as some of fixed effects. For estimating (co) variance components of several random effects, restricted maximum likelihood methodology was used on this assumed model. The estimated heritabilities by animal additive effects and maternal effects were 0.07 and 0.02 for NBA and 0.03 and 0.02 for NW, respectively. Genetic correlation estimate for direct genetic effects between NBA and NW was 0.14. Heritability estimates for direct genetic effects were 0.19, 0.39, 0.36, and 0.43 for LEA, D90KG, BF and LEAN, respectively. The genetic correlation of LEA with LEAN was 0.35. Productive traits were antagonistically correlated with reproductive traits. From these results it is concluded that, if selection is done for strong positive effects of reproductive traits, then this would decline productive performance.

The Buckling Behavior of High-strength Steel Truss Columns with Box Section (박스단면 고강도 트러스 기둥재의 좌굴거동)

  • Jang, Gab-Chul;Chang, Kyong-Ho
    • Journal of Korean Association for Spatial Structures
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    • v.7 no.3 s.25
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    • pp.79-86
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    • 2007
  • Recently, as steel structures become higher and more long-spanned, construction of high-strength steels is increasing gradually. Application of high-strength steel can be possible to make a more light and economic steel structures by reducing thickness and space. To apply a high-strength steel to structure, criteria of high-strength steel for buckling is required. However, current specification is not sufficient for criteria of high-strength steels. In this paper, buckling behavior of high-strength steel truss columns with box sections is investigated by using three-dimensional elastic-plastic finite deformation analysis program. The criteria equation for allowable compressive stress of high-strength steel truss columns with box sections is proposed and confirmed the applicability. It is reasonable form analytical results that formulated equations after finding the upper limit of allowable axial direction compression stresses of high-strength steel truss columns. And new equation is suitable to buckling design of high-strength steel truss columns.

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A Study on Relations between Shape Factor and Temperature History of Steel of Composit Beam in Standard Fire under Same Thickness Condition of Spray-type Fire Resistant Materials (동일 내화뿜칠 피복조건에서 표준화재에 노출된 합성보의 강재 온도이력 및 단면형상계수와의 관계)

  • Yeo, In-Hwan;Cho, Kyung-Suk;Cho, Bum-Yean
    • Fire Science and Engineering
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    • v.26 no.6
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    • pp.72-77
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    • 2012
  • When the concrete and steel combined composite beam is exposed to high temperature, concrete could delay temperature rising of steel by covering or increase heat capacity of structural member. For becoming of structural reinforcing by unification between materials, fire resistance rate of composite beam would be higher than simple steel beam. The temperature rising of exposed steel of composite beam is directly related with section shape and exposure length of steel. In this study, fire resistant tests were carried out for composite beams and steel beam with same thickness of spray-type fire resistant materials in standard fire, and after that, temperature histories were analysed and compared with shape factor. The correlation between steel temperature and shape factor was showed very high. This result suggests that if it can be predict the comparative advantage of member by factor which cause the performance enhancement, it could be conclude that an Standard Accreditation method can be adjust to members without indivisual certifiicate of accreditation.

Proposals of Reliable Shapes of Supplementary V-ties for Section Jacketing Method of Columns (기둥의 단면 확대보강을 위한 V-타이 보조 띠철근의 형상 제시)

  • Kwon, Hyuck-Jin;Yang, Keun-Hyeok;Sim, Jae-Il
    • Journal of the Korea Institute of Building Construction
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    • v.18 no.2
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    • pp.99-107
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    • 2018
  • The objective of the present study is to propose a reliable shape of supplementary V-ties in the section jacketing approach for seismic strengthening of reinforced concrete columns. A total of 24 pull-out specimens were prepared. The test parameters selected with regard to bond strength of V-ties were the shape of V-ties, embedment length of V-tie legs, and compressive strength of concrete. The measured bond strength of V-ties with different shapes were compared with that of the conventional V-ties and predictions using CEB-FIP equation. Ultimately, V-ties with pressed end-details at their legs could be recommended for the supplementary lateral reinforcement of strengthening columns with jacketing thickness less than the embedment length [= max (75mm, $6d_b$)] of conventional V-ties, where $d_b$ is the diameter of the reinforcing bar used for V-ties.

Measurement and Proposed Design Specification of Temperature Distribution in the Concrete Pylon (콘크리트 주탑의 온도분포 계측 및 설계규정 제안)

  • Hwang, Eui-Seung;Shim, Jae-Soo;Kim, Do-Young
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.34 no.1
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    • pp.1-8
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    • 2014
  • This paper deals with monitoring and analysis of temperature measurement data in concrete pylon of long span cable bridges. During the construction of Geoga Bridge in Busan-Geoje Fixed Link Project, temperature sensors were installed in several sections of hollow box type concrete pylon and temperatures along the depth of the four sides of the section have been recorded along with ambient temperature. Effects of temperature distribution on the pylon are analysed using actual measured data and results are compared with the design guideline. It was found that the temperature load model for concrete girder can be applied to box type concrete pylon. Structural analysis of the pylon due to variation of temperature distribution during the construction is performed using 3D modelling and FE program and the maximum displacements of east-west and north-south side were calculated as 0.056m and 0.121m, respectively.

Strength and Crack-Damage Control Characteristics of Concrete Beams Layered with Strain-Hardening Cement Composites (SHCCs) (변형 경화형 시멘트 복합체로 단면 대체된 콘크리트 보의 강도 및 균열손상 제어 특성)

  • Yun, Hyun-Do;Kim, Sun-Woo;Jeon, Esther;Kim, Yun-Soo;Jang, Kwang-Soo
    • Proceedings of the Korea Concrete Institute Conference
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    • 2008.11a
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    • pp.269-272
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    • 2008
  • This paper reports on the cracking mitigation and flexural behavior experimentally observed in concrete prisms layered with strain-hardening cement composites (SHCCs) which is micro-mechanically designed cement composite and exhibits pseudo tensile strain-hardening behavior accompanied by multiple cracking while using a moderate amount of fiber, typically less than 2 percent in term of fiber volume fraction. In this study, SHCC is reinforced with 1.3 percent polyvinyl alcohol (PVA) and 0.20 percent polyethylene (PE) in volume fraction. Tests were conducted using $100{\times}100{\times}400mm$ long prisms supported over a simply supported span of 350mm. The four point load was applied using MTS servo control machine. The thickness patched with SHCC is the main variable for this study. Experimental study shows that when subject to monotonic flexural loading, the SHCC layered repair system showed 2.7 - 4.2 times increased load carrying capacity, and mitigated cracking damage of concrete beams layered with SHCC compared with plain concrete beams.

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Axial Load Test on Rectangular CFT Columns using High-Strength Steel and Slender Section (세장 단면의 고강도 강관을 적용한 각형 CFT 기둥의 압축실험)

  • Lee, Ho Jun;Park, Hong Gun;Choi, In Rak
    • Journal of Korean Society of Steel Construction
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    • v.27 no.2
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    • pp.219-229
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    • 2015
  • An experimental study was performed for thin-walled rectangular concrete-filled tubular (CFT) columns. The present study mainly focused on evaluation of the axial load-carrying capacity of concrete-filled tubular columns using high-strength steel and slender section. The test parameters were width-to-thickness ratio, concrete strength, steel yield strength, and the use of stiffeners. Five specimens were tested under monotonic axial loading. Although elastic local buckling occurred in the slender-section specimens with high-strength steel, the specimens exhibited considerable post-buckling reserve. The test results also satisfied the predictions of a current design code. The specimens strengthened with vertical stiffeners exhibited improved strength and ductility when compared with the un-stiffened specimens.