• Title/Summary/Keyword: 다이징

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Effects of Sealing Time of Anodic Aluminum Oxide (AAO) for Upper Electrode of Etcher

  • Song, Je-Beom;Sin, Jae-Su;Sin, Yong-Hyeon;Gang, Sang-U;Kim, Jin-Tae;Yun, Ju-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.115-115
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    • 2012
  • 반도체/디스플레이 산업분야의 발전으로 진공 공정 기술력 또한 증진되고 있다. 반도체소자의 초미세화, 진공부품의 대면적화가 진행 되면서 진공 공정 중에 발생하는 오염입자를 제어하는 것이 이슈가 되고 있다. 오염입자는 플라즈마의 물리적인 부식과 활성이 높은 화학반응에 의해 진공부품에서 부식이 진행되어 발생하며, 이는 반도체 및 디스플레이 부품의 신뢰성측면과 수율저하 등 life time의 근본적인 문제점으로 대두되고 있다. 본 연구에서는 반도체/디스플레이 장비용 코팅부품으로 많이 사용되고 있는 Al2O3 코팅막을 이용하였으며, sealing time에 따른 Anodic Aluminum Oxide (AAO) electrode의 물성특성평가 및 진공평가기술을 이용하여 life time을 예측하는 연구를 수행하였다.

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Phosphate 수용액에서 Al6061 합금의 플라즈마 전해산화 피막 형성에 미치는 NaOH의 영향

  • Song, Ui-Seok;Park, Gi-Yong;Choe, Jin-Seop
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.70.2-70.2
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    • 2018
  • 플라즈마 전해 산화(Plasma Electrolytic Oxidation)는 일반 애노다이징 보다 더 높은 전류 혹은 전압을 금속(Al, Ti, Mg) 표면에 인가하여 산화피막을 전기화학적으로 형성시키는 금속표면처리 방법 중의 하나이다. 본 연구에서는 phosphate 수용액에서 정전류를 인가하여 NaOH의 농도에 따라 PEO(Plasma Electrolytic Oxidation) 피막 형성을 전압-시간 그래프 및 형성된 표면피막의 구조를 관찰하여 연구하였다. 실험에는 8 g/L의 sodium phosphate이 사용되었으며, 5 g/L ~ 9 g/L의 NaOH를 사용하였다. NaOH의 농도 상관없이 일부 영역에서만 반복적으로 아크가 발생하는 로컬 버닝 현상 없이 미세한 아크가 시표 표면 전체에 발생하였고, NaOH의 농도가 증가할수록 형성된 PEO 피막의 두께는 감소하고, 평균 표면 거칠기는 증가하는 경향을 보인다. 형성된 피막의 구조를 HR-SEM, EDX 등을 이용하여 관찰하였다.

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Phosphate 수용액에서 Al6061 합금의 플라즈마 전해산화 피막 형성에 미치는 NaOH의 영향

  • Song, Ui-Seok;Park, Gi-Yong;Choe, Jin-Seop
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.29.2-29.2
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    • 2018
  • 플라즈마 전해 산화(Plasma Electrolytic Oxidation)는 일반 애노다이징 보다 더 높은 전류 혹은 전압을 금속(Al, Ti, Mg) 표면에 인가하여 산화피막을 전기화학적으로 형성시키는 금속표면처리 방법 중의 하나이다. 본 연구에서는 phosphate 수용액에서 정전류를 인가하여 NaOH의 농도에 따라 PEO(Plasma Electrolytic Oxidation) 피막 형성을 전압-시간 그래프 및 형성된 표면피막의 구조를 관찰하여 연구하였다. 실험에는 8 g/L의 sodium phosphate이 사용되었으며, 5 g/L ~ 9 g/L의 NaOH를 사용하였다. NaOH의 농도 상관없이 일부 영역에서만 반복적으로 아크가 발생하는 로컬 버닝 현상 없이 미세한 아크가 시표 표면 전체에 발생하였고, NaOH의 농도가 증가할수록 형성된 PEO 피막의 두께는 감소하고, 평균 표면 거칠기는 증가하는 경향을 보인다. 형성된 피막의 구조를 HR-SEM, EDX 등을 이용하여 관찰하였다.

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Preparation of Energy Material Using the AAO Template Method (어노다이징 템플레이트법을 이용한 에너지소재의 제조)

  • Choi, Jin Kwon;Park, Soo gil;Kim, Yu-ri;KIM, Han-Ju;Kim, Hong-il
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.162-163
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    • 2014
  • Aluminum anodizing is a technique that can be formed pores well aligned various diameters. We were prepared CNFs using the polymer as carbon source using the AAO as a template. CNFs can be heat treated at $1400^{\circ}C$ and became soft carbon. It showed electrochemical behavior by Crystallization. In this experiment, I was observing the behavior as a anode material for LIC of CNFs having different diameters.

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Quality Evaluation of Hard Anodizing Zone for Lightness of the EV Brake Disks (EV 브레이크 경량화를 위한 하드아노다이징 부의 성능 평가)

  • Park, C.S.;Sung, B.S.;Cha, Y.H.;Kim, J.Y.;Lee, J.H.;Park, Y.S.;Kang, D.J.
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.1
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    • pp.90-94
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    • 2012
  • This study evaluates the strength of surface treatment parts using the hard anodizing method to the aluminum alloy brake disks. In order to achieve weight reduction of vehicles, Eco-friendly cars parts of the high-quality and competitive price is to equip. Especially while pursuing parts of weight reduction, it has to maintain the strength of the surface of the brake by nature. To enhance surface strength of aluminum alloy, we use hard anodizing technology in the surface treatment. This study is resulted of 3 times greater the hardness value of the hard anodized specimen than the aluminum alloy specimen for the lightweight parts of EV brake disk

A Study on the Properties of Anodic Oxide Films Formed on Al Alloys in Oxalic Acid (알루미늄 합금 소재의 옥살산 아노다이징 피막 물성 연구)

  • Jeong, Nagyeom;Park, Jihyun
    • Journal of the Korean institute of surface engineering
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    • v.53 no.5
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    • pp.249-256
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    • 2020
  • As the size of manufacturing equipment for LCD and OLED displays increases, replacement of existing heavy stainless steel components with light metals, such as aluminum alloys, is being more important in semiconducting and display manufacturing industries. To use aluminum alloys for components in semiconducting and display industries, it is important to develop a new anodization method for improved performance of anodic oxide films than conventional anodization method based on sulfuric acid. In this work, optimum applied current density and the best sealing methods for anodic oxide films in 3% oxalic acid were explored. Experimental results showed 2.5 A/dm2 is the best applied current density for improved hardness and dielectric breakdown voltage. Sealing of the anodic oxide films further improved their hardness, dielectric breakdown voltage and resistance to HCl, by which application of anodic oxide films become applicable for components in semiconducting and display industries.

Study Of Millimeter-Wave Passive Imaging Sensor Using the Horn Array Antenna (혼 배열 안테나를 이용한 밀리미터파 수동 이미징 센서 연구)

  • Lim, Hyun-Jun;Chae, Yeon-Sik;Kim, Mi-Ra;Rhee, Jin-Koo
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.47 no.2
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    • pp.74-79
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    • 2010
  • We have designed a millimeter-wave passive imaging sensor with multi-horn antenna array. Six horn array antenna is suggested that it is integrated into one housing, and this antenna is effectively configurated m space to assemble with LNA of WR-10 structure. Antenna is designed to have the peak gain of 17.5dBi at the center frequency of 94GHz, and the return loss of less than -25dB in W-band, and the small aperture size of $6mm{\times}9mm$ for antenna configuration with high resolution. LNA is designed to have total gain of more than 55dB and noise figure of less than 5dB for good sensitivity. We made a detector for DC output translation of millimeter-wave signal with zero bias Schottky diode. It is shown that good sensitivity of more than 500mV/mW.

A Study of Student Perspectives on Web-Based Learning Technology in Merchandising Courses (머천다이징 교과과정에서 인터넷을 기반으로한 학습테크롤로지에 대한 대학생들의 시각에 관한 연구)

  • Lee, Kyu-Hye;Stoel, Leslie
    • Journal of the Korean Society of Clothing and Textiles
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    • v.30 no.12 s.159
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    • pp.1788-1799
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    • 2006
  • Assessment of the implementation of a web-based courseware technology application across a merchandising program over a two-year period provides empirical evidence that students believe the technology was easy to use and useful. Results also show that the use of the application was not a hard-ship for the students in terms of time or access, that students in lower class ranks who had not had technology enhanced courses previously were more satisfied with the technology than upper class students, and that perceptions of the technology and satisfaction with it increase with experience using the technology.

Experimental Study on Performances and Economic Evaluations of the Qualify of the Material for Light Path (광도파로(光導波路)를 위한 재질의 성능과 경제적 평가를 위한 실험적 연구)

  • Pak, Ee-Tong;Lee, Kang-Ju;Park, Hae-Sung
    • Journal of the Korean Solar Energy Society
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    • v.27 no.3
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    • pp.175-179
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    • 2007
  • This experimental demonstration has successfully shown that it is possible to use direct sunlight for the illumination of deeper building zones using the material for light path system(light duct). Three kinds of reflectors which were 95% Silver vaporizing fixed, 85% Anodized and 85% Hot melted applied to evaluate and compare their performances each others. Also, these three kind of reflectors were compared in view point of economics. The most high performance was obtained in 95% Silver vaporizing fixed reflector hater than another reflectors of 85% Anodized reflector and 85% Hot melted reflector even though more high production cost in 95% Silver vaporizing fixed reflector. The rest two reflectors of 85% Anodized and 85% Hot melted $10{sim}15%$ less performance than 95% Silver vaporizing fixed reflector but their production cost were low than the production cost of 95% Silver vaporizing fixed reflector which identified very weak and light yellow color in the light.

A Study on the Design of the Limit Switch Box for a Ship (선박용 리미트 스위치 박스의 설계에 관한 연구)

  • Lee, Seung-Heui;Go, Seok-Jo;Lee, Min-Cheol;Kim, Hae-Su;Kim, Chang-Dong
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.899-903
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    • 2004
  • A limit switch box is used for a indicator of a valve actuator. This device indicates an opening and closing of a valve or throttle in a valve actuator. In ship, equipments are required safe and robust because of a rough environment and a specific condition during a voyage. However, the limit switch box is used in an indoor environment generally. Thus, a new limit switch box must be developed which can be used at an outdoor environment. This study designed the limit switch box. The housing of the limit switch box was made by an aluminium die cast method with surface painting after anodizing or chromate coating. In order to evaluate the endurance of the housing, the endurance tests against salt water have been conducted. Experiment results showed that the proposed device provides a reliable performance against salt water.

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