• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.7
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• pp.859-866
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• 2010

In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.12
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• pp.1805-1810
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• 2010

We present a simple, cost-effective, and fast fabrication process for three-dimensional (3D) microstructures; this process is based on multi-step electrochemical etching of metal foils which facilitates the mass production of 3D microstructures. Compared to electroplating, this process maintains uniform and well-controlled material properties of the microstructure. In the experimental study, we perform single-step electrochemical etching of aluminum foils for the fabrication of 2D cantilever arrays. In the single-step etching, the depth etch rate and bias etch rate are measured as $1.50{\pm}0.10 {\mu}m/min$ and $0.77{\pm}0.03 {\mu}m/min$, respectively. Using the results of single-step etching, we perform two-step electrochemical etching for 3D microstructures with probe tips on cantilevers. The errors in height and lateral fabrication in the case of the fabricated structures are $15.5{\pm}5.8% $ and $3.3{\pm}0.9%$, respectively; the surface roughness is $37.4{\pm}9.6nm$.

• Clean Technology
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• v.27 no.1
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• pp.39-46
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• 2021

A road structure washing vehicle equipped with a 4 HP, 80 LPM ultrafine bubble generator was used to clean a tunnel wall and the surface of the surrounding structure, consisting of concrete and tiles, in a heavy traffic area around an apartment complex in the city. Ultrafine bubbles were generated by supplying air at 2 to 3 LPM and using a specially designed nozzle, whereas fine bubbles made by an impeller in a gas-liquid mixing self-priming pump were produced with an average diameter of 165.4 nm and 6.81 × 107 particles mL-1. Using a high pressure washer gun that can perform high-pressure cleaning at 150 bar and 30 LPM, ultrafine bubbles were used to wash dust adsorbed on the surface of the road structures. The experimental analysis was divided into before and after washing. The samples were analyzed by applying ISO 8502-3 to measure surface contamination of dust adsorbed on the surface. Using the transparent tape attached to the surface, the removal rate was calculated by measuring the weight of the dust, and the number of particles was calculated using the gravimetric method and the software, ImageJ. The results of the experiment showed that the number of dust particles adsorbed on the tile wall surface before and after washing were 3,063 ± 218 particles mL-1 and 20 ± 5 particles mL-1, respectively, with weights of 580 ± 82 mg and 13 ± 4 mg. Particles on the surface of the concrete structure before and after washing were 8,105 ± 1,738 particles mL-1 and 39 ± 6 particles mL-1, respectively, with weights of 1,448 ± 190 mg and 118 ± 32 mg.