• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2003-2005
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• 2002

바이오 마이크로 시스템 및 바이오 MEMS 분야, 특히 실리콘을 기질로 하는 바이오 센서 제작에서 반도체 공정 기술은 센서의 대량 생산과 초소형화를 위해서 반드시 필요한 기술이다. 그러나, 감지전극의 마이크로화에 따른 센서의 감도 및 안정성 저하 문제는 해결해야 할 과제이다. 최근, 다공질 실리콘이 갖는 대면적이 실리콘 기질과 생체 고분자 (예: 단백질, 핵산 등) 간의 결합력을 향상시킬 수 있음이 알려지면서, 바이오 센서 분야에서, 새로운 형태의 드랜스듀서 재료로서의 다공질 실리콘에 대한 논의가 활발히 전개되고 있으며 또한, ISFET (Ion-Selective Field-Effect Transistors) 와는 달리 다공질 실리콘 층은 저항이 크기 때문에 센서 제작 과정에서의 부가적인 절연막을 필요로 하지 않는다. 본 연구에서는, 백금을 증착한 다공질 실리콘 표면에 전도성 고분자로서 Polypyrrole (PPy) 필름과 생체 고분자 물질로서 Urease를 각각 전기화학적으로 흡착하였다. 다공질 실리콘 층의 형성을 위해 테플론 소재의 전기화학 전지에 불산 (49%), 에탄올 (95%), $H_2O$ 혼합 용액을 넣고 실리콘 웨이퍼에 일정시간 수 mA의 산화 전류를 흘려주었으며, 약 $200{\AA}$의 티타늄 박막과 $200{\AA}$의 백금 박막을 RF 스퍼터링하여 작업 전극을 제작하였고, 백금 박막 및 Ag를 기화 증착하여 제작한 Ag/AgCl 박막을 각각 상대 전극과 기준전극으로 하였다. 박막 전극의 표면 분석을 위해 SEM (Scanning Electron Microscopy), EDX (Energy Dispersive X-ray spectroscopy) 등을 이용하였다. 제작된 요소 센서로부터 요소 농도 범위 0.01 mmol/L ${\sim}$ 100 mmol/L에서 약 0.2 mA/decade의 감도를 얻었다.

• Journal of the Korean Ceramic Society
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• v.36 no.1
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• pp.89-96
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• 1999

Manufacturing conditions of the porous alumina mold were established to overcome various limits of the gypsum mold. For the preparations of the porous alumina mold, an activated charcoal was added to the Al2O3 with the wt% variation and then mixed. The binary slurry was study dispersed based on the examination of the ESA and rheological behaviro. The cylinder type alumina mold was cast in the gyspum mold and characterized by the shrinkage rate at the variable sintering temperature and the resistance against wear. It was proper to make a sintering of the Al2O3 by the surface diffusion which was non-shrinkage sintering mechansim, and intergranular neck growed stronger while sintering was being made. We studied a sintering by three categories; 1) thermodynamic method below 1,000$^{\circ}C$, 2) kinetic method above 1,000$^{\circ}C$ and 3) combined method. In the results of the respective works, combined method was superiro to the others. The prepared Al2O3 mold had relatively high strength, low drying rate, the resistance against the acid or base and good casting behavior.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 2006.05a
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• pp.340-341
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• 2006

입자분포가 서로 다른 분체를 소수화 및 친수화 표면을 갖도록 표면개질을 하여 solid casting으로 성형하여 소결함으로써 계면장력에 의한 전기적 반발로 자기배열 구조를 갖는 다층 다공질 구조의 세라믹 담체의 제조가 가능하였다.

• Journal of the Korean Electrochemical Society
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• v.2 no.1
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• pp.17-22
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• 1999

Since the use of porous silicon for microsensors and microactuators is in the euly stage of study, only several application devices, such as light-emitting diodes and chemical sensors have so far been demonstrated. In this paper we present an overview of the present status of porous silicon sensors and actuators research with special emphasis on the applications of chemical sensors and optical devices. The capacitive type porous silicon humidity sensors had a nonlinear capacitance-humidity characteristic and a good sensitivity at higher humidity above $40\%RH$. The porous silicon $n^+-p-n^+$ device showed a sharp increase in current when exposed to an ethanol vapor. The $p^+-PSi-n^+$ diode fabricated on porous silicon diaphragm exhibited an optical switching characteristic, opening up its utility as an optical sensor or switch. The photoluminescence (PL) spectrum, taken from porous silicon under 365 nm excitation, had a broad emission, peaked at -610 nm. The electroluminescence(EL) from ITO/PSi/In LED had a broader spectrum with a blue shifted peak at around 535nm than that of the PL.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.9
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• pp.31-36
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• 1999

A capacitance-type sensor using porous silicon layer is developed to measure aqueous alcohol concentration. Since alcohol, so called ethanol, is very permeable into the silicon wafer, it is often used to help chemical reaction when the silicon wafer is processed under some aqueous solution. In this work, the sensing property was measured for the alcohol concentration from zero to near 100 percent with two types of samples with porous silicon layer formed in 25 and 35% HF solution, respectively. Good reliability as well as fast response time and good linearity were shown over 10kHz and the measured capacitance was observed to be inverse to alcohol concentration due to the decrease of the whole dielectric constant in porous silicon layer.

• Journal of the Korean Ceramic Society
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• v.39 no.10
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• pp.919-927
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• 2002

In order to fabricate double-layered porous materials powders of different particle sizes were pressed stepwise. Ford＇s equation which predicts the fired density with the change in pressed density was employed in order to adjust the difference in sintering shrinkage of the green body with double-layered porous structure. Double-layered porous materials were characterized by investigating microstructures and permeability. SEM micrographs showed the distinct difference in pore sizes of double-layered porous material. Permeability of single-layered porous material increased by increasing the starting particle sizes and porosity as well. Permeability of the double-layered porous material depends largely on the layer of small pore diameter.

• The Journal of Engineering Geology
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• v.24 no.3
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• pp.353-362
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• 2014

Pore structures in porous rock play an important role in hydraulic & mechanical behaviour of rock. Porosity, size distribution and orientation of pores represent the characteristics of pore structures of porous rock. While effective porosity can be measured easily by conventional experiment, pore size distribution is hard to be quantified due to the lack of corresponding experiment. We assessed pore size distribution of Berea sandstone using X-ray CT image based analysis combined with associated images processing, i.e., image filtering, binarization and skeletonization subsequently followed by the assessment of local thickness and star chord length. The aim of this study is to propose a new and effective way to evaluate pore structures of porous rock using X-ray CT based analysis for pore size distribution.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.32-37
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• 1999

A capacitance-type humidity sensor with mesa structure in which porous silicon layer is used as humidity-sensing material is developed and its humidity sensing properties are measured. This sensor has a structure where two electrodes are set on the up-side of the wafer against the past typical structure having these electrodes on the up and down-side of the wafer. Therefore, the sensor can be fabricated monolithically to be more compatible with the IC process technology, and is possible to detect more correct output capacitance by removing the effect of the parasitic capacitance from the bottom layer and other junctions. To do this, the sensor was fabricated using process such as localized formation of porous silicon, oxidation of porous silicon layer, and etching of oxidized porous silicon layer. From the completed samples, the dependence of capacitance on the relative humidity of 55 to 90% more was measured at room temperature. As the result, the measured capacitance increased monotonously higher at the low frequency of 120 Hz, where the capacitance was observed to increase over 300%.

• Journal of the Korean Institute of Gas
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• v.6 no.4 s.18
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• pp.8-16
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• 2002

Since hydrate has been discovered on the earth, many numbers of experimental studies have been conducted for characterizing the fundamental properties of hydrates, such as equilibrium conditions, thermodynamic properties, structures, kinetics, etc. It is considered naturally occurred hydrates in porous rocks have a great potential as a future of unconventional energy resources, and the investigations of formation and dissociation of hydrates in porous media are required. In this study, an experimental apparatus was designed to perform experiments of hydrates in porous core. With the apparatus developed, firstly, isochoric experiments were conducted to find hydrate equilibrium conditions in porous media, and the results were compared with reference data to verify experimental apparatus and methods in this study. Secondly, experiment of formation was examined by observing the behaviors of pressure and electrical resistance and the effects of initial water saturation on formation were analysed.

• Journal of the Korean Ceramic Society
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• v.41 no.7
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• pp.555-559
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• 2004

Ceramic foams were prepared by a self-blowing process of a polysiloxane with A1$_2$O$_3$ as a filler. The release of water and ethanol vapor during the condensation reaction of the polymer triggered the pores in the polymer melt. The size. interconnectivity and shape of the pores in the ceramic foams were strongly dependent on the viscosity of the polymer melt, which could be varied by the content and size oi the filler. When the content of the filler inceased and the size of the filler decreased. the size of the pores were decreased and the thickness between the pores were increased. In the addition, the viscosity of polymer melt increased by the pretreatment at 130$^{\circ}C$ for Ire intermolecular cross linking thereby stabilizing the foam structure. The density and compressive strength of the ceramic foams were affected by the heating rate during the blowing process.