• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.97-97
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• 2012

반도체 및 디스플레이 공정등에서 고진공 및 급 배기 환경을 제공하기 위하여 사용되는 터보분자펌프 (Turbomolecular Pump, TMP)는 다층의 회전깃을 갖는 로터를 회전시켜 분자를 배출시키는 방식을 사용하는 진공펌프이다. 또한 최근에는 디스플레이 및 반도체 공정에서 높은 진공도뿐만 아니라, 높은 배기속도를 요구하는 추세에 따라, 터보 펌프와 드래그 펌프부분을 동시에 가지고 있어 상대적으로 작동 진공도 영역이 넓은 복합 분자펌프(Compound Turbomolecular Pump, CMP)의 활용도가 넓어지고 있다. 이러한 분자펌프가 장시간의 고속회전에 적합하고, 베어링에서의 오염을 없앨 수 있는 비접촉 방식인 자기부상 방식이 주로 적용된다. 자기베어링 시스템은 하드웨어와 소프트웨어로 나누어질 수 있는데, 하드웨어는 회전하게 되는 블레이드 로터 및 자기베어링 로터, 모터 로터 등이 포함된 축과 고정되어 있는 자기베어링 코어와 코일, 변위센서 등의 펌프 하우징 부분, 또한 이를 제어하기 위한 전력 증폭 시스템 등의 기전적인 요소들이 이루어져 있다. 소프트웨어라 할 수 있는 제어시스템에 있어서 자기 베어링이 불안정한 특성을 갖는 개루프계를 갖고 있으므로 안정화를 위한 능동제어 시스템이 필수적이며 진동제어 등의 기능을 갖도록 적용된다. 따라서 이러한 복합분자펌프의 성능은 이러한 시스템을 구성하는 개별 요소의 성능과 이를 통합한 제어시스템의 성능이 결정한다고 할 수 있다. 본 논문에서는 현재 개발중인 2,500 l/s급의 자기부상형 고진공 복합분자펌프의 시작품에 대하여 고속회전의 안정성에 대한 연구를 수행한 내용을 보고하고 있다. 디지털 제어시스템을 적용한 시작품의 최대 26,000 rpm까지의 고속회전시의 회전 응답 및 진동 특성을 측정 분석하였으며, 로터의 고유진동수 및 진동 모우드를 분석하였다. 또한 연속 작동시의 발열특성과 각 부분의 온도와 회전 안정성과의 관계를 평가하였다.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.11
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• pp.1038-1045
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• 2010

The theory for a new electromagnetically biased combined radial and axial magnetic bearing is developed. This combined magnetic bearing uses two axial coils to provide the bias flux to the radial and axial air gaps of the combined bearing. One dimensional magnetic circuit model for this combined magnetic bearing is developed and analyzed such that flux densities and magnetic forces can be obtained. Three dimensional finite element model for the bearing is also developed and analyzed. Numerical analysis shows that the calculated magnetic forces from 1D model are well matched with those from the finite element model.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.84-91
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• 2003

This paper concerns on one-DOF non-rotating active magnetic bearing (AMB) system subject to base motion. In such a system, it is desirable to retain the axis within the predetermined air-gap while the base motion forces the axis to deviate from the desired air-gap. Motivated from this, an optimal acceleration feedforward control is proposed to reduce the base motion response without deteriorating other feedback control performances. Experimental results demonstrate that the proposed optimal feedforward control reduces the standard deviation of the air-gap to 29％ that by feedback control alone.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.10
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• pp.1712-1719
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• 2003

This paper concerns on application of active magnetic bearing(AMB) system to levitate the elevation axis of an electro-optical sight mounted on moving vehicles. In such a system, it is desirable to retain the elevation axis within the predetermined air-gap while the vehicle is moving. An optimal base acceleration feedforward control is proposed to reduce the base motion response. In the consideration of the uncertainty of the system model, a filtered-x least-mean-square(FXLMS) algorithm is used to estimate the frequency response function of the feedforward control which cancels base motions. The frequency response function is fitted to an optimal feedforward control. Experimental results demonstrate that the proposed control reduces the air-gap deviation to 27.7% that by feedback control alone.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.11
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• pp.1182-1194
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• 2004

This paper addresses the application of an active magnetic bearing (AMB) system to levitate the elevation axis of an electro-optical sight mounted on a moving vehicle. In this type of system, it is desirable to retain the elevation axis in an air-gap between magnetic bearing stators while the vehicle is moving. To eliminate disturbance responses, a disturbance observer based sliding mode control is developed. This control can decouple disturbance observation dynamics from sliding mode dynamics and preserves the robustness of the sliding control. The sliding surfaces are designed in the consideration of scattering of received image. The proposed control is applied to a 2-DOF active magnetic bearing system subject to base motion. Along with experimental results, the feasibility of the proposed technique is illustrated.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.5
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• pp.439-448
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• 2004

Magnetic bearing is an attractive device in precision engineering field because of its non-contacting nature and controllability of its dynamic characteristics. This paper provides a method of designing a sliding mode control for an active magnetic hearing(AMB) system which is used to support the elevation axis of a target tracking sight instead of mechanical bearings to eliminate the effect of mechanical friction. In such system, the axis should be levitated and supported within a predetermined air gap while AMB is excited by base motion. Experimental results showed that the sliding mode control is effective in disturbance rejection than conventional PID-control without any additive measurements.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.12
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• pp.82-88
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• 2008

This paper describes an application of sliding mode control to an active magnetic bearing(AMB) system. A sliding mode control is robust to model uncertainties and external disturbances. To ensure the authority of sliding mode control, model parameter uncertainties caused from linearization of electro-magnetic attractive force are analyzed and a domain of parameter uncertainties in which reachability to sliding surface is guaranteed is derived. The validity of the analysis is illustrated along with some simulation examples.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.311-316
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• 1994

In this study, a governing equation for 4-axis active magnetic bearing system composed of a rigid rotor and two radial magnetic bearings is derived. We find out that there are two kind of coupling between control axes in the system. And digital contralized controller is designed based on state-space approach and linear quadratic regulator(LQR) theory. By numerical simulation, it is shown what the designed controller can stabilize the system and control the coupling effectively using limited control input.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.846-851
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• 2004

In this paper, a sliding mode control based on disturbance observer is proposed to attenuate disturbance responses in an active magnetic bearing system, which is subject to base motion. An algorithm for exactly decoupling the disturbance estimation dynamics from the sliding mode dynamics is developed. It is also shown that the proposed method preserves the robustness of the sliding mode and asymtotically achieves zero regulation error, in the presence of external disturbances and parametric uncertainties. The proposed control is applied to a 2-DOF active magnetic bearing system subject to base motion. The feasibility of the proposed technique is illustrated, and the results of an experimental demonstration are shown.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.935-940
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• 2005

In this paper, dual rotor disk configuration with a coreless stator is proposed for the Lorentz force type integrated motor bearing system. An experimental compensation for the effects of high order harmonics is performed using the digital controller of the experimental setup. The runout profile and rotor unbalance are also identified by the extended influence coefficient method. The experimental results confirm that this compensation method effectively attenuates the rotor vibration all over the operating range of rotational speed.