Analysis of the Electrical Defect Detection Mechanism using a Low Energy Electron Beam on the TFT Substrate for TFT-LCDs (TFT-LCD용 TFT기판에서 저에너지 전자빔을 이용한 전기적 결함 검출 메카니즘 분석)
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- Journal of the Korea Academia-Industrial cooperation Society
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- v.12 no.4
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- pp.1803-1811
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- 2011