• Proceedings of the KAIS Fall Conference
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• 2011.12b
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• pp.409-412
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• 2011

본 논문에서는 나노 분해능을 가지면서 수mm의 이송능력을 가지는 AFM용 스캐너의 구현을 위하여 새로운 형태의 더블-벤트 유연 가이드를 연구하였다. Castigliano 이론을 이용하여 유연 가이드의 강성을 구하였으며, 모든 과정은 FEA(Finite Element Analysis)를 통하여 이론의 타당성을 검증하였다. 또한, 더블-벤트 유연 가이드의 성능 검증을 위하여 평면 스캐너의 모델링에 응용하여 보았다. 응용된 평면 스캐너의 구성 요소 성분 변수들은 Double-bent 유연 가이드의 나노 분해능 및 이송 변위의 최대화를 구현함과 동시에 빠른 응답 속도를 보장하기 위해 최적화 설계를 통하여 이루어졌다. 더블-벤트 유연 가이드를 적용한 평면 스캐너 역시 FEA를 통한 검증 단계를 거쳤다.

• Proceedings of the KAIS Fall Conference
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• 2010.11b
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• pp.638-641
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• 2010

본 논문에서는 나노 분해능을 가지면서 수mm의 이송능력을 가지는 AFM용 스캐너의 구현을 위하여 새로운 형태의 더블-벤트 유연 가이드를 연구하였다. Castigliano 이론을 이용하여 유연 가이드의 강성을 구하였으며, 모든 과정은 FEA(Finite Element Analysis)를 통하여 이론의 타당성을 검증하였다. 또한, 더블-벤트 유연 가이드의 성능 검증을 위하여 평면 스캐너의 모델링에 응용하여 보았다. 응용된 평면 스캐너의 구성 요소 성분 변수들은 Double-bent 유연 가이드의 나노 분해능 및 이송 변위의 최대화를 구현함과 동시에 빠른 응답 속도를 보장하기 위해 최적화 설계를 통하여 이루어졌다. 더블-벤트 유연 가이드를 적용한 평면 스캐너 역시 FEA를 통한 검증 단계를 거쳤다.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1295-1302
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• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Korean Journal of Optics and Photonics
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• v.22 no.1
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• pp.46-52
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• 2011

A confocal microscope was developed utilizing a scanning sample stage based on a home-built double-compound flexure guide. A scanning sample stage with nano-scale resolution consisted of a double leaf spring based flexure, a displacement amplifying lever, a Piezo-electric Transducer(PZT) actuator and capacitance sensors. The performance of the two-axis stage was analyzed using a commercial finite element method program prior to the implementation. A single line laser was employed as the light source along with the Photo Multiplier Tube(PMT) that served as the detector. The performance of the developed confocal microscope was evaluated with a mouse ear skin imaging test. The designed scanning stage enabled us to build the confocal microscope without the two optical scanning mirror modules that are essential in the conventional laser scanning confocal microscope. The elimination of the scanning mirror modules makes the optical design of the confocal microscope simpler and more compact than the conventional system.