• Title/Summary/Keyword: 나노구조 박막

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Optical Property of Au-doped $TIO_2/SiO_2$ thin film (금 나노미립자가 함침된 $TiO_2/SiO_2$ 박막의 광학적 성질)

  • Jung, Mie-Won;Kim, Ji-Eun;Lee, Kyung-Chul
    • Journal of the Korean Chemical Society
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    • v.44 no.1
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    • pp.60-67
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    • 2000
  • The wavelength of the surface plasmon absorption depends on the dielectric matrix. $TiO_2/SiO_2$ complex oxide films doped with Au nanoclusters were prepared by sol-gel spin-coating method using $Ti(OPr^i)_4$, $Si(OEt)_4$, and $HAuCl_4{\cdot}7H_2O$. The wavelength of the maximum absorption of Au nanoehrsters in the $TiO_2/SiO_2$ thin films was obtained with lineality from 540 nm to 615 nm depending on the molar ratio of $TiO_2$. The particle sizes and structures of these nanoclusters have been identified through a TEM and X-ray diffraction patterns. The dielectric constants of $TiO_2/SiO_2$ thin films were calculated from the experimental results.

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Development of Numerical Model for Predicting Deposition Thickness Distribution during Spray Process for Carbon Nanotube Thin Films (탄소나노튜브 박막 제조를 위한 분무공정에서의 증착 두께 분포 예측 모델 개발)

  • Choi, Du-Soon;Kim, Duck-Jong;Jang, Dong-Hwan
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.9
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    • pp.969-974
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    • 2011
  • A carbon nanotube (CNT) is a cylindrical carbon nanostructure with good transport properties along the tube's axis. As an approach for realizing the practical use of CNTs, CNT networks are fabricated and their applications in many fields are investigated. To fabricate thin CNT-based films, several methods have been proposed and used. Among these methods, the spray coating method is a robust method for fabricating a large area. However, it is difficult to achieve uniformity in the CNT network. To solve this problem, it is necessary to understand the effect of the sprayprocess parameters on the deposition thickness distribution. In this study, a numerical model for predicting the deposition thickness distribution during the spray process was developed. The spatial deposition thickness distributions obtained according to various nozzle paths were analyzed using the developed numerical model.

A study on the Initial Nanopore Formation in the Calix Arene Based Porogen Templated Porous Thin Film (칼릭스아렌 포로젠을 이용한 다공성 박막의 초기 나노기공 형성과정에 관한 연구)

  • Kim, Do-Hun;Yim, Jin-Heong
    • Korean Chemical Engineering Research
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    • v.49 no.5
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    • pp.669-675
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    • 2011
  • Fourier Transform Infrared Spectroscopy and in-situ Position Annihilation Lifetime Spectroscopy(PALS) analysis of hybrid film, which consist of silsesquioxane(SSQ) and 4-tert-butyl calix[4]arene-O,O',O",O'"-tetraacetic acid tetraethyl ester(CA[4]) have been investigated in order to understand initial formation of nanopore in the next generation porous low-k dielectrics(k < 2.0). SSQ/CA[4] can provide effective homogeneous thin film having porous structure. The porogen decomposition behavior were completely different in the two kinds of SSQ/CA[4] based hybrid film (i.e. SSQ/CA[4] 10 and SSQ/CA[4] 20%). Relatively small pores(1.5 nm) come from dispersion of uni-molecular CA[4] in the SSQ matrix have been generated at $300^{\circ}C$, while mesopores(2.5~3.0 nm) induced from self assembled CA[4] have been generated at $250^{\circ}C$. It might be due to highly interconnected structure of SSQ/CA[4] 20% hybrid thin film resulting in facile evacuating of decomposed fragment of CA[4] molecule.

Temperature Dependency on property of Electrodeposited nanotwin copper (펄스 전해증착으로 합성된 나노쌍정구리박막 물성의 온도의존성)

  • Park, Sang-U;Seo, Seong-Ho;Jin, Sang-Hyeon;Yu, Bong-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.11a
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    • pp.161-161
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    • 2015
  • 펄스 전해 증착으로 합성된 구리는 고밀도의 나노쌍정경계를 지닌 미세구조에 따라 높은 인장강도와 낮은 전기 저항을 동시에 얻을 수 있는 특징이 있다. 이러한 특성들은 반도체 공정의 copper 배선, 리튬이온전지의 집전체, PCB, FPCB 전도체로 사용되고 있는 전해구리박막에서 요구되고 있는 신뢰성 문제 해결에 도움을 줄 수 있다. 본 연구에서는 도금용액의 온도 감소에 따라 변화하는 변수들과 물성의 상관관계를 분석하였다. 펄스전해도금에서 도금용액의 온도가 떨어질수록 인장강도와 연신율은 증가하였으며, $0^{\circ}C$도금조건에서 펄스 전해증착으로 합성된 구리박막은 인장강도 837MPa, 연신율 3.37%를 기록하였다.

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The Study of Mechanical Properties on Cr-Zr-Si-N Coating with Various Ar/N2 Ratio (아르곤과 질소 가스 비율에 따른 CrZrSiN 박막의 물성 변화에 대한 연구)

  • Kim, Gyu-Seong;Ra, Jeong-Hyeon;Lee, Sang-Yul;Jeon, Jong-Beom
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.226-226
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    • 2014
  • 난삭재에 대한 관심이 증가하면서 최근 공구시장에서는 고경도, 고내열성을 갖는 코팅물질에 대한 연구가 진행되고 있다. 따라서 두 장점을 모두 가진 나노복합구조를 가진 박막에 대한 연구가 진행되고 있으며 특히 경도에 영향을 미치는 나노결정립과 내열성에 영향을 주는 비정질층의 비율을 조절하는 연구에 집중하고 있다. 따라서 본 연구에서는 질소분압이 변화시키며 CrZrSiN 박막의 물성 변화를 확인하였다.

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