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http://dx.doi.org/10.9713/kcer.2011.49.5.669

A study on the Initial Nanopore Formation in the Calix Arene Based Porogen Templated Porous Thin Film  

Kim, Do-Hun (Division of Advanced Materials Engineering, Kongju National University)
Yim, Jin-Heong (Division of Advanced Materials Engineering, Kongju National University)
Publication Information
Korean Chemical Engineering Research / v.49, no.5, 2011 , pp. 669-675 More about this Journal
Abstract
Fourier Transform Infrared Spectroscopy and in-situ Position Annihilation Lifetime Spectroscopy(PALS) analysis of hybrid film, which consist of silsesquioxane(SSQ) and 4-tert-butyl calix[4]arene-O,O',O",O'"-tetraacetic acid tetraethyl ester(CA[4]) have been investigated in order to understand initial formation of nanopore in the next generation porous low-k dielectrics(k < 2.0). SSQ/CA[4] can provide effective homogeneous thin film having porous structure. The porogen decomposition behavior were completely different in the two kinds of SSQ/CA[4] based hybrid film (i.e. SSQ/CA[4] 10 and SSQ/CA[4] 20%). Relatively small pores(1.5 nm) come from dispersion of uni-molecular CA[4] in the SSQ matrix have been generated at $300^{\circ}C$, while mesopores(2.5~3.0 nm) induced from self assembled CA[4] have been generated at $250^{\circ}C$. It might be due to highly interconnected structure of SSQ/CA[4] 20% hybrid thin film resulting in facile evacuating of decomposed fragment of CA[4] molecule.
Keywords
Low-k; Porous Thin Film; Cyclodextrin; Porogen; Silsesquioxane;
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