• Journal of the Semiconductor & Display Technology
• /
• v.6 no.2 s.19
• /
• pp.35-40
• /
• 2007

An integrated material removal model considering thermal, chemical and contact mechanical effects in CMP process is proposed. These effects are highly coupled together in the current modeling effort. The contact mechanics is employed in the model incorporated with the heat transfer and chemical reaction mechanisms. The mechanical abrasion actions happening due to the mechanical contacts between the wafer and abrasive particles in the slurry and between the wafer and pad asperities cause friction and consequently generate heats, which mainly acts as the heat source accelerating chemical reaction(s) between the wafer and slurry chemical(s). The proposed model may be a help in understanding multi-physical interactions in CMP process occurring among the wafer, pad and various consumables such as slurry.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2007.10a
• /
• pp.150-153
• /
• 2007

Apply electromagnetic stirring system to making rheology slurry of Al7075. This experiment has important element which is the relation between solid fraction percent and melt temperature of Al7075. The rheology slurry of Al7075 eliminated liquid phase to include alloying element of copper and zinc by squeeze casting process. In result the most structure was composed entirely of globular primary $\alpha$. Used this material for this study. This study made a comparison of mechanical property according to heat treatment T6 at each melt temperature ($619^{\circ}C$ and $615^{\circ}C$). The microstructure and component are observed how heat treatment T6 weight with the mechanical property by SEM-EDS.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.25 no.9
• /
• pp.1444-1451
• /
• 2001

The evolutionary structural optimization(ESO) method has been under continuous development since 1992. The bidirectional evolutionary structural optimization(BESO) method is made of additive and removal procedure. The BESO method is very useful to search the global optimum and to reduce the computational time. This paper presents the ranked bidirectional evolutionary structural optimization(R-BESO) method which adds elements based on a rank, and the performance indicator which can estimate a fully stressed model. The R-BESO method can obtain the optimum design using less iteration number than iteration number of the BESO.

• Journal of the KSME
• /
• v.30 no.5
• /
• pp.440-449
• /
• 1990

펌프의 진동은 설치후 많은 원인이 복합되어 발생하는 것이 일반적이므로 예기치 못하는 경우가 많다. 따라서 진동발생시에 어떻게 체계적인 검토를 거쳐 그 원인을 찾을 것인가, 그리고 원인 제거를 어떻게 효과적으로 수행할 것인가 하는 것이 실제로는 가장 중요한 문제이다. 대형펌 프에서 진동이 발생했을 경우 그 해결을 위해서는 엄청난 경비와 시간이 필요한 경우가 적지 않다. 이러한 측면에서 펌프의 진동을 가장 경계적이고 용이하게 그리고 단시간에 해결할 수 있는 여러 가지 방법이 연구되어야 한다. 그 일례로 실기에 직접 사용할 수 있는 각종의 동흡 진기(dynamic absorber)의 고안과 최적설계 등은 훌륭한 연구과제의 하나이다. 그리고 최근 고 도로 발달한 측정계기, 컴퓨터, 데이터처리 S/W등을 병용한 진동 모니터링(monitoring)에 의한 기기의 이상 진단과 예방 시스템 개발에 관한 연구도 보다 활발히 진행될 필요가 있다.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
• /
• 1994.11a
• /
• pp.37-42
• /
• 1994

소각로, 각종 산업시설 및 IGCC, PBFC등의 고온 고압 발전에서 배출되는 고온연소가스 중에 포함된 먼지를 제거할 목적으로 세라믹 고온가스 필터가 전세계적으로 개발중에 있다. (1,2) 성능이 우수한 세라믹 가스여과체의 필수조건으로써 \circled1높은 포집효율, 낮은 통기성, \circled2높은 기계적 강도 및 내부식성 등을 들 수 있다. 현재 국내.외에서 상용화되거나, 연구, 개발중인 세라믹 가스필터 재료의 조성으로써, \circled1단일 산화물계, \circled2산화물-산화물 복합계, \circled3산화물-비산화물계, \circled4비산화물계 등으로 분류할수 있다. (표1 참조)

• Journal of the Korean Society for Precision Engineering
• /
• v.13 no.11
• /
• pp.46-56
• /
• 1996

Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.38 no.2
• /
• pp.107-114
• /
• 2014

This paper proposes a common rail pressure control algorithm for passenger car diesel engines. For handling the parameter-varying characteristics of common rail systems, the quantitative feedback theory (QFT) is applied to the design of a robust rail pressure control algorithm. The driving current of the pressure control valve and the common rail pressure are used as the input/output variables for the common rail system model. The model parameter uncertainty ranges are identified through experiments. Rail pressure controller requirements in terms of tracking performance, robust stability, and disturbance rejection are defined on a Nichols chart, and these requirements are fulfilled by designing a compensator and a prefilter in the QFT framework. The proposed common rail pressure control algorithm is validated through engine experiments. The experimental results show that the proposed rail pressure controller has a good degree of consistency under various operating conditions, and it successfully satisfies the requirements for reference tracking and disturbance rejection.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.35 no.2
• /
• pp.153-160
• /
• 2011

The characteristics of supersonic coaxial/off-axis jet impingements on a slanted kerf surface were experimentally studied, to investigate the role of the assist gas that removes molten materials from cut zone formed by laser machining. In this parametric study, hundreds of high-resolution schlieren images were obtained for various gas pressures, distances between nozzle exit and kerf surface, kerf widths, and alignments of off-axis nozzle. It was noticed that simply increasing the assist gas pressure was not effective in eliminating the flow separation that occurs downstream of the kerf surface. However, it was also observed that by increasing the kerf width and utilizing off-axis nozzles, the separation of the assist gas on the kerf surface can be weakened. The effect of the distance between the nozzle exit and the kerf surface on the characteristics of separation occurring on the kerf surface was found to be lower in the case of supersonic nozzles than that in the case of sonic nozzles.

• Fire Science and Engineering
• /
• v.23 no.5
• /
• pp.72-77
• /
• 2009

In the recycling procedure of the refrigerator, the fire frequently breaks out. In this study, to clarify the exact cause of the fire, the components and concentration of the materials produced in the process are analysed as well as the problems in the process system, and the protective measure to prevent the fire and the explosion fundamentally is proposed. In this procedure, the preventive measures of fire by removing the combustible materials such as polyurethane and inflammable gases, by removing the ignition sources and by reducing the oxygen concentration to the minimum are proposed along with the protective measures to reduce the damage in the fire. In the crushing procedure where the fire or explosion can break out in diverse ways, the forced ventilation or exhaust system applied to the small partial ventilation facility are installed to reduce the concentration of inflammable gas mixture to lower than the inflammable limit by injecting and exhausting the air forcibly.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.539-539
• /
• 2008

본 논문에서는 투명전도박막의 균일한 표면특성을 확보하기 위해 광역평탄화 공정을 적용하여 투명전도 박막의 표면 거칠기를 연구하였으며 슬러리의 종류에 따른 박막의 연마특성을 연구하였다. 본 실험에서 사용된 ITO 박막은 RF Sputtering에 의해 제작되었고 하부 기판은 석영 Glass가 사용되었다. 광역평탄화를 위한 CMP 공정은 고분자 물질계열의 패드위에 슬러리입자를 공급하고 웨이퍼 캐리어에 하중을 가하며 웨이퍼의 표면을 연마하는 방법으로 가공물을 탄성패드에 누르면서 상대 운동시켜 가공물과 친화력이 우수한 부식액으로 화학적 제거를 함과 동시에 초미립자로 기계적 제거를 하는 것이다. ITO 박막의 평탄화를 위한 공정조건은 Polisher pressure 300 g/$cm^2$, 슬러리 유속 80 ml/min, 플레이튼속도 60 rpm으로 하였다. 위의 조건에 따라 공정을 진행 후 연마특성을 측정하였으며 이때 사용된 슬러리는 산화막에 사용되는 실리카슬러리와 금속연마용 슬러리인 EPL을 사용하였다. 연마율은 실리카 슬러리가 EPL슬러리에 비해 높음을 확인 하였다. CMP 공정에 의해 평탄화를 수행 할 경우 실리카슬러리와 EPL슬러리 모두 CMP전에 비해 돌출된 힐록들이 감소되었음을 알 수 있었다. 비균일도 특성은 모든 슬러리가 양호한 특성을 나타내었다. 평탄화된 박막의 표면과 거칠기 특성은 AFM(XE-200, PSIA Company) 을 이용하여 분석을 하였다.