• Title/Summary/Keyword: 금속화

Search Result 2,191, Processing Time 0.026 seconds

Properties of Cu Pillar Bump Joints during Isothermal Aging (등온 시효 처리에 따른 Cu Pillar Bump 접합부 특성)

  • Eun-Su Jang;Eun-Chae Noh;So-Jeong Na;Jeong-Won Yoon
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.31 no.1
    • /
    • pp.35-42
    • /
    • 2024
  • Recently, with the miniaturization and high integration of semiconductor chips, the bump bridge phenomenon caused by fine pitches is drawing attention as a problem. Accordingly, Cu pillar bump, which can minimize the bump bridge phenomenon, is widely applied in the semiconductor package industry for fine pitch applications. When exposed to a high-temperature environment, the thickness of the intermetallic compound (IMC) formed at the joint interface increases, and at the same time, Kirkendall void is formed and grown inside some IMC/Cu and IMC interfaces. Therefore, it is important to control the excessive growth of IMC and the formation and growth of Kirkendall voids because they weaken the mechanical reliability of the joints. Therefore, in this study, isothermal aging evaluation of Cu pillar bump joints with a CS (Cu+ Sn-1.8Ag Solder) structure was performed and the corresponding results was reported.

Low Temperature Growth of MCN(M=Ti, Hf) Coating Layers by Plasma Enhanced MOCVD and Study on Their Characteristics (플라즈마 보조 유기금속 화학기상 증착법에 의한 MCN(M=Ti, Hf) 코팅막의 저온성장과 그들의 특성연구)

  • Boo, Jin-Hyo;Heo, Cheol-Ho;Cho, Yong-Ki;Yoon, Joo-Sun;Han, Jeon-G.
    • Journal of the Korean Vacuum Society
    • /
    • v.15 no.6
    • /
    • pp.563-575
    • /
    • 2006
  • Ti(C,N) films are synthesized by pulsed DC plasma enhanced chemical vapor deposition (PEMOCVD) using metal-organic compounds of tetrakis diethylamide titanium at $200-300^{\circ}C$. To compare plasma parameter, in this study, $H_2$ and $He/H_2$ gases are used as carrier gas. The effect of $N_2\;and\;NH_3$ gases as reactive gas is also evaluated in reduction of C content of the films. Radical formation and ionization behaviors in plasma are analyzed in-situ by optical emission spectroscopy (OES) at various pulsed bias voltages and gas species. He and $H_2$ mixture is very effective in enhancing ionization of radicals, especially for the $N_2$. Ammonia $(NH_3)$ gas also highly reduces the formation of CN radical, thereby decreasing C content of Ti(C, N) films in a great deal. The microhardness of film is obtained to be $1,250\;Hk_{0.01}\;to\;1,760\;Hk_{0.01}$ depending on gas species and bias voltage. Higher hardness can be obtained under the conditions of $H_2\;and\;N_2$ gases as well as bias voltage of 600 V. Hf(C, N) films were also obtained by pulsed DC PEMOCYB from tetrakis diethyl-amide hafnium and $N_2/He-H_2$ mixture. The depositions were carried out at temperature of below $300^{\circ}C$, total chamber pressure of 1 Torr and varying the deposition parameters. Influences of the nitrogen contents in the plasma decreased the growth rate and attributed to amorphous components, to the high carbon content of the film. In XRD analysis the domain lattice plain was (111) direction and the maximum microhardness was observed to be $2,460\;Hk_{0.025}$ for a Hf(C,N) film grown under -600 V and 0.1 flow rate of nitrogen. The optical emission spectra measured during PEMOCVD processes of Hf(C, N) film growth were also discussed. $N_2,\;N_2^+$, H, He, CH, CN radicals and metal species(Hf) were detected and CH, CN radicals that make an important role of total PEMOCVD process increased carbon content.

Enhanced High-Temperature Performance of LiNi0.6Co0.2Mn0.2O2 Positive Electrode Materials by the Addition of nano-Al2O3 during the Synthetic Process (LiNi0.6Co0.2Mn0.2O2 양극 활물질의 합성공정 중 나노크기 알루미나 추가에 의한 고온수명 개선)

  • Park, Ji Min;Kim, Daeun;Kim, Hae Bin;Bae, Joong Ho;Lee, Ye-Ji;Myoung, Jae In;Hwang, Eunkyoung;Yim, Taeeun;Song, Jun Ho;Yu, Ji-Sang;Ryu, Ji Heon
    • Journal of the Korean Electrochemical Society
    • /
    • v.19 no.3
    • /
    • pp.80-86
    • /
    • 2016
  • High Ni content layered oxide materials for the positive electrode in lithium-ion batteries have high specific capacity. However, their poor electrochemical and thermal stability at elevated temperature restrict the practical use. A small amount of $Al_2O_3$ was added to the mixture of transition metal hydroxide and lithium hydroxide. The $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$ was simultaneously doped and coated with $Al_2O_3$ during heat-treatment. Electrochemical characteristics of modified $LiNi_{0.6}Co_{0.2}Mn_{0.2}O_2$ were evaluated by the galvanostatic cycling and the LSTA(linear sweep thermmametry) at the constant voltage conditions. The nano-sized $Al_2O_3$ added materials show better cycle performance at elevated temperature than that of micro-sized $Al_2O_3$. As the added amount of nano-$Al_2O_3$ increased, the thermal stability of electrode also enhanced, but the use of 2.5 mol% Al showed the best high temperature performance.

Comparison of Characteristics of Electrodeposited Lithium Electrodes Under Various Electroplating Conditions (다양한 전착조건에서 제작된 리튬 전극의 특성 연구)

  • Lim, Rana;Lee, Minhee;Kim, Jeom-Soo
    • Journal of the Korean Electrochemical Society
    • /
    • v.22 no.3
    • /
    • pp.128-137
    • /
    • 2019
  • A lithium is the lightest metal on the earth. It has some attractive characteristics as a negative electrode material such as a low reduction potential (-3.04 V vs. SHE) and a high theoretical capacity ($3,860mAh\;g^{-1}$). Therefore, it has been studied as a next generation anode material for high energy lithium batteries. The thin lithium electrode is required to maximize the efficiency and energy density of the battery, but the physical roll-press method has a limitation in manufacturing thin lithium. In this study, thin lithium electrode was fabricated by electrodeposition under various conditions such as compositions of electrolytes and the current density. Deposited lithium showed strong relationship between process condition and its characteristics. The concentration of electrolyte affects to the shape of deposited lithium particle. As the concentration increases, the shape of particle changes from a sharp edged long one to a rounded lump. The former shape is favorable for suppressing dendrite formation and the elec-trode shows good stripping efficiency of 92.68% (3M LiFSI in DME, $0.4mA\;cm^{-2}$). The shape of deposited particle also affected by the applied current density. When the amount of current applied gets larger the shape changes to the sharp edged long one like the case of the low concentration electrolyte. The combination of salts and solvents, 1.5M LiFSI + 1.5M LiTFSI in DME : DOL [1 : 1 vol%] (Du-Co), was applied to the electrolyte for the lithium deposition. The lithium electrode obtained from this electrolyte composition shows the best stripping efficiency (97.26%) and the stable reversibility. This is presumed to be due to the stability of the surface film induced by the Li-F component and the DOL effect of providing film flexibility.

The Effects of Co-substitution on the Magnetic Properties of Nanocrystalline Nd-Fe-B based Alloy Containing α-Fe as Main Phase (Co 치환이 α-Fe기 초미세결정립 Nd-Fe-B계 합금의 자기특성에 미치는 영향)

  • Cho, D.H.;Cho, Y.S.
    • Journal of the Korean Magnetics Society
    • /
    • v.12 no.1
    • /
    • pp.30-33
    • /
    • 2002
  • The Effects of Co-substitution in the nanocrystalline Nd-Fe-B-Mo-Cu alloys were investigated. $\alpha$-Fe based nanocrystalline Nd-Fe-B-Mo-Cu alloys were prepared by crystallization process of amorphous Nd-Fe-B-Mo-Cu alloy produced by rapid solidification process. The substitution of Co resulted in the decrease of grain size and improves the hard magnetic properties. The remanence, coercivity, and Curie temperature of nanocrystalline N $d_4$(F $e_{0.85}$ $Co_{0.15}$)$_{82}$ $B_{10}$M $o_3$Cu alloy showed more improved magnetic properties than those of Co-free alloy. The grain size was measured to be about 15 nm. The coercivity, remanence and maximum energy product were 239 kA/m, 1.41, and 103.5 kJ/ $m^3$, respectively, for the nanocrystalline N $d_4$(F $e_{0.85}$ $Co_{0.15}$)$_{82}$ $B_{10}$M $o_3$Cu alloy annealed for 0.6 ks at 640 $^{\circ}C$.

Development of Passive Millimeter-wave Security Screening System (수동 밀리미터파 보안 검색 시스템 개발)

  • Yoon, Jin-Seob;Jung, Kyung Kwon;Chae, Yeon-Sik
    • Journal of the Institute of Electronics and Information Engineers
    • /
    • v.53 no.7
    • /
    • pp.138-143
    • /
    • 2016
  • The designed and fabricated millimeter-wave security screening system receives radiation energy from an object and a human body. The imaging system consist of sixteen array antennas, sixteen four-stage LNAs, sixteen detectors, an infrared camera, a CCD camera, reflector, and a focusing lens. This system requires high sensitivity and wide bandwidth to detect the input thermal noise. The LNA module of the system has been measured to have 65.8 dB in average linear gain and 82 GHz~102 GHz in bandwidth to enhance the sensitivity for thermal noise, and to receive it over a wide bandwidth. The detector is used for direct current (DC) output translation of millimeter-wave signals with a zero bias Schottky diode. The lens and front-end of the millimeter-wave sensor are important in the system to detect the input thermal noise signal. The frequency range in the receiving sensitivity of the detectors was 350 to 400 mV/mW at 0 dBm (1 mW) input power. The developed W-band imaging system is effective for detecting and identifying concealed objects such as metal or plastic.

SO2 Adsorption Characteristics by Cellulose-Based Lyocell Activated Carbon Fiber on Cu Additive Effects (셀룰로오스계 라이오셀 활성탄소섬유의 구리 첨착에 의한 SO2 흡착특성 변화)

  • Kim, Eun Ae;Bai, Byong Chol;Lee, Chul Wee;Lee, Young-Seak;Im, Ji Sun
    • Applied Chemistry for Engineering
    • /
    • v.26 no.4
    • /
    • pp.394-399
    • /
    • 2015
  • In this study, the Cu catalyst decorated with activated carbon fibers were prepared for improving $SO_2$ adsorption properties. Flame retardant and heat treatments of Lyocell fibers were carried out to obtain carbon fibers with high yield. The prepared carbon fibers were activated by KOH solution for the high specific surface area and controlled pore size to improve $SO_2$ adsorption properties. Copper nitrate was also used to introduce the Cu catalyst on the activated carbon fibers (ACFs), which can induce various reactions in the process; i) copper nitrate promotes the decomposition reaction of oxygen group on the carbon fiber and ii) oxygen radical is generated by the decomposition of copper oxide and nitrates to promote the activation reaction of carbon fibers. As a result, the micro and meso pores were formed and Cu catalysts evenly distributed on ACFs. By Cu-impregnation process, both the specific surface area and micropore volume of carbon fibers increased over 10% compared to those of ACFs only. Also, this resulted in an increase in $SO_2$ adsorption capacity over 149% than that of using the raw ACF. The improvement in $SO_2$ adsorption properties may be originated from the synergy effect of two properties; (i) the physical adsorption from micro, meso and specific surface area due to the transition metal catalyst effect appeared during Cu-impregnation process and ii) the chemical adsorption of $SO_2$ gas promoted by the Cu catalyst on ACFs.

A Preliminary Study on the Feasibility of Copper Mesh as an Off-Gas Iodine Capturing Medium for Pyroprocessing (파이로프로세싱 배기체 요오드 포집을 위한 구리메쉬 적용 가능성에 대한 기초연구)

  • Jeon, Min Ku;Lee, Tae Kyo;Choi, Yong Taek;Eun, Hee-Chul;Choi, Jung Hoon;Park, Hwan-Seo;Hur, Jin-Mok;Ahn, Do-Hee
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
    • /
    • v.13 no.3
    • /
    • pp.235-242
    • /
    • 2015
  • A commercially available copper mesh was investigated as an iodine off-gas capturing medium for pyroprocessing, with an aim to replace costly silver based adsorbents. Theoretical calculation results suggested that the reaction between metallic copper and gaseous iodine will occur spontaneously to produce copper iodide in the temperature range of 100 ~ 500℃. The effect of the reaction temperature on iodine capturing efficiency was investigated by experimentation, and it was found that 5 and 6 wt% of iodine (initial mass 2.0 g) was captured by a single copper mesh (0.26 g) at 300 and 400℃, respectively. The repeated experimental results also suggested that copper utilization can be increased with the help of the spontaneous detachment of the reaction product (CuI) from a copper mesh. The formation of the CuI phase was confirmed using the X-ray diffraction technique, and the surface morphology of the reaction product was observed using scanning electron microscopy.

Safety Evaluation of Clearance of Radioactive Metal Waste After Decommissioning of NPP (원전해체후 규제해제 대상 금속폐기물에 대한 자체처분 안전성 평가)

  • Choi, Young-Hwan;Ko, Jae-Hun;Lee, Dong-Gyu;Hwang, Young-Hwan;Lee, Mi-Hyun;Lee, Ji-Hoon;Hong, Sang-Bum
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
    • /
    • v.18 no.2_spc
    • /
    • pp.291-303
    • /
    • 2020
  • The Kori-Unit 1 nuclear power plant, which is scheduled to be decommissioned after permanent shutdown, is expected to generate large amounts of various types of radioactive waste during the decommissioning process. Among these, nuclear reactors and internal structures have high levels of radioactivity and the dismantled structure must have the proper size and weight on the primary side. During decommissioning, it is important to prepare an appropriate and efficient disposal method through analysis of the disposal status and the legal restrictions on wastes generated from the reactors and internal structures. Nuclear reactors and internal structures generate radioactive wastes of various levels, such as medium, very low, and clearance. A radiation evaluation indicates that wastes in the clearance level are generated in the reactor head and upper head insulation. In this study, a clearance waste safety evaluation was conducted using the RESRAD-RECYCLE code, which is a safety evaluation code, based on the activation evaluation results for the clearance level wastes. The clearance scenario for the target radioactive waste was selected and the maximum individual and collective exposure doses at the time of clearance were calculated to determine whether the clearance criteria limit prescribed by the Nuclear Safety Act was satisfied. The evaluation results indicated that the doses were significantly low, and the clearance criteria were satisfied. Based on the safety assessment results, an appropriate metal recycle and disposal method were suggested for clearance, which are the subject of the deregulation of internal structures of nuclear power plant.

Synthesis and Electrochemical Properties of Li[Fe0.9Mn0.1]PO4 Nanofibers as Cathode Material for Lithium Ion Battery by Electrospinning Method (전기방사를 이용한 리튬 이차전지용 양극활물질 Li[Fe0.9Mn0.1]PO4 나노 섬유의 합성 및 전기화학적 특성)

  • Kim, Cheong;Kang, Chung-Soo;Son, Jong-Tae
    • Journal of the Korean Electrochemical Society
    • /
    • v.15 no.2
    • /
    • pp.95-100
    • /
    • 2012
  • $LiFePO_4$ is an attractive cathode material due to its low cost, good cyclability and safety. But it has low ionic conductivity and working voltage impose a limitation on its application for commercial products. In order to solve these problems, the iron($Fe^{2+}$)site in $LiFePO_4$ can be substituted with other transition metal ions such as $Mn^{2+}$ in pursuance of increase the working voltage. Also, reducing the size of electrode materials to nanometer scale can improve the power density because of a larger electrode-electrolyte contact area and shorter diffusion lengths for Li ions in crystals. Therefore, we chose electrospinning as a general method to prepare $Li[Fe_{0.9}Mn_{0.1}]PO_4$ to increase the surface area. Also, there have been very a few reports on the synthesis of cathode materials by electrospinning method for Lithium ion batteries. The morphology and nanostructure of the obtained $Li[Fe_{0.9}Mn_{0.1}]PO_4$ nanofibers were characterized using scanning electron microscopy(SEM). X-ray diffraction(XRD) measurements were also carried out in order to determine the structure of $Li[Fe_{0.9}Mn_{0.1}]PO_4$ nanofibers. Electrochemical properties of $Li[Fe_{0.9}Mn_{0.1}]PO_4$ were investigated with charge/discharge measurements, electrochemical impedance spectroscopy measurements(EIS).