Low Temperature Growth of MCN(M=Ti, Hf) Coating Layers by Plasma Enhanced MOCVD and Study on Their Characteristics |
Boo, Jin-Hyo
(Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
Heo, Cheol-Ho (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) Cho, Yong-Ki (School of Materials Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) Yoon, Joo-Sun (School of Materials Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) Han, Jeon-G. (School of Materials Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) |
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