• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.162-162
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• 1999

초고주파 집적회로의 핵심소자로 각광을 받고 있는 GaAs MESFET(MEtal-emiconductor)은 게이트 형성 공정이 가장 중요하며, WNx 내화금속을 이용한 planar 게이트 구조의 경우 임계전압(Vth:threshold voltage)의 균일도가 우수할 뿐만 아니라 특히 Side-wall을 이용한 self-align 게이트는 소오스 저항을 줄일 수 있어 고성능의 소자 제작을 가능하게 한다.(1) 본 연구의 핵심이 되는 Side-wall을 형성하기 위하여 PECVD법에 의한 SiOx 박막을 증착하고, 건식식각법을 이용하여 SiOx side-wall을 형성하였다. 이 공정을 이용하여 소오스 저항이 낮고 임계전압의 균일도가 우수한 고성능의 self-aligned gate MESFET을 제작하였다. 3inch GaAs 기판상에 이온주입법에 의한 채널 형성, d.c. 스퍼터링법에 의한 WNx 증착, PECVD법에 의한 SiOx 증착, MERIE(Magnetic Enhanced Reactive Ion Etcing)에 의한 Side-wall 형성, LDD(Lightly Doped Drain)와 N+ 이온주입, 그리고 RTA(Rapid Thermal Annealing)를 사용하여 활성화 공정을 수행하였다. 채널은 40keV, 4312/cm2로, LDD는 50keV, 8e12/cm2로 이온주입하였고, 4000A의 SiOx를 증착한 후 2500A의 Side-wall을 형성하였다. 옴익 접촉은 AuGe/Ni/Au 합금을 이용하였고, 소자의 최종 Passivation은 SiNx 박막을 이용하였다. 제작된 소자의 전기적 특성은 hp4145B parameter analyzer를 이용한 전압-전류 측정을 통하여 평가하였다. Side-wall 형성은 0.3$\mu\textrm{m}$ 이상의 패턴크기에서 수직으로 잘 형성되었고, 본 연궁에서는 게이트 길이가 0.5$\mu\textrm{m}$인 MESFET을 제작하였다. d.c. 특성 측정 결과 Vds=2.0V에서 임계전압은 -0.78V, 트랜스컨덕턴스는 354mS/mm, 그리고 포화전류는 171mA/mm로 평가되었다. 특히 본 연구에서 개발된 트랜지스터의 게이트 전압 변화에 따른 균일한 트랜스 컨덕턴스의 특성은 RF 소자로 사용할 때 마이크로 웨이브의 왜곡특성을 없애주기 때문에 균일한 신호의 전달을 가능하게 한다. 0.5$\mu\textrm{m}$$\times$100$\mu\textrm{m}$ 게이트 MESFET을 이용한 S-parameter 측정과 Curve fitting 으로부터 차단주파수 fT는 40GHz 이상으로 평가되었고, 특히 균일한 트랜스컨덕턴스의 경향과 함께 차단주파수 역시 게이트 바이어스, 즉 소오스-드레스인 전류의 변화에 따라 균일한 값을 보였다. 본 연구에서 개발된 Side-wall 공정은 게이트 길이가 0.3$\mu\textrm{m}$까지 작은 경우에도 사용가능하며, WNx self-align gate MEESFET은 낮은 소오스저항, 균일한 임계전압 특성, 그리고 높고 균일한 트랜스 컨덕턴스 특성으로 HHP(Hend-Held Phone) 및 PCS(Personal communication System)와 같은 이동 통신용 단말기의 MMICs(Monolithic Microwave Integrates Circuits)의 제작에 활용될 것으로 기대된다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.50-50
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• 1999

마이크로 공정을 이용한 초소형 정밀 기계는 공정 기술과 재료 기술의 발전에 의하여 더욱 소형화되고 있으며 특히 기능을 갖는 부분과 이 부분을 제어하는 주변회로의 on-chip화의 요구가 증가되기 시작하였다. 이와 같은 추세에 있어서의 문제점은 초소형 정밀기계 부품 소자의 구동을 위한 에너지원의 개발이다. 즉, 소자의 크기가 작아진 것에 부합되는 초소형의 전지가 필요하게 된 것이다. 따라서 보다 완전한 초소형 정밀 기계 및 마이크로 소자의 구현을 위하여 마이크로 소자와 혼성 (Hybrid) 되어 이용될 수 있는 고성능 및 초소형의 전지의 개발이 필수적이다. 초소형 전지의 구현을 위하여 Li계의 2차 전지를 선택하여 이를 박막화하고 반도체 공정을 도입할 수 있다. 이러한 전지를 박막형 2차 전지 또는 박막형 마이크로 전지(thin film Secondary Battery : TFSB or Thin Film Micro-Battery : TFMB)라 하며 이러한 2차 전지는 일반적인 벌크 전지와 동일하게 cathode/Electolyte/Anode의 구조를 갖는다. 박막의 특성상 전해질은 고상의 물질을 사용하는 것이 벌크형 2차 전지와 다른 점이다. TFSB의 성능은 주로 cathode에 의하여 결정되며 지금까지 많은 cathode 물질에 대한 연구 보고가 발표되고 있다. 반도체 공정을 이용한 TFMB의 제작시 무엇보다 중요한 점은 우수한 고상 전해질 및 anode 물질의 선택에 있다. 최근에 2차 전지를 위한 carbon계 anode를 대체할 수 있는 SnO에 대한 보고가 있는데 이는 한 개의 Sn 원자당 2개 이사의 Li가 반응하여 높은 용량을 갖는 전지의 제작이 가능하기 때문이다. Sno2의 anode는 매우 높은 충전용량을 갖는데 첫 번째 방전시에 Li2O를 생성하여 비가역적 반응을 나타내고 계속되는 충방전 동안 Li-Sn 합금이 생성되어 2차전지의 가역적 반응을 가능하게 한다. SnO2 는 대기중에서 Li 금속보다 안정하기 때문에 전지의 제작 공정 및 사용 면에서 매우 우수한 물질이지만 아직까지 SnO2 구조적 특성과 전지의 충, 방전 특성에 대한 관계의 규명을 위한 정확한 정설은 제시되고 있지 못하다. 본 연구에서는 TFSB anode 물질로써 SnOx박막을 상온에서 여러 전도성 콜렉터 위에 증착하여 그 충, 방전 특성을 보고하였다. 증착된 SnOx박막의 표면은 SEM, AFM으로 분석하였으며 구조의 분석은 XR와 Auger electron spectroscope로 하였다. 충, 방전 특성을 분석하기 위하여 리늄 foil을 대극과 참조 전극으로 하여 EC:DMC=1:1, 1M LiPF6 액체 전해질을 사용한 Half-Cell를 구성하여 100회 이상의 정전류 충, 방전 시험을 행하였다. Half-Cell test 결과 박막의 구조, 콜렉터의 종류 및 Sn/O비에 따라 서로 다른 충, 방전 거동을 나타내었다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.54-54
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• 1999

다이아몬드 합성시 질소 첨가는 Cn 화합물의 합성가능성을 비롯하여 다이아몬드의 질소 도핑, 성장 속도 및 결정성 변화 등 다양한 관점에서 중요한 의미를 가지고 있다. 본 연구에서는 다이아몬드의 일반적인 합성조건에서 질소를 첨가하여 합성된 막의 형상 및 상 변화에 대해 고찰하였다. 막은 다이아몬드 전처리시킨 Si 기판위에 microwave plasma CVD 장치를 이용하여 합성하였다. 유입되는 혼합가스(CH4+H2+N2)에서 N2 첨가량을 0-95%까지 변화시켰다. 이때 CH4 농도는 5%로 고정하였고, 합성온도는 90$0^{\circ}C$-115$0^{\circ}C$까지 변화시켰다. 이와 같이 합성된 막의 표면조직 및 성장 두께를 측정하기 위해 주사전자현미경을 이용하였다. 상의 분석은 Raman, XRD 및 TEM 분석을 이용하였으며, 조성분석을 위해 XPS 및 AES를 사용하였다. 질소 첨가량에 따라 합성된 막은 첨가하지 않은 경우에 다이아몬드 결정에서 시작하여 질소첨가에 따라 결정면이 깨지는 것으로 나타났다. 그러나 30%, 45%의 경우는 다시 결정면이 나타났다. 다량의 질소가 첨가되었을 때, 다시 결정면을 보이는 다이아몬드가 합성된 것은 매우 흥미로운 결과이다. 한편 질소와 메탄만의 기체하에서는 다시 결정면이 관찰되지 않았다. 이들 상의 구조는 XRD 및 TED 분석을 통해 모두 다이아몬드로 확인되었다. 기체내의 질소의 첨가에 관계없이 고상내에 질소는 확인되지 않았다. 따라서 이방법에 의한 CN 화합물의 합성은 힘든 것으로 보여진다. 이들 실험 결과를 근거로 온도 및 조성에 따른 기체의 열역학적 계산을 통하여 합성거동과의 연관성을 검토하였다. anode는 매우 높은 충전용량을 갖는데 첫 번째 방전시에 Li2O를 생성하여 비가역적 반응을 나타내고 계속되는 충방전 동안 Li-Sn 합금이 생성되어 2차전지의 가역적 반응을 가능하게 한다. SnO2 는 대기중에서 Li 금속보다 안정하기 때문에 전지의 제작 공정 및 사용 면에서 매우 우수한 물질이지만 아직까지 SnO2 구조적 특성과 전지의 충, 방전 특성에 대한 관계의 규명을 위한 정확한 정설은 제시되고 있지 못하다. 본 연구에서는 TFSB anode 물질로써 SnOx박막을 상온에서 여러 전도성 콜렉터 위에 증착하여 그 충, 방전 특성을 보고하였다. 증착된 SnOx박막의 표면은 SEM, AFM으로 분석하였으며 구조의 분석은 XR와 Auger electron spectroscope로 하였다. 충, 방전 특성을 분석하기 위하여 리늄 foil을 대극과 참조 전극으로 하여 EC:DMC=1:1, 1M LiPF6 액체 전해질을 사용한 Half-Cell를 구성하여 100회 이상의 정전류 충, 방전 시험을 행하였다. Half-Cell test 결과 박막의 구조, 콜렉터의 종류 및 Sn/O비에 따라 서로 다른 충, 방전 거동을 나타내었다.다. 거의 없었다. 5mTorr 일 때가 가장 좋았다.수 있음을 알 수 있었다. 그러므로, RNA바이러스의 하나인 BVDV의 viral replicon을 이용하여 다양한 종류의 포유동물 세포에 유전자 발현벡터로써 사용할 수 있음으로 post-genomics시대에 다양한 종류의 단백질 기능연구에 맡은 도움이 되리라 기대한다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(na

• Journal of Technologic Dentistry
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• v.32 no.3
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• pp.195-207
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• 2010

Purpose: The purpose of this study was to observe the microstructural changes of surface in the specimens, performing the shear bond strength testing. The currently most used non-precious alloys are nickel-chromium based alloys with or without beryllium. However, their biocompatibility has been questioned concerning possible damages to the health of the patient and professionals involved in the fabrication of prosthesis caused by long exposure to Ni and Be. An option to nickel-chromium alloys is the cobalt-chromium alloy, an alternative that does not sacrifice the physical properties of the metal porcelain systems. Studies in the animals substantially show that the cobalt-chromium alloys are relatively well tolerated, being therefore more biocompatible than the nickel-chromium alloys. Methods: Non-addition Be to nickel-chromium based alloy(Bellabond plus) and cobalt-chromium alloy which has been widely used(Wirobond C) fused with ZEO light porcelain classified control group and cobalt-chromium alloy which is developing alloy of Alphadent company in Korea(Alphadent alloy) fused with ZEO light porcelain classified experimental group. The specimens of $4mm{\times}4mm{\times}0.5mm$ were prepared as-cast and as-opaque to cast body to analyze the mechanical characteristic change, the microstructure of alloy surface. The phase change was used to observe through XRD analysis and OM/SEM was used to observe the surface of specimens as-cast and as-opaque to cast body. Chemical formation of their elements was measured with EDS. Then hardness was measured with Micro Vicker's hardness tester. Shear bond strength test thirty specimens of $10mm{\times}10mm{\times}2mm$ was prepared, veneered, 3mm high and 3mm in diameter, over the alloy specimens. The shear bond strength test was performed in a universal testing machine(UTM) with a cross head speed of 0.5mm/min. Ultimate shear bond strength data were analyzed with one-way ANOVA and the Scheffe's test (P<0.05). Within the limits of this study, the following conclusions were drawn: The X-ray diffraction analysis results for the as-cast and as-opaque specimens showed that the major relative intensity of Bellabond plus alloy were changed smaller than Wirobond C and Alphadent Co-Cr based alloys. Results: Microstructural analysis results for the opaque specimens showed all the alloys increased carbides and precipitation(PPT). Alphadent Co-Cr based alloy showed the carbides of lamellar type. The Vickers hardness results for the opaque specimens showed Wirobond C and Alphadent Co-Cr based alloys were increaser than before ascast, but Bellabond plus alloy relatively decreased. The mean shear bond strengths (MPa) were: 33.11 for Wirobond C/ZEO light; 25.00 for Alphadent Co-Cr alloy/ZEO light; 18.02 for Bellabond plus/ZEO light. Conclusion: The mean shear bond strengths for Co-Cr and Ni-Cr based alloy were significantly different. But the all groups showed metal-metal oxide modes in shear bond strengths test at the interface.

• Composites Research
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• v.13 no.6
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• pp.1-8
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• 2000

The fabrication Process of $Al_2O_{3p}$/AC8A composites by pressureless infiltration technique and the effects of additive Mg content and volume fraction of particulate reinforcement on mechanical and wear properties were investigated. It was found that the bending strength decreased with increasing volume fraction of $Al_2O_{3p}$ particles. Whereas hardness increased with volume fraction of $Al_2O_{3p}$ particles. The decrement of strength in case of high volume fraction of $Al_2O_{3p}$ particles was attributed to high porosity level. In terms of additive Mg content, $Al_2O_{3p}$/AC8A composites containing around 5~7wt% of additive Mg indicated the highest strength, and hardness values increased with additive Mg contents. Wear resistance of AC8A alloy were improved by reinforcement of $Al_2O_{3p}$ particles especially at high sliding velocity. Wear property of $Al_2O_{3p}$/AC8A composites and AC8A alloy exhibited different aspects. $Al_2O_{3p}$/AC8A composites indicated more wear loss than AC8A alloy at slow velocity region. However a transition point of wear loss was found at middle velocity region which shows the minimum wear loss and wear loss at high velocity region exhibited almost same value as at slow velocity region, whereas wear loss of AC8A alloy almost linearly increased with sliding velocity. It was found that $Al_2O_{3p}$/AC8A composites containing $Al_2O_{3p}$ volume fraction of 20% exhibited abrasive wear surface regardless of sliding velocity and $Al_2O_{3p}$/AC8A composites containing $Al_2O_{3p}$ volume fraction of 40% showed slightly adhesive wear surface at low sliding velocity, and it progressed to severe wear as increasing the sliding velocity.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.12
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• pp.513-518
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• 2019

Friction Stir Welding is a welding technique for metal materials that utilizes the heat generated by friction between the material to be welded and the welding tool that rotates at high speed. In this study, a numerical analysis method was used to analyze the change in the internal temperature of the welded material during friction stir welding. As the welding target material, AZ31 magnesium alloy was applied and the welding phenomenon was considered a flow characteristic, in which a melting-pool was formed. FLUENT was used as the numerical tool to perform the flow analysis. For flow analysis of the welding process, the welding material was assumed to be a high viscosity Newtonian fluid, and the boundary condition of the welding tool and the material was considered to be the condition that friction and slippage occur simultaneously. Analyses were carried out for various rotational speeds and the translational moving speed of the welding tool as variables. The analysis results showed that the higher the rotational speed of the welding tool and the slower the welding tool movement speed, the higher the maximum temperature in the material increases. Moreover, the difference in the rotational speed of the welding tool has a greater effect on the temperature change.

• Journal of Korea Foundry Society
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• v.32 no.1
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• pp.50-56
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• 2012

Fusion bonding of cast iron and Al alloy is an effective way to improve the properties such as low inertia, high efficiency and corrosion resistance in machinery parts. In case of fusion bonding, intermetallic compound layers are formed at the interface between cast iron and Al alloy interface. It is important to control the intermetallic compound layers for improving bonding strength. The formation behavior of intermetallic compound layer by heat treatment has been investigated. Heat treatment was performed at temperature from $600^{\circ}C$ to $800^{\circ}C$ with $100^{\circ}C$ interval for an hour to investigate the phase transformation during heat treatment. Heat treated specimens were analyzed by using FE-SEM, EPMA and EDS. The EPMA/WDS results revealed that various phases were formed at the interface, which exhibited 4 distinct intermetallic compound layers such as ${\tau}_6-Al_{4.5}FeSi$, ${\tau}_2-Al_3FeSi$, ${\tau}_{11}-Al_5Fe_2Si $and ${\eta}-Al_5Fe_2$. Also, fine precipitation of ${\tau}_1-Al_2Fe_3Si_3$ phase was formed between ${\tau}_{11}$ and ${\eta}$ layer. The phase fraction in intermetallic compound layer was changed by heat treatment temperature. At $600^{\circ}C$, intermetallic compound layer of ${\tau}_6$ phase was mainly formed with increasing heat treatment time. With increasing heat treatment temperature to $800^{\circ}C$, however, ${\tau}_2$ phase was mainly distributed in intermetallic compound layer. ${\tau}_1$ phase was remarkably decreased with increasing heat treatment time and temperature.

• The Journal of Korean Academy of Prosthodontics
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• v.37 no.6
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• pp.717-729
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• 1999

Although many studies on the cytotoxicity of the dental cast base metal alloys and their components have been carried out, the results are rather conflicting because of the different type of cells used and the various experimental procedures taken. Recently a number of scientists have claimed that it would be preferable to focus on the use of cells from relevant specific location of the human bodies. Consequently, the primary cultured oral keratinocyte derived from oral mucous along with nickel chloride and several of widely used dental cast base metal alloys(two Ni-Cr alloys and one Co-Cr alloy)in domestic were selected for this study, from which 1) The amounts of released metal ions were determined using atomic absorption spectrometry, 2) The cytotoxicity of nickel chloride and dental cast base metal alloys was evaluated via MTT assay, and finally, 3) The amounts of released metal ions and the cytotoxicity of nickel chloride were correlated with the cytotoxicity of dental cast base metal alloys And, the results were summarized as follows; 1. Nickel ion from Ni-Cr alloys and Cobalt ion from Co-Cr alloys resulted in maximum releasing rate during first 2h hours, followed by a decrease in releasing rate with time. Chromium ion were found to be minimal in all alloys. 2. In cytotoxic test. with $40{\mu}M,\;80{\mu}M$ of nickel chloride, there were observed an increase in the relative cell number compared to control samples after 24 hours. With $160{\mu}M$, there was found to be no difference in the relative cell number with control, except that 48 hour showed a increase in relative cell number. With $320{\mu}M$, the relative cell number remained constant and decreased after 48 hours, and with $640{\mu}M$, a continuing decrease in relative cell number was observed throughout test period. 3 The sensitivity of primary cultured oral epithelium to nickel was lower compared to the cells used in other studies. 4. CB-80 Soft and Regalloy showed no cytotoxicity to primary cultured oral epithelium and New crown resulted in a slight cytotoxicity. In conclusion, it was shown that the primary cultured oral keratinocytes could be applied successfully as testing cells in cytotoxicity test. Futhermore, the dental cast base metal alloys used in this study were found to be biocompatible.

• Journal of Conservation Science
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• v.26 no.2
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• pp.157-169
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• 2010

This study focused on the material characteristics and archaeometric relationship between the molten glass and bronze materials within the crucibles and gilt-bronze Bodhisattva statue excavated from the Ssangbukri site in Buyeo, Korea. Yellowish green to red brown vitreous material in the crucibles was identified as lead glass which contained scarce amount of BaO, and low $Al_2O_3$ and CaO. Metallic molten material was identified as bronze of copper-tin-lead alloy with low amount of impurities that indicated well-refined materials. Also, cassiterite was used for raw metal ore of tin. The Bodhisattva statue consisted of major copper with trace impurities in the core metal, and gold amalgam in the gilded layer. Though lead isotopic analysis showed contradictory results in each lead glass, bronze and Bodhisattva statue that required further examination, it could be stated that the statue was made in the Ssangbukri site based on the high-level technical skills of bronze production.

• Journal of the Korean institute of surface engineering
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• v.46 no.2
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• pp.68-74
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• 2013

For the coating of diamond films on WC-Co tools, a buffer interlayer is needed because Co catalyzes diamond into graphite. W and Ti were chosen as candidate interlayer materials to prevent the diffusion of Co during diamond deposition. W or Ti interlayer of $1{\mu}m$ thickness was deposited on WC-Co substrate under Ar in a DC magnetron sputter. After seeding treatment of the interlayer-deposited specimens in an ultrasonic bath containing nanometer diamond powders, $2{\mu}m$ thick nanocrystalline diamond (NCD) films were deposited at $600^{\circ}C$ over the metal layers in a 2.45 GHz microwave plasma CVD system. The cross-sectional morphology of films was observed by FESEM. X-ray diffraction and visual Raman spectroscopy were used to confirm the NCD crystal structure. Micro hardness was measured by nano-indenter. The coefficient of friction (COF) was measured by tribology test using ball on disk method. After tribology test, wear tracks were examined by optical microscope and alpha step profiler. Rockwell C indentation test was performed to characterize the adhesion between films and substrate. Ti and W were found good interlayer materials to act as Co diffusion barriers and diamond nucleation layers. The COFs on NCD films with W or Ti interlayer were measured as less than 0.1 whereas that on bare WC-Co was 0.6~1.0. However, W interlayer exhibited better results than Ti in terms of the adhesion to WC-Co substrate and to NCD film. This result is believed to be due to smaller difference in the coefficients of thermal expansion of the related films in the case of W interlayer than Ti one. By varying the thickness of W interlayer as 1, 2, and $4{\mu}m$ with a fixed $2{\mu}m$ thick NCD film, no difference in COF and wear behavior but a significant change in adhesion was observed. It was shown that the thicker the interlayer, the stronger the adhesion. It is suggested that thicker W interlayer is more effective in relieving the residual stress of NCD film during cooling after deposition and results in stronger adhesion.