Effects of Pt and Ir Electrodes on $Pb(Zr_xTi_{1-x})O_3$ Thin Films Deposited at Low Temperature(400$^{\circ}C$ -500$^{\circ}C$ ) by Metal-Organic Chemical Vapor Deposition with Liquid Delievery System
(액체수송 유기금속 화학증착법(LDS-MOCVD)에 의해 Pt전극과 Ir전극 위에 저온(400$^{\circ}C$ -500$^{\circ}C$ )증착된 $Pb(Zr_xTi_{1-x})O_3$ 박막의 특성분석)
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- Proceedings of the Korean Ceranic Society Conference
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- 2000.10a
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- pp.161.1-161
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- 2000